{"id":10736,"date":"2023-08-18T00:00:00","date_gmt":"2023-08-17T15:00:00","guid":{"rendered":"http:\/\/localhost:8080\/interconnection-for-advanced-packaging\/"},"modified":"2025-02-13T19:11:27","modified_gmt":"2025-02-13T10:11:27","slug":"interconnection-for-advanced-packaging","status":"publish","type":"post","link":"https:\/\/news.skhynix.co.kr\/interconnection-for-advanced-packaging\/","title":{"rendered":"\uc5b4\ub4dc\ubc34\uc2a4\ub4dc \ud328\ud0a4\uc9d5\uc744 \uacac\uc778\ud558\ub294 \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220\uc758 \uac00\uce58\uc640 SK\ud558\uc774\ub2c9\uc2a4 \ud328\ud0a4\uc9d5 \uae30\uc220 \ud601\uc2e0"},"content":{"rendered":"
\uc778\ud154\uc758 \uacf5\ub3d9 \ucc3d\uc5c5\uc790\uc778 \uace0\ub4e0 \ubb34\uc5b4\ub294 \uce69\uc758 \ud2b8\ub79c\uc9c0\uc2a4\ud130 \uc218\uac00 1~2\ub144\ub9c8\ub2e4 \ub450 \ubc30\uc529 \uc99d\uac00\ud560 \uac83\uc73c\ub85c \uc608\uce21\ud55c \ubc14 \uc788\ub2e4. \uc774\ub978\ubc14 \u2018\ubb34\uc5b4\uc758 \ubc95\uce59\u2019\uc774\ub77c\uace0 \ubd88\ub9ac\ub294 \uc774 \uc608\uce21\uc740 \ubbf8\uc138\ud654 \uae30\uc220\uc758 \ubc1c\uc804\uc5d0 \ub9de\ucdb0 \uc624\ub7ab\ub3d9\uc548 \uc9c0\ucf1c\uc838 \uc654\ub2e4. \ud558\uc9c0\ub9cc \ucd5c\uadfc \ubbf8\uc138\ud654\uc5d0 \ub300\ud55c \uae30\uc220 \ubc1c\uc804\uc774 \ud55c\uacc4\uc5d0 \ub2e4\ub2e4\ub974\uace0, \uadf9\uc790\uc678\uc120(EUV) \ub9ac\uc18c\uadf8\ub798\ud53c \uc2dc\uc2a4\ud15c\uacfc \uac19\uc740 \uace0\uac00\uc758 \uc7a5\ube44 \uc0ac\uc6a9\uc73c\ub85c \ube44\uc6a9\uae4c\uc9c0 \uc0c1\uc2b9\ud558\uba70 \ubb34\uc5b4\uc758 \ubc95\uce59\uc740 \ub354 \uc774\uc0c1 \uc720\ud6a8\ud558\uc9c0 \uc54a\uc744 \uc218\ub3c4 \uc788\ub2e4.<\/p>\n
\ud55c\ud3b8, \uc5ec\uc804\ud788 \uc2dc\uc7a5\uc5d0\uc11c\ub294 \uace0\uc131\ub2a5 \ubc18\ub3c4\uccb4 \uae30\uc220\uc744 \uc694\uad6c\ud558\uace0 \uc788\ub2e4. \uace0\uc6a9\ub7c9 \ud655\ubcf4\ub97c \uc704\ud55c \uc6e8\uc774\ud37c \uc9d1\uc801\ub3c4 \uae30\uc220 \ubc1c\uc804\uc758 \ud55c\uacc4\ub97c \ud574\uc18c\ud558\uba74\uc11c \uace0\uc131\ub2a5 \uc81c\ud488\uc758 \uc2dc\uc7a5 \uc694\uad6c\uc0ac\ud56d\uc744 \ucda9\uc871\uc2dc\ud0a4\uae30 \uc704\ud574 \ub4f1\uc7a5\ud55c \uc194\ub8e8\uc158\uc774 \ubc14\ub85c \uc5b4\ub4dc\ubc34\uc2a4\ub4dc \ud328\ud0a4\uc9d5(Advanced Packaging) \uae30\uc220\uc774\ub2e4.<\/p>\n
\uc5b4\ub4dc\ubc34\uc2a4\ub4dc \ud328\ud0a4\uc9d5\uc740 \ub9e4\uc6b0 \ubcf5\uc7a1\ud558\uace0 \ub2e4\uc591\ud55c \uae30\uc220\uc744 \ud3ec\ud568\ud558\uc9c0\ub9cc, \ud575\uc2ec\uc740 \ud328\ud0a4\uc9d5\uc5d0\uc11c\uc758 \uc5f0\uacb0 \uc989, \u2018\ud328\ud0a4\uc9d5 \uc778\ud130\ucee4\ub125\uc158(Interconnection)\u2019 \uae30\uc220\uc774\ub2e4. \uc774 \uae00\uc5d0\uc11c\ub294 \ud328\ud0a4\uc9d5 \uae30\uc220\uc758 \uc9c4\ud654 \ubc1c\uc804\uacfc \uc774\uc5d0 \uae30\uc5ec\ud558\uace0 \uc788\ub294 SK\ud558\uc774\ub2c9\uc2a4\uc758 \uae30\uc220\ub825 \ubc0f \uc131\uacfc\ub97c \ub2e4\ub904\ubcf4\uace0\uc790 \ud55c\ub2e4.<\/p>\n
\uc6b0\uc120 \ubc18\ub3c4\uccb4 \uce69\uc740 \uc81c\ud488\uc758 \uc131\ub2a5\uc744 \uace0\ub824\ud55c \u2018\ud328\ud0a4\uc9d5\u2019\uc744 \ud1b5\ud574 \uc804\ub825\uc744 \uacf5\uae09\ubc1b\uace0 \uc2e0\ud638\ub97c \uad50\ud658\ud558\uba70 \ub3d9\uc791\ud55c\ub2e4. \uadf8\ub798\uc11c \ud328\ud0a4\uc9d5 \uae30\uc220\ub825\uc5d0 \ub530\ub77c \uc81c\ud488\uc758 \uc18d\ub3c4, \ubc00\ub3c4, \uae30\ub2a5\uc5d0 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce58\uae30 \ub54c\ubb38\uc5d0 \ud328\ud0a4\uc9d5 \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220\uc740 \ub04a\uc784\uc5c6\uc774 \ubcc0\ud654\ud558\uace0 \ubc1c\uc804\ud558\uace0 \uc788\ub2e4.<\/p>\n
\ud339(Fab)\uc5d0\uc11c \ubbf8\uc138 \ud328\ud134\uc744 \uad6c\ud604\ud558\uae30 \uc704\ud574 \uc5ec\ub7ec\uac00\uc9c0 \uacf5\uc815\uc774 \uac1c\ubc1c\ub418\uc5c8\ub2e4\uba74, \ud328\ud0a4\uc9d5 \uacf5\uc815\uc5d0\uc11c\ub294 \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220\uc744 \ubc1c\uc804\uc2dc\ud0a4\uae30 \uc704\ud55c \uc804\ubc29\uc704\uc801\uc778 \uc5f0\uad6c\uac00 \uc9c4\ud589\ub418\uace0 \uc788\ub2e4. \uadf8 \uacb0\uacfc \uc544\ub798 \ub124 \uac00\uc9c0 \uc720\ud615\uc758 \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220\uc774 \uac1c\ubc1c\ub418\uc5b4 \uc624\uace0 \uc788\ub2e4.<\/p>\n
<\/p>\n
\u25b2 \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220 \uc720\ud615\ubcc4 \ub300\ud45c\uc801\uc778 \uc81c\ud488\uc758 \uc0ac\uc591(\uc608\uc2dc)<\/p>\n
1) \uc640\uc774\uc5b4 \ubcf8\ub529(Wire Bonding)<\/strong><\/p>\n \uc640\uc774\uc5b4 \ubcf8\ub529\uc740 \uac00\uc7a5 \uba3c\uc800 \uac1c\ubc1c\ub41c \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220\uc774\ub2e4. \ub300\ud45c\uc801\uc73c\ub85c \uae08, \uc740, \uad6c\ub9ac\uc640 \uac19\uc740 \uc804\uae30\uc801 \ud2b9\uc131\uc774 \uc6b0\uc218\ud55c \uc7ac\ub8cc\ub97c \uc640\uc774\uc5b4\ub85c \uc0ac\uc6a9\ud558\uc5ec \uce69\uacfc \uae30\ud310\uc744 \uc5f0\uacb0\ud558\ub294 \ub370 \uc0ac\uc6a9\ud588\ub2e4. \uc774\ub294 \ube44\uc6a9\uc801\uc778 \uce21\uba74\uc5d0\uc11c \uac00\uc7a5 \ud6a8\uc728\uc801\uc774\uace0 \uc2e0\ub8b0\uc131 \ub192\uc740 \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220\uc774\uc9c0\ub9cc, \uc5f0\uacb0\ub418\ub294 \ubb3c\ub9ac\uc801\uc778 \uae38\uc774\uac00 \uae38\uae30 \ub54c\ubb38\uc5d0 \ucd5c\uadfc \uace0\uc18d \ub3d9\uc791\uc774 \uc694\uad6c\ub418\ub294 \ucd5c\uc2e0 \uc7a5\uce58\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\ub2e4. \ub530\ub77c\uc11c \uc640\uc774\uc5b4 \ubcf8\ub529\uc740 \uace0\uc18d \ub3d9\uc791\uc744 \uc694\uad6c\ud558\uc9c0 \uc54a\ub294 \ubaa8\ubc14\uc77c D\ub7a8\uacfc \ub0b8\ub4dc \uce69\uc5d0 \uc8fc\ub85c \ucc44\uc6a9\ub418\uace0 \uc788\ub2e4.<\/p>\n 2) \ud50c\ub9bd \uce69 \ubcf8\ub529(Flip Chip Bonding)<\/strong><\/p>\n \ud50c\ub9bd \uce69 \ubcf8\ub529\uc740 \uc640\uc774\uc5b4 \ubcf8\ub529\ubcf4\ub2e4 \uc804\uae30 \uacbd\ub85c\uc758 \uae38\uc774\uac00 \uc218\uc2ed\ubd84\uc758 1\ub85c \uc9e7\uc544\uc838 \uace0\uc18d \ub3d9\uc791\uc774 \uac00\ub2a5\ud558\ub2e4. \uadf8\ub9ac\uace0 \uc774 \uae30\uc220\uc740 \uc6e8\uc774\ud37c \ub808\ubca8\uc5d0\uc11c \ud328\ud0a4\uc9c0\uac00 \uc9c4\ud589\ub418\uae30 \ub54c\ubb38\uc5d0 \uce69 \ub808\ubca8\uc5d0\uc11c \uc9c4\ud589\ub418\ub294 \uc640\uc774\uc5b4 \ubcf8\ub529\uc5d0 \ube44\ud574 \uc0dd\uc0b0\uc131\ub3c4 \uc6b0\uc218\ud558\ub2e4. \ub610\ud55c, \uce69 \uc804\uba74\uc5d0 \ubc94\ud504(Bump)*<\/span>\ub97c \ud615\uc131\ud560 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0 \ub354 \ub9ce\uc740 \uc218\uc758 \ub370\uc774\ud130 \ucd9c\uc785\uad6c(\uc774\ud558 I\/O)\ub97c \uc5f0\uacb0\ud574 \ub370\uc774\ud130 \ucc98\ub9ac \uc18d\ub3c4\uae4c\uc9c0 \ub192\uc77c \uc218 \uc788\ub2e4. \uc774\ub7f0 \uc7a5\uc810\uc73c\ub85c CPU, GPU \ubc0f \uace0\uc18d D\ub7a8 \uce69\uc758 \ud328\ud0a4\uc9d5\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub41c\ub2e4.<\/p>\n \uadf8\ub7ec\ub098 \ud50c\ub9bd \uce69 \ubcf8\ub529\uc740 \ub2e4\uc218\uc758 \uce69\uc744 \uc801\uce35\ud558\uae30 \uc5b4\ub824\uc6cc \uace0\ubc00\ub3c4\ub97c \ud544\uc694\ub85c \ud558\ub294 \uba54\ubaa8\ub9ac \uc81c\ud488\uc5d0 \ubd88\ub9ac\ud558\ub2e4. \ub610, \ubc94\ud504\uc640 \uc720\uae30 PCB \uc0ac\uc774 \uac04\uaca9\uc758 \ud55c\uacc4\ub85c \uc778\ud574 \ub354 \ub9ce\uc740 I\/O\ub97c \uc5f0\uacb0\ud558\ub294 \ub370\ub294 \uc81c\ud55c\uc774 \uc788\ub2e4. \uc774\ub7ec\ud55c \ud55c\uacc4\ub97c \uadf9\ubcf5\ud558\uae30 \uc704\ud574 TSV \ubcf8\ub529\uc774 \uac1c\ubc1c\ub418\uc5c8\ub2e4.<\/p>\n 3) TSV \ubcf8\ub529(Through Silicon Via Bonding)<\/strong><\/p>\n \uace0\ubc00\ub3c4\uac00 \uc694\uad6c\ub418\ub294 \uce69 \uac04 \uc5f0\uacb0 \uc2dc \ud50c\ub9bd \uce69 \ubcf8\ub529\uc744 \uc0ac\uc6a9\ud558\ub294 \ub300\uc2e0 TSV*<\/span> \ubcf8\ub529\uc740 \uce69\uc5d0 \uad6c\uba4d\uc744 \ub6ab\uace0 \uc804\uadf9\uc744 \uc5f0\uacb0\ud558\uae30 \uc704\ud574 \uae08\uc18d\uacfc \uac19\uc740 \uc804\ub3c4\uc131 \ubb3c\uc9c8\uc744 \ucc44\uc6cc \uce69\uc744 \uc218\uc9c1\uc73c\ub85c \uc5f0\uacb0\ud55c\ub2e4. TSV \ubcf8\ub529\uc774 \uc801\uc6a9\ub41c \uc6e8\uc774\ud37c\ub97c \uc81c\uc870\ud558\uace0, \ud328\ud0a4\uc9d5\uc744 \ud1b5\ud574 \uc0c1\ub2e8\uacfc \ud558\ub2e8\uc5d0 \ub9c8\uc774\ud06c\ub85c \ubc94\ud504\ub97c \ud615\uc131\ud558\uc5ec \uc774 \ubc94\ud504\ub4e4\uc744 \uc218\uc9c1 \uc5f0\uacb0\ud558\ub294 \ubc29\uc2dd\uc73c\ub85c \uc5ec\ub7ec \uce69\uc744 \uc313\uc744 \uc218 \uc788\ub2e4. \uc774 TSV\ub97c \ud1b5\ud574 \ubc94\ud504\ub97c \uc218\uc9c1\uc73c\ub85c \uc5f0\uacb0\ud558\ub294 \uac83\uc774 \uac00\ub2a5\ud574\uc84c\uae30 \ub54c\ubb38\uc5d0 \ub2e4\uc218\uc758 \uce69\uc744 \uc801\uce35\ud560 \uc218 \uc788\uc5c8\ub2e4.<\/p>\n \ucd08\uae30 TSV \ubcf8\ub529\uc740 4\ub2e8 \uc801\uce35\uc73c\ub85c \uc2dc\uc791\ud558\uc5ec 8\ub2e8\uc73c\ub85c \uc99d\uac00\ud588\uace0, \ucd5c\uadfc\uc5d0\ub294 12\ub2e8\uae4c\uc9c0 \uc801\uce35\ud560 \uc218 \uc788\uac8c \ub418\uc5c8\ub2e4. \uc62c\ud574 4\uc6d4 SK\ud558\uc774\ub2c9\uc2a4\ub294 \uc138\uacc4 \ucd5c\ucd08 12\ub2e8 \uc801\uce35 HBM3 \uac1c\ubc1c\uc5d0 \uc131\uacf5\ud588\ub2e4[\uad00\ub828\uae30\uc0ac<\/a>]. \uc77c\ubc18\uc801\uc73c\ub85c TSV\ub97c \ud65c\uc6a9\ud558\uc5ec \ubc94\ud504\ub97c \ubcf8\ub529\ud558\ub294 \uacf5\ubc95\uc740 \uc5f4\uc555\ucc29(Thermal Compression) \uae30\ubc18 \ube44\uc804\ub3c4\uc131\uc811\ucc29\ud544\ub984(Non-Conductive Film, NCF)*<\/span>\uc774\uc9c0\ub9cc SK\ud558\uc774\ub2c9\uc2a4\ub294 MR-MUF*<\/span> \uacf5\uc815\uc744 \uc801\uc6a9\ud558\uc5ec \uc801\uce35\uc5d0 \ud544\uc694\ud55c \uc555\ub825\uc744 \ub0ae\ucd9c \uc218 \uc788\uace0 MR(Mass Reflow)\uc758 \ud2b9\uc9d5\uc778 \uc790\uae30 \uc815\ub82c*<\/span>\uc774 \uac00\ub2a5\ud588\uae30\uc5d0, SK\ud558\uc774\ub2c9\uc2a4\ub294 \uc138\uacc4 \ucd5c\ucd08\ub85c 12\ub2e8 \uc801\uce35 HBM3 \uac1c\ubc1c\uc774\ub77c\ub294 \uc131\uacfc\ub97c \ub2ec\uc131\ud560 \uc218 \uc788\uc5c8\ub2e4[\uad00\ub828\uae30\uc0ac<\/a>].<\/p>\n \u25b2 \uc62c\ud574 4\uc6d4 SK\ud558\uc774\ub2c9\uc2a4\uac00 TSV \ubcf8\ub529 \ud328\ud0a4\uc9d5 \uae30\uc220\uc744 \uc801\uc6a9\ud574 \uc138\uacc4 \ucd5c\ucd08\ub85c \uac1c\ubc1c\ud55c 12\ub2e8 \uc801\uce35 HBM3<\/p>\n \uc9c0\uae08\uae4c\uc9c0 \uc124\uba85\ud55c \uc640\uc774\uc5b4 \ubcf8\ub529, \ud50c\ub9bd \uce69 \ubcf8\ub529, TSV \ubcf8\ub529\uc740 \ub2e4\uc591\ud55c \uc601\uc5ed\uc5d0\uc11c \uac01 \uc81c\ud488\uc758 \ubaa9\uc801\uc5d0 \ub9de\uac8c \uc801\uc6a9\ub418\uc5b4 \ud328\ud0a4\uc9d5 \uacf5\uc815\uc5d0\uc11c \ud65c\uc6a9\ub418\uace0 \uc788\ub2e4. \ud558\uc9c0\ub9cc, \ucd5c\uadfc\uc5d0\ub294 \uad6c\ub9ac\uc640 \uad6c\ub9ac\ub97c \uc9c1\uc811 \ubcf8\ub529\ud558\ub294 \uc0c8\ub85c\uc6b4 \uc778\ud130\ucee4\ub125\uc158 \uae30\uc220\uc774 \ub4f1\uc7a5\ud588\ub2e4. \uc774\ub294 \uad6c\ub9ac \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc774 \uadf8\uac83\uc774\ub2e4.<\/p>\n 4) \uce69\ub81b(Chiplet)*<\/span>\uc744 \ud65c\uc6a9\ud55c \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529(Hybrid Bonding)<\/strong><\/p>\n \u2018\ud558\uc774\ube0c\ub9ac\ub4dc(Hybrid)\u2019\ub77c\ub294 \uc6a9\uc5b4\ub294 \ub450 \uac00\uc9c0 \uc720\ud615\uc758 \uacc4\uba74(\uba74\uacfc \uba74 \uc0ac\uc774\uc758) \ubcf8\ub529*<\/span>\uc774 \ub3d9\uc2dc\uc5d0 \ud615\uc131\ub418\ub294 \uac83\uc744 \ub9d0\ud558\uae30 \uc704\ud574 \uc0ac\uc6a9\ub41c\ub2e4. \ud558\ub098\ub294 \uc0b0\ud654\ubb3c \uba74\uacfc \uba74 \uc0ac\uc774\uc758 \ubcf8\ub529\uc774\uace0, \ub2e4\ub978 \ud558\ub098\ub294 \uad6c\ub9ac\uc640 \uad6c\ub9ac \uc0ac\uc774\uc758 \ubcf8\ub529\uc774 \ub3d9\uc2dc\uc5d0 \uc77c\uc5b4\ub09c\ub2e4.<\/p>\n \uc0ac\uc2e4 \uc774 \uae30\uc220\uc740 \uc774\ubbf8 \uc218\ub144 \uc804\ubd80\ud130 CIS(CMOS Image Sensor)\ub97c \ub300\ub7c9 \uc0dd\uc0b0\ud558\ub294 \ub370 \uc801\uc6a9\ub418\uc5c8\ub358 \uae30\uc220\uc774\ub2e4. \ub2e4\ub9cc \uc774 \uae30\uc220\uc774 \ucd5c\uadfc \ub2e4\uc2dc \uc8fc\ubaa9\ubc1b\ub294 \uc774\uc720\ub294 \uce69\ub81b(Chiplet)\uc758 \uac1c\ub150\uc774 \ud655\ub300\ub418\uc5c8\uae30 \ub54c\ubb38\uc774\ub2e4. \uce69\ub81b\uc740 \uae30\ub2a5\ubcc4\ub85c \ubd84\ub9ac\ub41c \uac1c\ubcc4 \uce69\uc744 \ud328\ud0a4\uc9d5\uc73c\ub85c \ub2e4\uc2dc \uc5f0\uacb0\ud558\uc5ec \ub2e4\uc591\ud55c \uae30\ub2a5\uc744 \ud558\ub098\uc758 \uce69\uc73c\ub85c \uad6c\ud604\ud558\ub294 \uae30\uc220\uc774\ub2e4.<\/p>\n \uce69\ub81b\uc774 \uc8fc\ubaa9\ubc1b\ub294 \uc774\uc720\ub294 \ube44\uc6a9 \ud6a8\uc728\uc131 \uce21\uba74\uc5d0\uc11c\uc758 \uc7a5\uc810\uc774\ub2e4. \ud558\ub098\uc758 \uce69\uc5d0 \ubaa8\ub4e0 \uae30\ub2a5\uc744 \uad6c\ud604\ud558\ub824\uba74 \uce69 \ud06c\uae30\uac00 \ucee4\uc9c0\uace0, \uc774\ub294 \uc6e8\uc774\ud37c \uc218\uc728 \uc190\uc2e4\ub85c \uc774\uc5b4\uc9c4\ub2e4. \ub610\ud55c \uce69\uc758 \uc77c\ubd80 \uc601\uc5ed\uc740 \ube44\uc6a9\uc774 \ub9ce\uc774 \ub4dc\ub294 \ubcf5\uc7a1\ud55c \uae30\uc220 \uc601\uc5ed\uc774 \uc788\ub294 \ubc18\uba74, \uc800\ub834\ud55c \ub808\uac70\uc2dc \uae30\uc220\ub85c \uc644\uc131\ud560 \uc218 \uc788\ub294 \uc601\uc5ed\uc774 \uc788\ub294\ub370, \ub9cc\uc57d \uce69\uc774 \ubd84\ub9ac\ub418\uc9c0 \uc54a\ub294\ub2e4\uba74 \uc544\uc8fc \uc791\uc740 \uba74\uc801\uc5d0\ub9cc \ubcf5\uc7a1\ud55c \uae30\uc220\uc744 \ud544\uc694\ub85c \ud558\ub294 \uacbd\uc6b0\ub77c\ub3c4 \uce69 \uc804\uccb4\uc5d0 \ud574\ub2f9 \uae30\uc220\uc744 \uc801\uc6a9\ud574\uc57c \ud574\uc57c \ud558\uae30\uc5d0 \uc81c\uc870 \uacf5\uc815\uc774 \ube44\uc2f8\uc9c4\ub2e4. \ud558\uc9c0\ub9cc \uce69\ub81b \uae30\uc220\uc5d0\uc11c\ub294 \uce69 \uae30\ub2a5\uc744 \ubd84\ub9ac\ud560 \uc218 \uc788\uc5b4 \ud544\uc694\ud55c \uae30\uc220\uc744 \uc120\ubcc4\uc801\uc73c\ub85c \uc801\uc6a9\ud560 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0 \ube44\uc6a9 \uc808\uac10\uc774 \uac00\ub2a5\ud558\ub2e4.<\/p>\n \uce69\ub81b \uae30\uc220\uc758 \uac1c\ub150\uc740 10\uc5ec\ub144 \uc804\ubd80\ud130 \ub17c\uc758 \ub418\uc5c8\uc73c\ub098 \uce69\uc744 \uc0c1\ud638 \uc5f0\uacb0\ud560 \uc218 \uc788\ub294 \ud328\ud0a4\uc9d5 \uae30\uc220\uc774 \ubd80\uc871\ud558\uc5ec \ud65c\uc131\ud654\ub418\uc9c0 \uc54a\uc558\ub2e4. \uadf8\ub7ec\ub098 \ucd5c\uadfc C2W(Chip-to-Wafer)\uc758 \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529 \uae30\uc220\uc758 \ubc1c\uc804\uc73c\ub85c \uce69\ub81b \uae30\uc220 \ucc44\ud0dd\uc774 \uac00\uc18d\ud654\ub418\uae30 \uc2dc\uc791\ud588\ub2e4. C2W \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc740 \uc5ec\ub7ec \uac00\uc9c0 \uc7a5\uc810\uc744 \uac00\uc9c0\uace0 \uc788\ub2e4.<\/p>\n \uccab\uc9f8, \uc194\ub354 \ud504\ub9ac(Solder-Free) \ubcf8\ub529\uc774 \uac00\ub2a5\ud558\uc5ec \ubcf8\ub529 \ub808\uc774\uc5b4\uc758 \ub450\uaed8\ub97c \uc904\uc774\uace0 \uc804\uae30 \uacbd\ub85c\ub97c \uc9e7\uac8c \ud558\uc5ec \uc800\ud56d\uc744 \ub0ae\ucd9c \uc218 \uc788\ub2e4. \uc774\ub85c \uc778\ud574 \ub9c8\uce58 \ub2e8\uc77c \uce69\ucc98\ub7fc \uc131\ub2a5 \uc800\ud558 \uc5c6\uc774 \uace0\uc18d\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc788\ub2e4.<\/p>\n \ub458\uc9f8, \uad6c\ub9ac\uc640 \uad6c\ub9ac\ub97c \uc9c1\uc811 \uc5f0\uacb0\ud568\uc73c\ub85c\uc368 \ubc94\ud504\uc758 \uac04\uaca9\uc744 \ud68d\uae30\uc801\uc73c\ub85c \uc904\uc77c \uc218 \uc788\ub2e4. \ubcf4\ud1b5 \uc194\ub354\ub97c \uc0ac\uc6a9\ud560 \ub54c, \ubc94\ud504 \uac04\uaca9\uc744 10\u03bcm(\ub9c8\uc774\ud06c\ub85c\ubbf8\ud130) \uc774\ud558\ub85c \uad6c\ud604\ud558\uae30 \uc5b4\ub835\uc9c0\ub9cc, \uad6c\ub9ac-\uad6c\ub9ac \uc9c1\uc811 \ubcf8\ub529 \uacf5\uc815\uc744 \uc801\uc6a9\ud558\ub294 \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc758 \uacbd\uc6b0\uc5d0\ub294 \ubc94\ud504 \uac04\uaca9\uc744 \u03bcm\uc774\ud558 \uc218\uc900\uc73c\ub85c \uc904\uc77c \uc218 \uc788\uc5b4 \uce69\uc744 \uc124\uacc4\ud558\ub294 \ub370 \uc788\uc5b4 \uc720\uc5f0\uc131\uc774 \ub192\uc544\uc9c4\ub2e4.<\/p>\n \uc14b\uc9f8, \ud5a5\ud6c4 \ub354\uc6b1 \uc911\uc694\ud574\uc9c8 \ud328\ud0a4\uc9d5\uc758 \ud2b9\uc9d5 \uc911 \ud558\ub098\uc778 \ubc29\uc5f4 \ud2b9\uc131\uc774 \uac1c\uc120\ub41c\ub2e4. \ub9c8\uc9c0\ub9c9\uc73c\ub85c \uc55e\uc11c \uc5b8\uae09\ud55c \uac83\uacfc \uac19\uc774 \ubcf8\ub529 \uce35\uc758 \ub450\uaed8\uc640 \ubc94\ud504 \uac04\uaca9\uc774 \uc904\uc5b4\ub4e4\uba74\uc11c \ud328\ud0a4\uc9d5\uc758 \ud06c\uae30\ub97c \ud68d\uae30\uc801\uc73c\ub85c \uc904\uc77c \uc218 \uc788\ub2e4.<\/p>\n \uadf8\ub7ec\ub098 \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\ub3c4 \ud574\uacb0\ud574\uc57c \ud560 \uacfc\uc81c\uac00 \uc788\ub2e4. \uacac\uace0\ud55c \ud488\uc9c8\uc744 \ud655\ubcf4\ud558\uae30 \uc704\ud574\uc11c \uc774\ubb3c\uc9c8 \uc81c\uc5b4\ub97c \ub098\ub178\ubbf8\ud130 \ub2e8\uc704 \uc218\uc900\uc73c\ub85c \uac1c\uc120\ud574\uc57c \ud558\uace0, \ubcf8\ub529 \ub808\uc774\uc5b4\uc758 \ud3c9\ud0c4\ub3c4\ub97c \uc870\uc808\ud574\uc57c \ud560\uae4c\ub3c4 \ud070 \uacfc\uc81c\uc774\ub2e4. \ud55c\ud3b8, SK\ud558\uc774\ub2c9\uc2a4\ub294 \uc774\ub7ec\ud55c \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529 \uae30\uc220\uc744 HBM \uc81c\ud488\uc5d0 \uc801\uc6a9\ud574 12\ub2e8 \uc801\uce35 HBM\uc744 \ub118\uc5b4 \ub2e4\uc74c HBM \uc81c\ud488\uc5d0 \ud68c\uc0ac\uc758 \ucd5c\ucca8\ub2e8 \ud328\ud0a4\uc9d5 \uc194\ub8e8\uc158\uc744 \uc801\uc6a9\ud560 \uacc4\ud68d\uc774\ub2e4.<\/p>\n SK\ud558\uc774\ub2c9\uc2a4\ub294 12\ub2e8 \uc801\uce35 HBM\uc758 \ub2e4\uc74c \uc81c\ud488\uc778 \uace0\uc6a9\ub7c9, \uace0\uc801\uce35 HBM\uc5d0 \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc744 \uc801\uc6a9\ud560 \uacc4\ud68d\uc73c\ub85c \uae30\uc220\uc744 \uac1c\ubc1c\ud558\uace0 \uc788\ub2e4. \uc9c0\ub09c 2022\ub144\uc5d0\ub294 HBM2E\uc5d0 \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc744 \uc801\uc6a9\ud558\uc5ec 8\ub2e8 \uc801\uce35\uc744 \uad6c\ud604\ud558\uace0 \uc804\uae30 \ud14c\uc2a4\ud2b8\uae4c\uc9c0 \uc644\ub8cc\ud558\uc5ec \uae30\ubcf8\uc801\uc778 \uc2e0\ub8b0\uc131\uc744 \ud655\ubcf4\ud55c \ubc14 \uc788\ub2e4. \uc774\ub294 \uc9c0\uae08\uae4c\uc9c0 \ub300\ubd80\ubd84\uc758 \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc774 \ub2e8\uce35 \ub808\uc774\uc5b4 \ubcf8\ub529, \uc989 \ub450 \uac1c\uc758 \uce69\uc744 \uba74\ub300\uba74\uc73c\ub85c \uc801\uce35\ud558\ub294 \ubc29\uc2dd\uc73c\ub85c \uc774\ub8e8\uc5b4\uc9c4 \uac83\uacfc \ube44\uad50\ud574 \uc0c1\ub2f9\ud55c \uc131\uacfc\uc600\ub2e4. SK\ud558\uc774\ub2c9\uc2a4\uc758 HBM2E\ub294 \ud558\ub098\uc758 \uae30\ubcf8 \ub2e4\uc774\uc640 8\uac1c\uc758 D\ub7a8 \ub2e4\uc774\ub97c \uc131\uacf5\uc801\uc73c\ub85c \uc313\uc558\uace0, \uc774\ub294 2024\ub144 \ucd9c\uc2dc \uc608\uc815\uc778 \ub2e4\uc74c HBM \uc81c\ud488\uc5d0\uc11c \uc774 \uc131\uacfc\ub97c \ub6f0\uc5b4\ub118\uc744 \uac83\uc73c\ub85c \uc0dd\uac01\ub41c\ub2e4.<\/p>\n \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc740 \ubaa8\ub4e0 \ud328\ud0a4\uc9d5 \uc5c5\uacc4\uc5d0\uc11c \uac00\uc7a5 \uc8fc\ubaa9\ubc1b\uace0 \uc788\ub294 \uae30\uc220\ub85c \ub9ce\uc740 \ud68c\uc0ac\uac00 \ud574\ub2f9 \uae30\uc220 \ubc1c\uc804\uc744 \uc8fc\ub3c4\ud558\uae30 \uc704\ud574 \ub178\ub825\ud558\uace0 \uc788\ub2e4. \uc55e\uc11c \uc5b8\uae09\ud588\ub4ef\uc774, \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc740 \uc218\ub9ce\uc740 \uc7a5\uc810\uc744 \uac00\uc9c0\uace0 \uc788\uc9c0\ub9cc \uc5ec\uc804\ud788 \uac08 \uae38\uc774 \uba40\ub2e4. SK\ud558\uc774\ub2c9\uc2a4\ub294 \uc120\ub3c4\uc801\uc778 HBM \uae30\uc220\uc744 \ubc14\ud0d5\uc73c\ub85c \ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529 \uc678\uc5d0\ub3c4 \ub2e4\uc591\ud55c \ud328\ud0a4\uc9d5 \uae30\uc220\uc744 \uac1c\ubc1c\ud558\uc5ec \ud328\ud0a4\uc9d5 \uae30\uc220\uacfc \ud50c\ub7ab\ud3fc \uc194\ub8e8\uc158\uc744 \uc804\ub840 \uc5c6\ub294 \uc218\uc900\uc73c\ub85c \ub04c\uc5b4\uc62c\ub9ac\uba70 \ud328\ud0a4\uc9d5 \uae30\uc220 \ub9ac\ub354\uc2ed\uc744 \uacf5\uace0\ud788 \ud560 \uac83\uc774\ub2e4.<\/p>\n
\n*<\/span> TC NCF(Thermal Compression Non Conductive Film): \uce69 \uc0ac\uc774\uc5d0 NCF(\uc5d0\ud3ed\uc2dc\uc640 \uc544\ud06c\ub9b4 \uc18c\uc7ac\uac00 \uc11e\uc778)\ub77c\ub294 \uc808\uc5f0 \ud544\ub984\uc744 \ub367\ub300\uace0, \uc774\ub97c \uc5f4\uacfc \uc555\ub825\uc744 \uac00\ud574 \uc704 \ucabd\uc744 \uafb9 \ub20c\ub7ec\uc11c \ubd99\uc5ec \uc808\uc5f0 \ud544\ub984\uc774 \ub179\uc544 \uc811\ucc29\ub418\ub294 \uacf5\uc815\uc774\ub2e4.
\n*<\/span> MR-MUF(Mass Reflow Molded Underfil): \ubc18\ub3c4\uccb4 \uce69\uc744 \uc313\uc544 \uc62c\ub9b0 \ub4a4 \uce69\uacfc \uce69 \uc0ac\uc774 \ud68c\ub85c\ub97c \ubcf4\ud638\ud558\uae30 \uc704\ud574 \uc561\uccb4 \ud615\ud0dc\uc758 \ubcf4\ud638\uc7ac\ub97c \uacf5\uac04 \uc0ac\uc774\uc5d0 \uc8fc\uc785\ud558\uace0, \uad73\ud788\ub294 \uacf5\uc815\uc774\ub2e4.
\n*<\/span> \uc790\uae30 \uc815\ub82c(Self-alignment): MR-MUF \uacf5\uc815 \uc911\uc5d0 \ub9e4\uc2a4 \ub9ac\ud50c\ub85c\uc6b0\ub97c \ud1b5\ud574 \ub2e4\uc774\ub97c \uc801\uc808\ud55c \uc704\uce58\ub85c \uc7ac\ubc30\uce58\ud55c\ub2e4. \uc774 \uacfc\uc815\uc5d0\uc11c \uce69\uc5d0 \uc5f4\uc774 \uac00\ud574\uc9c0\ubbc0\ub85c \ud574\ub2f9 \ubc94\ud504\uac00 \uc6a9\ud574\ub41c \ud6c4 \uc62c\ubc14\ub978 \uc704\uce58\uc5d0\uc11c \uacbd\ud654\ub41c\ub2e4.<\/div>\n<\/p>\n
\n*<\/span> \uacc4\uba74 \ubcf8\ub529(Interfacial Bonding): \uc0c1\ud638 \uc811\ucd09\ud558\ub294 \ub450 \ubb3c\uccb4\uc758 \ud45c\uba74\uc774 \ubd84\uc790 \uac04 \ud798\uc5d0 \uc758\ud574 \uacb0\ud569\ub418\ub294 \ubcf8\ub529 \ud615\ud0dc\ub97c \ub73b\ud55c\ub2e4.<\/div>\n\ud558\uc774\ube0c\ub9ac\ub4dc \ubcf8\ub529\uc73c\ub85c \ud328\ud0a4\uc9d5 \uae30\uc220\uc744 \uace0\ub3c4\ud654\ud558\ub294 SK\ud558\uc774\ub2c9\uc2a4<\/h3>\n