{"id":13463,"date":"2023-01-13T00:00:00","date_gmt":"2023-01-12T15:00:00","guid":{"rendered":"http:\/\/localhost:8080\/jeonginseong-column-metallization\/"},"modified":"2025-02-14T17:32:33","modified_gmt":"2025-02-14T08:32:33","slug":"jeonginseong-column-metallization","status":"publish","type":"post","link":"https:\/\/news.skhynix.co.kr\/jeonginseong-column-metallization\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \uc804\uacf5\uc815 6\ud3b8 \uc644\uacb0\ud3b8] \ubc18\ub3c4\uccb4\uc5d0 \uc0dd\uba85\uc744 \ubd88\uc5b4\ub123\ub294 \uc5f0\uacb0, \u2018\uae08\uc18d\ubc30\uc120\u2019 (6\/6)"},"content":{"rendered":"
\ucd5c\uadfc \uc6b0\ub9ac\ub294 \uc218\ub9ce\uc740 \ubc18\ub3c4\uccb4 \uad00\ub828 \ub274\uc2a4\ub97c \uc811\ud558\uace0 \uc788\ub2e4. \ubc18\ub3c4\uccb4 \uad00\ub828 \uc18c\uc2dd\uc744 \uc811\ud558\uba74\uc11c \uc6b0\ub9ac\ub294 \uc790\uc5f0\uc2a4\ub808 \ubc18\ub3c4\uccb4\uac00 \ub2e8\uc21c\ud55c \uc218\ucd9c \uc5ed\uad70\uc744 \ub118\uc5b4\uc11c \uad6d\uac00 \uc548\ubcf4\uc5d0\uae4c\uc9c0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc911\uc694\ud55c \uc81c\ud488\uc774 \ub410\ub2e4\ub294 \uc810\uc744 \uc778\uc9c0\ud558\uae30 \uc2dc\uc791\ud588\ub2e4. \ubc18\ub3c4\uccb4\uc758 \uc911\uc694\ub3c4\uac00 \ub192\uc544\uc9d0\uc5d0 \ub530\ub77c \uc815\ubd80\ub97c \ube44\ub86f\ud574 \uc5ec\ub7ec \uae30\uc5c5\ub4e4\uc740 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uacbd\uc7c1\ub825\uc744 \ub192\uc774\uae30 \uc704\ud55c \ubc29\uc548\uc744 \uac15\uad6c\ud558\uace0 \uc788\ub2e4.<\/strong>
\n\u00a0<\/strong>\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uacbd\uc7c1\ub825\uc744 \ub192\uc774\ub294 \uccab \ubc1c\uac78\uc74c\uc740 \ub2f9\uc5f0\ud788 \ubc18\ub3c4\uccb4\uc5d0 \ub300\ud55c \uc9c0\uc2dd\uc744 \uacf5\uc720\ud558\ub294 \uac83\uc774\ub2e4. \uc774\uc5d0 \ubcf8\uc778 \uc5ed\uc2dc \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0 \ubab8\ub2f4\uc558\ub358 \uc77c\uc6d0\uc73c\ub85c\uc11c \ubc18\ub3c4\uccb4\uc5d0 \ub300\ud574 \uad00\uc2ec\uc774 \uc788\uac70\ub098 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0 \uc885\uc0ac\ud558\uace0\uc790 \ud558\ub294 \ucde8\uc5c5\uc900\ube44\uc0dd\ub4e4\uc744 \uc704\ud55c \uc9c0\uc2dd\uc744 \uacf5\uc720\ud558\uace0\uc790 \ud55c\ub2e4.<\/strong>
\n\u00a0<\/strong>\uc778\ud130\ub137\uc774\ub098 \uad50\uc7ac\uc5d0\uc11c \ucc3e\uc544\ubcfc \uc218 \uc788\ub294 \uae30\uc220\uc5d0 \uce58\uc911\ub41c \uc9c0\uc2dd\uc774 \uc544\ub2c8\ub77c \uac01 \uae30\uc220\uc774 \uac00\uc9c0\ub294 \uc5f0\uad00\uc131\uc744 \ud1b5\ud55c \uad00\uacc4\uc758 \uc911\uc2ec\uc73c\ub85c \ubc18\ub3c4\uccb4\ub97c \uc124\uba85\ud558\uace0\uc790 \ud55c\ub2e4. \u2018\ucef4\ud4e8\ud130\uc640 \ud2b8\ub79c\uc9c0\uc2a4\ud130\u2019\uc758 \uc8fc\uc81c\ub97c \uc2dc\uc791\uc73c\ub85c \uacf5\uc815\uacfc \uc0b0\ud654, \ud3ec\ud1a0, \uc2dd\uac01, \uc99d\ucc29, \uae08\uc18d\ubc30\uc120 \ub4f1 \ucd1d 6\ud3b8\uc758 \uc2dc\ub9ac\uc988\ub85c \ubc18\ub3c4\uccb4 \uae30\uc220\uc5d0 \ub300\ud55c \uc124\uba85\uc744 \uc774\uc5b4\uac08 \uc608\uc815\uc774\ub2e4.<\/strong>
\n\u00a0<\/strong><\/p>\n

\uc774\ub97c \uc77d\ub294 \ub3c5\uc790 \uc5ec\ub7ec\ubd84\uc740 \uac1c\ubcc4 \uc6a9\uc5b4\uc5d0 \ub108\ubb34 \uc5bd\ub9e4\uc774\uc9c0 \ub9d0\uace0 \u2018\uad00\uacc4\u2019\uc5d0 \uc8fc\ubaa9\ud558\uae38 \ubc14\ub780\ub2e4. \uae00\uc744 \uc77d\ub2e4 \ubcf4\uba74 \uac11\uc791\uc2a4\ub7fd\uac8c \uc804\ubb38 \uc6a9\uc5b4\ub4e4\uc774 \ub4f1\uc7a5\ud560 \uc218 \uc788\uc9c0\ub9cc, \uc774\ud574\uac00 \ub418\uc9c0 \uc54a\ub294\ub2e4\uba74 \uadf8\ub0e5 \ub118\uc5b4\uac00\ub3c4 \uc88b\ub2e4.<\/strong> (\ud544\uc790 \uc8fc)<\/strong><\/p>\n<\/div>\n

\ubc18\ub3c4\uccb4\uc758 \ud575\uc2ec, \u2018\uc5f0\uacb0\u2019<\/h3>\n

\uc55e\uc11c \uc0b4\ud3b4\ubcf8 \uc0b0\ud654, \ud3ec\ud1a0, \uc2dd\uac01, \uc99d\ucc29 \ub4f1\uc758 \uacfc\uc815\ub4e4\uc744 \uc5ec\ub7ec \ucc28\ub840 \uac70\uce58\uace0 \ub098\uba74 \ub4dc\ub514\uc5b4 \ubc18\ub3c4\uccb4 \uc18c\uc790\ub4e4\uc774 \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \ud615\uc131\ub41c\ub2e4. SK\ud558\uc774\ub2c9\uc2a4\uc640 \uac19\uc740 \uba54\ubaa8\ub9ac \ubc18\ub3c4\uccb4 \ud68c\uc0ac\ub77c\uba74 \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc640 \uce90\ud328\uc2dc\ud130*<\/span>\uac00 \ub298\uc5b4\uc11c\uac8c \ub410\uc744 \uac83\uc774\uace0, \ud30c\uc6b4\ub4dc\ub9ac\ub098 CPU \ud68c\uc0ac\ub77c\uba74 FinFET*<\/span>\uacfc \uac19\uc740 3\ucc28\uc6d0 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uac00 \uc6e8\uc774\ud37c \ubc14\ub2e5\uc5d0 \ub098\ub780\ud788 \uc790\ub9ac\ud558\uace0 \uc788\uc744 \uac83\uc774\ub2e4.<\/p>\n

*<\/span> \uce90\ud328\uc2dc\ud130(Capacitor) : \ucd95\uc804\uc9c0, \uc804\uae30\ub97c \uc800\uc7a5\ud560 \uc218 \uc788\ub294 \uc7a5\uce58\ub85c \ub2e4\uc218\uc758 \uc804\uc790\uc81c\ud488\uc5d0 \uc801\uc6a9\ub418\uc9c0\ub9cc \ubcf8 \uce7c\ub7fc\uc5d0\uc11c\ub294 \uba54\ubaa8\ub9ac \ubc18\ub3c4\uccb4\uc5d0\uc11c \ub370\uc774\ud130\uac00 \uc800\uc7a5\ub418\ub294 \uc7a5\uce58\ub97c \uc9c0\uce6d\ud55c\ub2e4.
\n*<\/span> FinFET : 3\ucc28\uc6d0 MOSFET\uc758 \uc77c\uc885\uc73c\ub85c, \uc804\ub958\uc758 \ud1b5\ub85c\uac00 \ubb3c\uace0\uae30 \uc9c0\ub290\ub7ec\ubbf8 \ubaa8\uc591\uacfc \ube44\uc2b7\ud558\uac8c \uc0dd\uacbc\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 1 : \uc18c\uc790 \uc601\uc5ed\uacfc \uae08\uc18d \ubc30\uc120 \uc601\uc5ed (\ucd9c\ucc98 : Cepheiden, \uc6d0\ubb38\ubcf4\uae30<\/a>)<\/p>\n

\ud558\uc9c0\ub9cc \uc774 \uc18c\uc790\ub4e4\uc740 \ud640\ub85c \uc788\uc5b4\uc11c\ub294 \uc544\ubb34 \uc758\ubbf8\uac00 \uc5c6\ub2e4. \uc804\uae30\uae30\ud310 \uc704\uc758 \uac1c\ubcc4 \uc18c\uc790\ub4e4\uc774 \ub0a9\ub55c \uc5c6\uc774\ub294 \uc791\ub3d9\ud558\uc9c0 \ubabb\ud558\ub4ef, \uc6e8\uc774\ud37c \uc704 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub4e4\ub3c4 \uc11c\ub85c \uc5f0\uacb0\ub418\uc9c0 \uc54a\uc73c\uba74 \uc544\ubb34 \uc5ed\ud560\ub3c4 \ud558\uc9c0 \ubabb\ud55c\ub2e4. \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub4e4\uc740 \uc678\ubd80 \uc804\uc6d0\uc744 \ubc1b\uc544 \ub3d9\uc791\ud560 \uc218 \uc788\uc5b4\uc57c \ud558\uba70, \ucc98\ub9ac\uac00 \ub05d\ub09c \ub370\uc774\ud130\ub97c \ub2e4\uc74c \uc601\uc5ed\uc73c\ub85c \uc62e\uaca8\uc8fc\ub294 \ub4f1 \ub2e4\uc591\ud55c \uc77c\uc744 \ud574\uc57c \ud55c\ub2e4. \ub530\ub77c\uc11c \uc18c\uc790\uc640 \uc804\uc6d0, \uc18c\uc790\uc640 \uc18c\uc790\ub97c \uc5f0\uacb0\ud574 \uc8fc\ub294 \uacf5\uc815\uc774 \ud544\uc694\ud558\ub2e4. \uadf8\ub9ac\uace0 \ubc18\ub3c4\uccb4 \uc5ed\uc2dc \u2018\uc804\uc790\u2019 \ud68c\ub85c\uc778 \ub9cc\ud07c, \uac01 \uc18c\uc790\ub4e4\uc740 \uc804\uae30\ub97c \uc774\uc6a9\ud574 \uc18c\ud1b5\ud574\uc57c \ud55c\ub2e4. \uc5ec\uae30\uc11c \ud544\uc694\ud55c \uac83\uc774 \u2018\uae08\uc18d\ubc30\uc120\u2019 \uacf5\uc815\uc774\ub2e4.<\/p>\n

\uadf8\ub9ac\uace0 \ub3d9\uc77c\ud55c \uc18c\uc790\ub97c \uc0ac\uc6a9\ud558\ub354\ub77c\ub3c4 \uadf8 \uc5f0\uacb0 \ud615\ud0dc\uc5d0 \ub530\ub77c\uc11c CPU, GPU \ub4f1 \ub2e4\uc591\ud55c \ud615\ud0dc\uc758 \ubc18\ub3c4\uccb4\uac00 \uc644\uc131\ub41c\ub2e4. \uae08\uc18d\ubc30\uc120 \uacf5\uc815\uc774\uc57c\ub9d0\ub85c \ubc18\ub3c4\uccb4\uc5d0 \u2018\ubaa9\uc801\u2019\uc744 \ubd80\uc5ec\ud558\ub294 \uacf5\uc815\uc778 \uac83\uc774\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 2 : \ud615\uc131\ub41c \uc18c\uc790\uce35(\ubd89\uc740\uc0c9)\uc744 \uc5f0\uacb0\ud558\ub294 \uae08\uc18d\ubc30\uc120(\ub178\ub780\uc0c9)(\uc77c\ubd80 \uad6c\uc870\ubb3c \uc0dd\ub7b5)(\ucd9c\ucc98 : \uc6d0\ubb38\ubcf4\uae30<\/a>)<\/p>\n

\uc774\ubc88\uc5d0 \uc0b4\ud3b4\ubcfc \uae08\uc18d\ubc30\uc120 \uacf5\uc815\uc740 \uc55e\uc5d0\uc11c \uc0b4\ud3b4\ubcf8 \ud3ec\ud1a0, \uc2dd\uac01, \uc99d\ucc29 \ub4f1\uacfc \uac19\uc740 \ub2e8\uc77c \uacf5\uc815\uc774 \uc544\ub2c8\ub2e4. \uc2e4\uc81c\ub85c\ub294 \ubc18\ub3c4\uccb4 \ud68c\uc0ac\ub4e4\uc740 \uae08\uc18d\ubc30\uc120\uc744 \ub9cc\ub4e4\uae30 \uc704\ud574 \ud3ec\ud1a0, \uc2dd\uac01 \ub4f1\uc758 \uacf5\uc815\uc744 \uac70\uce58\ub294 \uac83\uc774\ub2e4. \ub2e4\ub9cc, \uae08\uc18d \ubc30\uc120 \uacf5\uc815\uc5d0\uc11c\ub294 \uc804 \ub2e8\uacc4\uc778 \uc18c\uc790\uce35 \ud615\uc131 \ub54c\uc640\ub294 \ud2b9\uc131\uc774 \ub2e4\ub978 \ubb3c\uc9c8(\uae08\uc18d)\ub4e4\uc774 \ub9ce\uc774 \uc0ac\uc6a9\ub41c\ub2e4\ub294 \ucc28\uc774\uac00 \uc788\ub2e4.<\/p>\n

\uc989, \u2018\uc2dd\uac01 \uc7a5\ube44\u2019\uc640 \ube44\uc2b7\ud558\uac8c \u2018\uae08\uc18d\ubc30\uc120 \uacf5\uc815\uc6a9 \uc7a5\ube44\u2019\uac00 \uc874\uc7ac\ud558\ub294 \uac83\uc774 \uc544\ub2c8\ub77c, \uac01\uc885 \uacf5\uc815\uc6a9 \uc7a5\ube44\ub4e4\uc774 \uae08\uc18d \ubc30\uc120\uc744 \ub9cc\ub4dc\ub294 \ub370 \uc0ac\uc6a9\ub418\ub294 \uac83\uc774\ub2e4. \ub9cc\uc57d \ubb34\uc5b8\uac00 \uae4e\uc544\uc11c \uacf5\uac04\uc744 \ub9cc\ub4e4\uc5b4\uc57c \ud55c\ub2e4\uba74 \uc2dd\uac01\uc6a9 \uc7a5\ube44\uac00 \uc0ac\uc6a9\ub420 \uac83\uc774\uace0, \ube48 \uacf3\uc5d0 \ubb3c\uc9c8\uc744 \ucc44\uc6cc\uc57c \ud55c\ub2e4\uba74, \uc8fc\ub85c \uc99d\ucc29 \uc7a5\ube44\uac00 \uc0ac\uc6a9\ub420 \uac83\uc774\ub2e4. \uadf8\ub9ac\uace0 \uadf8 \uacfc\uc815 \uc0ac\uc774\ub9c8\ub2e4 \ud3ec\ud1a0 \uacf5\uc815\uc774 \ub2f9\uc5f0\ud788 \ub4e4\uc5b4\uac00\uac8c \ub41c\ub2e4.<\/p>\n

\ub3c4\uc120\uacfc \uc18c\uc790 \uc0ac\uc774 : \ucee8\ud0dd<\/h3>\n

\uae30\ud310\uc758 \uc18c\uc790\ub4e4\uc744 \uc5f0\uacb0\ud560 \ub54c\ub294 \uc804\uc120\uc744 \uc5f0\uacb0\ud55c \ub4a4 \ub0a9\ub55c\ud55c\ub2e4. \ud558\uc9c0\ub9cc \ubc18\ub3c4\uccb4\uc758 \uacbd\uc6b0, \uc544\ub798\uc5d0\uc11c \uc704\ub85c \uc313\uc544 \uc62c\ub9ac\ub294 \ubc29\uc2dd\uc744 \uc0ac\uc6a9\ud558\uae30 \ub54c\ubb38\uc5d0, \ud558\ubd80\uc758 \uc18c\uc790\uce35\uc744 \ud615\uc131\ud55c \ub2e4\uc74c, \uadf8 \uc704\uc5d0 \ucee8\ud0dd\uc774\ub77c\uace0 \ubd80\ub974\ub294 \uc18c\uc790\uc640 \uae08\uc18d\ubc30\uc120\uc758 \uc5f0\uacb0\ubd80\ub97c \ub9cc\ub4e4\uace0 \uadf8 \uc704\uc5d0 \uae08\uc18d\ubc30\uc120\uc744 \uc5f0\uacb0\ud55c\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 3 : \ucee8\ud0dd \ud615\uc131 \uc2dc \ud145\uc2a4\ud150\uc758 \uc6a9\ub3c4\uc640 \ubc30\ub9ac\uc5b4 \uba54\ud0c8 \uc608\uc2dc (\ucd9c\ucc98 : Cepheiden, \uc6d0\ubb38\ubcf4\uae30<\/a>)<\/p>\n

\uc0dd\uac01\ud558\uae30\uc5d0 \ub530\ub77c\uc11c\ub294 \ubb34\uc5c7\uc778\uac00 \uc774\uc0c1\ud560 \uc218\ub3c4 \uc788\ub2e4. \ucee8\ud0dd \uc5c6\uc774 \uadf8\ub0e5 \uae08\uc18d\uc744 \uc18c\uc790\uc640 \ubc14\ub85c \uc5f0\uacb0\ud558\uba74 \ub420 \uac83 \uac19\ub2e4. \ud558\uc9c0\ub9cc \uc5ed\uc2dc\ub098 \uc5ec\uae30\uc11c\ub3c4 \ubbf8\uc138\ud654\uac00 \ubb38\uc81c\ub97c \uc77c\uc73c\ud0a8\ub2e4. \uc55e\uc11c \uc99d\ucc29 \uacf5\uc815\uc5d0\uc11c \ube48\ud2c8\uc744 \ucc44\uc6b0\ub294 \ud2b9\uc131\uc778 \uac2d \ud544(Gap fill) \ub4f1\uc758 \ud2b9\uc131\uc744 \uc0b4\ud3b4\ubd24\ub294\ub370, \ubb38\uc81c\ub294 \uc54c\ub8e8\ubbf8\ub284 \ub4f1\uc758 \uae08\uc18d \ubb3c\uc9c8\ub4e4\uc740 \ud0c0\uacf5\uc774 \uae4a\uc744 \uacbd\uc6b0 \uc544\ubb34\ub9ac \uc99d\ucc29\uc744 \uc2dc\ub3c4\ud574\ub3c4 \ud2c8\uc774 \uc798 \uba54\uc6cc\uc9c0\uc9c0 \uc54a\ub294 \ud2b9\uc131\uc774 \uc788\ub2e4\ub294 \uac83\uc774\ub2e4. \uc774\ub7f4 \uacbd\uc6b0 \uc911\uac04\uc774 \ube48 \ubd88\ub7c9 \ub3c4\uc120\uc774 \ub41c\ub2e4. \ud574\ub2f9 \ubb38\uc81c\ub85c \uc778\ud574 \ub9cc\ub4e4\uc5b4\uc57c \ud558\ub294 \uae08\uc18d\ubc30\uc120\uc758 \uae4a\uc774\uac00 \uae4a\uc744 \uacbd\uc6b0(\uc18c\uc790\uce35\uacfc \uae08\uc18d\uce35\uc758 \uac70\ub9ac\uac00 \uba40 \uacbd\uc6b0), \ud145\uc2a4\ud150(W)\uacfc \uac19\uc774 \uac2d \ud544 \ud2b9\uc131\uc774 \uc88b\uc740 \ub2e4\ub978 \uae08\uc18d\uc744 \uc99d\ucc29\ud574 \ubbf8\ub9ac \ucc44\uc6cc \ub123\uc5b4\uc57c \ud55c\ub2e4. \uc774\uac83\uc774 \uc544\ub2c8\uba74, \uae08\uc18d \uc811\uc810\uc744 \ud615\uc131\ud55c \ub4a4 \uace0\uc5f4 \ucc98\ub9ac \uacf5\uc815\uc774 \ud544\uc694\ud55c\ub370, \uc0ac\uc6a9\ud558\ub824\ub294 \uae08\uc18d\uc774\ub098 \uae30\ud0c0 \ubb3c\uc9c8\ub4e4\uc774 \uc54c\ub8e8\ubbf8\ub284\uacfc \uac19\uc774 \uc5f4\uc5d0 \uc57d\ud55c \uacbd\uc6b0\uc5d0\ub3c4 \ud145\uc2a4\ud150\uc73c\ub85c \uc811\uc810\uc744 \ud615\uc131\ud558\uace0 \uadf8 \uc704\uc5d0 \uc54c\ub8e8\ubbf8\ub284 \ub3c4\uc120\uc744 \ubc30\uce58\ud55c\ub2e4.<\/p>\n

\uba38\ub9ac\uce74\ub77d \ub450\uaed8 \uc218\ucc9c\ubd84\uc758 1\ubc16\uc5d0 \ub418\uc9c0 \uc54a\ub294 \uc138\uacc4\uc5d0\uc11c\ub294 \uc774\ud574\ud558\uae30 \ud798\ub4e0 \uc77c\uc774 \uc77c\uc5b4\ub098\uba70, \uc774\uc5d0 \ub300\uc751\ud558\uae30 \uc704\ud574\uc120 \ub2e4\uc591\ud55c \ub300\uc548\uc744 \ub193\uace0 \ube44\uad50\ud574 \ucd5c\uc801\uc758 \uacb0\uc815\uc744 \ub0b4\ub824\uc57c \ud55c\ub2e4. \uc704\uc5d0\uc11c \uc124\uba85\ud55c \ud145\uc2a4\ud150\uc758 \uacbd\uc6b0 \uc7a5\uc810\ub9cc \uc788\ub294 \uac83 \uac19\uc9c0\ub9cc \uc2e4\uc81c\ub85c\ub294 \ubc30\uc120 \uc7ac\ub8cc\ub85c\uc11c\ub294 \uad6c\ub9ac\ub098 \uc54c\ub8e8\ubbf8\ub284\ubcf4\ub2e4 \ubd80\uc801\ud569\ud558\ub2e4. \ubc30\uc120 \uc800\ud56d\uc774 \ud06c\uae30 \ub54c\ubb38\uc5d0 \ud145\uc2a4\ud150\uc744 \ub0a8\uc6a9\ud560 \uacbd\uc6b0 \ubc18\ub3c4\uccb4 \uc804\uccb4 \uc804\ub825 \uc18c\ubaa8\uac00 \uc99d\uac00\ud558\uae30 \ub54c\ubb38\uc774\ub2e4.<\/p>\n

\ubc30\ub9ac\uc5b4 \uba54\ud0c8 : \uae08\uc18d\uacfc \uae08\uc18d\uc758 \u2018\uc800\ud56d\u2019\uc744 \uc904\uc774\ub2e4<\/h3>\n

\ud55c\ud3b8, \uc18c\uc790\uc640 \uc811\uc810 \uc0ac\uc774\uc5d0\ub294 \ubc30\ub9ac\uc5b4 \uba54\ud0c8(Barrier metal)\uc774\ub77c\ub294 \uae08\uc18d(\ud639\uc740 \uae08\uc18d \ud654\ud569\ubb3c)\uc774 \ud544\uc694\ud558\ub2e4. \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\uc11c \uae08\uc18d\uc774 \uc544\ub2cc \ubb3c\uc9c8\uacfc \uae08\uc18d\uc778 \ubb3c\uc9c8\uc744 \uc815\ud655\ud558\uac8c \uc811\ud569\ud558\uae30\ub294 \ub9e4\uc6b0 \uc5b4\ub824\uc6b4 \uc77c\uc774\ub2e4. \ud2b9\uc131\uc774 \ub2e4\ub978 \ub450 \ubb3c\uc9c8\uc774 \ubc14\ub85c \uc811\ud569\ub418\uba74 \uadf8 \uacbd\uacc4\uc5d0\uc11c \ud070 \uc800\ud56d\uc774 \ubc1c\uc0dd*<\/span>\ud558\uac8c \ub418\ub294\ub370, \uc774\ub294 \ubc18\ub3c4\uccb4\uc758 \uc804\ub825 \uc18c\ubaa8\ub97c \uc99d\uac00\uc2dc\ud0a8\ub2e4. \uc774\ub97c \ub9c9\uae30 \uc704\ud574\uc11c \uacbd\uacc4\uba74\uc774 \u2018\uc790\uc5f0\uc2a4\ub7fd\uac8c\u2019 \ube44\uae08\uc18d\uc5d0\uc11c \uae08\uc18d\uc73c\ub85c \ubcc0\ud558\ub294 \uac83\ucc98\ub7fc \ub9cc\ub4e4\uc5b4\uc57c \ud558\ub294\ub370, \uc5ec\uae30\uc5d0 \ubc30\ub9ac\uc5b4 \uba54\ud0c8\uc774 \uc0ac\uc6a9\ub41c\ub2e4. \ubc30\ub9ac\uc5b4 \uba54\ud0c8\uc744 \ub9cc\ub4e4\uae30 \uc704\ud574\uc120 \ubc18\ub3c4\uccb4 \uc18c\uc790\uc758 \uaddc\uc18c\uce35 \uc704\uc5d0 \ud2f0\ud0c0\ub284(Ti)\uc774\ub098 \ucf54\ubc1c\ud2b8(Co)\uc640 \uac19\uc740 \ubb3c\uc9c8\uc744 \uce60\ud574\uc900 \ub4a4, \uc774 \uae08\uc18d\ub4e4\uc774 \uaddc\uc18c \uc6d0\uc790\uc640 \ubc18\uc751\uc2dc\ud0a4\uba74 \ub41c\ub2e4. \uc774\ub7f0 \uacfc\uc815\uc744 Silicidation\uc774\ub77c \ubd80\ub974\uba70, \ud574\ub2f9 \ubd80\uc704\ub97c Contact Silicide\ub77c \ubd80\ub978\ub2e4.<\/p>\n

*<\/span> \ubb3c\ub9ac\uc801\uc73c\ub85c\ub294 \uae08\uc18d\uacfc \uaddc\uc18c \uc0ac\uc774 \uc804\ub3c4\ub300(Conduction Band)**<\/span> \ucc28\uc774\ub85c \uc778\ud574 \uc800\ud56d\uc774 \ubc1c\uc0dd\ud55c\ub2e4.
\n**<\/span> Cell Libarary: \uc804\ub3c4\ub300(Conduction Band) : \uace0\uccb4\uc758 \uc5d0\ub108\uc9c0\ub760 \uad6c\uc870\uc5d0\uc11c \uc5d0\ub108\uc9c0 \uac04\uaca9\uc73c\ub85c \ubd84\ub9ac\ub41c \ub450 \ub760 \uac00\uc6b4\ub370 \uc704\uc758 \ub760\ub85c \uace0\uccb4\uc758 \uc804\ub3c4\uc5d0 \uae30\uc5ec\ud55c\ub2e4.<\/p>\n

\uadf8\ubfd0\ub9cc \uc544\ub2c8\ub77c \ubc30\ub9ac\uc5b4 \uba54\ud0c8\uc740 \uacf5\uc815 \uc9c4\ud589 \uacfc\uc815\uc5d0\uc11c \uc6d0\uce58 \uc54a\uc740 \uc18c\uc790 \uc190\uc0c1\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574\uc11c\ub3c4 \uc0ac\uc6a9\ud55c\ub2e4. \uc608\ub97c \ub4e4\uc5b4 \uc54c\ub8e8\ubbf8\ub284\uc758 \uacbd\uc6b0, \uc6e8\uc774\ud37c\uc758 \uc8fc\uc7ac\ub8cc\uc778 \uaddc\uc18c(Si)\uc640 \ubc18\uc751\ud558\ub824\ub294 \uc131\uc9c8\uc774 \uc788\ub2e4. \ub9cc\uc57d \uc54c\ub8e8\ubbf8\ub284 \uae08\uc18d \ubc30\uc120\uc774 \uc18c\uc790\uce35\uc758 \uaddc\uc18c\ub97c \uac00\uae4c\uc774 \uc9c0\ub098\uac00\uc57c \ud558\ub294 \uc0c1\ud669\uc774\ub77c\uba74, \ub458 \uc0ac\uc774\ub97c \ud2f0\ud0c0\ub284 \ud654\ud569\ubb3c \ub4f1\uc73c\ub85c \ucc28\ub2e8\ud574 \uc904 \ud544\uc694\uac00 \uc788\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 4 : \uc54c\ub8e8\ubbf8\ub284 \ubc30\uc120 \uc0ac\uc6a9 \uc2dc \ubc30\ub9ac\uc5b4 \uba54\ud0c8 \uc5ed\ud560<\/p>\n

\ud55c\ud3b8, \uc54c\ub8e8\ubbf8\ub284\uc758 \ud55c\uacc4\ub85c \uad6c\ub9ac \ub3c4\uc120\uc758 \uc0ac\uc6a9\uc774 \ub298\uc5b4\ub098\uba74\uc11c \ubc30\ub9ac\uc5b4 \uba54\ud0c8\uc758 \uc5ed\ud560\uc774 \ub298\uc5b4\ub098\uac8c \ub410\ub2e4. \uad6c\ub9ac\ub294 \uc54c\ub8e8\ubbf8\ub284\ubcf4\ub2e4 \ud55c\uc220 \ub354 \ub5a0\uc11c \uaddc\uc18c\ubcf4\ub2e4 \ub354 \uc548\uc815\uc801\uc778 \uc774\uc0b0\ud654\uaddc\uc18c(SiO2<\/sub>) \uc0ac\uc774\ub85c\ub3c4 \ud655\uc0b0\ud574 \ub4e4\uc5b4\uac00\ub294 \ud2b9\uc9d5\uc774 \uc788\ub2e4. \uc774\ub97c \ubc29\uce58\ud558\uac8c \ub418\uba74 \uc804\ub958\ub97c \ucc28\ub2e8\ud574\uc57c \ud560 \uc0b0\ud654\ub9c9\uc774 \uad6c\ub9ac \uc6d0\uc790\ub97c \ud3ec\ud568\ud558\uac8c \ub3fc \uc804\ub958 \ub204\uc124\uc774 \ubc1c\uc0dd\ud55c\ub2e4. \uc774\uac83\uc744 \ub9c9\uae30 \uc704\ud574 \ud0c4\ud0c8\ub968(Ta)\uc774\ub77c\ub294 \uae08\uc18d\uc744 \uc774\uc6a9\ud574 \uad6c\ub9ac\uc640 \uc18c\uc790\uce35\uc758 \uacbd\uacc4\ub97c \uc9c0\uc5b4\uc918\uc57c \ud55c\ub2e4.<\/p>\n

\ub3c4\uc120 : \uc18c\uc790\uc640 \uc18c\uc790 \uc0ac\uc774 \uc804\uc120<\/h3>\n

\uc774\uc81c \ub0a9\ub55c\uc5d0 \ud574\ub2f9\ud558\ub294 \ubd80\ubd84\uc744 \ub9cc\ub4e4\uc5c8\uc73c\ubbc0\ub85c, \uc804\uc120\uc744 \uc5f0\uacb0\ud574\uc57c \ud55c\ub2e4. \ubc18\ub3c4\uccb4\uc5d0\uc11c \uc804\uc120\uc744 \uc5f0\uacb0\ud558\ub294 \uacfc\uc815\uc740 \uc77c\ubc18\uc801\uc778 \uc804\uc120\uc744 \ub9cc\ub4dc\ub294 \uacfc\uc815\uacfc \ub9e4\uc6b0 \uc720\uc0ac\ud558\ub2e4. \uc77c\ub2e8 \ud53c\ubcf5\uc5d0 \ud574\ub2f9\ud558\ub294 \ubd80\ubd84\uc744 \uba3c\uc800 \ub9cc\ub4e4\uc5b4\uc57c \ud55c\ub2e4. \uc77c\ubc18 \uc804\uc790\ud68c\ub85c\uc758 \uacbd\uc6b0, \uc644\uc131\ub41c \uc804\uc120\uc744 \uac00\uc838\uc640 \uc5f0\uacb0\ud558\ub294 \uac83\uc774\uc9c0\ub9cc, \ubc18\ub3c4\uccb4\ub294 \ud68c\ub85c \uc704\uc5d0\uc11c \uc804\uc120\uc744 \u2018\ub9cc\ub4e4\uc5b4 \ub0b4\uc57c\u2019\ud55c\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 5 : \ubc18\uc751\uc131 \uc774\uc628 \uc2dd\uac01(RIE) Damascene \uacf5\uc815 \ube44\uad50(\ucd9c\ucc98 : \u321c\ub3c4\uc11c\ucd9c\ud310\ud55c\uc62c\ucd9c\ud310\uc0ac [\ubc18\ub3c4\uccb4 \uc81c\uc870\uae30\uc220\uc758 \uc774\ud574 293p])<\/p>\n

\uc774 \uacfc\uc815\uc740 \ub9cc\ub4e4\uace0\uc790 \ud558\ub294 \uae08\uc18d\uc758 \uc885\ub958\uc5d0 \ub530\ub77c \ub9e4\uc6b0 \ub2e4\ub974\uac8c \uc804\uac1c\ub41c\ub2e4. \ub9cc\uc57d \uc99d\ucc29\ud560 \uae08\uc18d\uc774 \uc54c\ub8e8\ubbf8\ub284\uc774\ub77c\uba74, \uc55e\uc5d0\uc11c \ubc30\uc6e0\ub358 \uc2dd\uac01\uacfc \uc99d\ucc29\uc744 \ud1b5\ud574 \ub3c4\uc120\uc744 \ub9cc\ub4e4 \uc218 \uc788\ub2e4. \uc77c\ub2e8 \uc6e8\uc774\ud37c \ud45c\uba74 \uc804\uccb4\uc5d0 \uae08\uc18d \ub9c9\uc744 \ubc14\ub978 \ub4a4, \uc704\uc5d0 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub3c4\ud3ec\ud558\uace0 \ub178\uad11\uc744 \ud558\ub294 \uac83\uc774\ub2e4. \uc774\ud6c4 \ud544\uc694 \uc5c6\ub294 \uc54c\ub8e8\ubbf8\ub284\uc744 \uae4e\uc544\ub0b8 \ub4a4, \uc54c\ub8e8\ubbf8\ub284 \uc8fc\ubcc0\uc5d0 \uac01\uc885 \uc720\uc804\uccb4(\uc808\uc5f0 \ubb3c\uc9c8)\ub97c \ucc44\uc6cc \ub123\uac8c \ub41c\ub2e4.<\/p>\n

\uad6c\ub9ac\uc758 \uacbd\uc6b0\ub294 \uae08\uc18d\uacfc \uc720\uc804\uccb4 \uc99d\ucc29 \uc21c\uc11c\uac00 \ubc18\ub300\ub2e4. \uad6c\ub9ac\ub294 \ubc30\uc120\uc744 \ub9cc\ub4e4 \ub54c \uc720\uc804\uccb4\ub97c \uba3c\uc800 \uc99d\ucc29\ud55c \ub4a4, \ud3ec\ud1a0 \uacf5\uc815\uc744 \uc774\uc6a9\ud574 \uc720\uc804\uccb4\ub97c \uc2dd\uac01\ud55c\ub2e4. \uc774\ud6c4 \uad6c\ub9ac \uc528\ub4dc \ub808\uc774\uc5b4\ub97c \ub9cc\ub4e0 \ub4a4, \uad6c\ub9ac\ub97c \uc720\uc804\uccb4 \uc0ac\uc774\uc5d0 \ucc44\uc6cc \ub123\uace0 \ub0a8\ub294 \uad6c\ub9ac\ub97c \uac08\uc544\uc11c \uc5c6\uc560\ub294 \uacfc\uc815\uc744 \uac70\uce5c\ub2e4.<\/p>\n

\ud639\uc790\ub294 \uae08\uc18d \uba3c\uc800 \ud639\uc740 \uc720\uc804\uccb4 \uba3c\uc800, \ub450 \uacf5\uc815\uc758 \uc21c\uc11c\ub9cc \ubc14\ub010 \uac83\uc774 \uc65c \uc911\uc694\ud55c\uc9c0 \uad81\uae08\ud560 \uac83\uc774\ub2e4. \ud558\uc9c0\ub9cc \uc55e\uc11c \uc124\uba85\ud588\ub4ef \uad6c\ub9ac\ub97c \uc4f0\uae30 \uc704\ud574\uc11c\ub294 \uc528\ub4dc \ub808\uc774\uc5b4\ub97c \ub3c4\ud3ec\ud574\uc57c \ud558\ub294\ub370, \uc774\ub97c \uc704\ud55c \uc0c8\ub85c\uc6b4 \uc99d\ucc29 \uacf5\uc815\uc774 \ucd94\uac00\ub3fc\uc57c \ud588\uc73c\uba70, \uc54c\ub8e8\ubbf8\ub284\uc5d0\uc11c\ub294 \uc0ac\uc6a9\ud558\uc9c0 \uc54a\ub358 \uc804\uae30\ub3c4\uae08(Electroplating) \uae30\ubc95\ub3c4 \ub3c4\uc785\ud574\uc57c \ud588\ub2e4. \uc54c\ub8e8\ubbf8\ub284\uc758 \ud55c\uacc4\ub97c \ub118\uc5b4\uc11c\uae30 \uc704\ud574\uc11c\ub294 \uc2e0\ubb3c\uc9c8\uc778 \uad6c\ub9ac(Cu)\ubfd0 \uc544\ub2c8\ub77c \uc774\uc5d0 \ub9de\ub294 \uc218\ub9ce\uc740 \uacf5\uc815\uc774 \uac1c\ubc1c\ub3fc\uc57c \ud588\ub2e4. 100\ub144 \uc804 \uc0ac\ub78c\ub4e4\ub3c4 \uc54c\ub8e8\ubbf8\ub284\ubcf4\ub2e4 \uad6c\ub9ac\uac00 \uc804\uae30\uc801 \ud2b9\uc131\uc774 \uc88b\ub2e4\ub294 \uac83\uc740 \uc54c\uace0 \uc788\uc5c8\ub2e4. \ub2e4\ub9cc, \ubc18\ub3c4\uccb4 \ud68c\uc0ac \uc785\uc7a5\uc5d0\uc11c \u2018\ub354 \uc2f8\uace0, \ub9ce\uc740 \ud2b8\ub79c\uc9c0\uc2a4\ud130\u2019\uc5d0 \uc801\uc6a9\ud558\uae30 \uc704\ud574\uc120 \uc81c\uc870 \uacf5\uc815\uc758 \ubc1c\uc804\ub3c4 \ud544\uc694\ud588\ub2e4.<\/p>\n

\uae08\uc18d\ubc30\uc120\uc740 \uc704\ucabd\uc73c\ub85c \uac08\uc218\ub85d \ub450\uaebc\uc6cc\uc9c4\ub2e4. \ubc18\ub3c4\uccb4 \uc18c\uc790\ub4e4 \uc911, \uc790\uc8fc, \ub9ce\uc740 \ub370\uc774\ud130\ub97c \uc8fc\uace0\ubc1b\uc544\uc57c \ud558\ub294 \uc18c\uc790\ub4e4\uc740 \ubb3c\ub9ac\uc801\uc73c\ub85c \uac00\uae4c\uc6b4 \uac70\ub9ac\uc5d0 \ubc30\uce58\ud574\uc57c \uc720\ub9ac\ud558\ub2e4. \ud558\uc9c0\ub9cc \uc8fc\uace0\ubc1b\ub294 \ube48\ub3c4\uac00 \ub192\uc9c0 \uc54a\uc740 \uc18c\uc790\ub4e4\uc740 \uba3c \uac70\ub9ac\ub97c \uc5f0\uacb0\ud574\ub3c4 \uc0c1\uad00\uc5c6\ub2e4. \uc774\ub7f0 \uc18c\uc790\ub4e4\uc758 \uacbd\uc6b0 \uc0c1\ubd80\uc758 \ub354 \ub450\uaebc\uc6b4 \uae08\uc18d\ubc30\uc120\uc744 \ud1b5\ud574 \uc5f0\uacb0\ub41c\ub2e4.<\/p>\n

\uc5ec\uae30\uc11c \uc9d0\uc791\ud560 \uc218 \uc788\uaca0\uc9c0\ub9cc, \ub450\uaebc\uc6b4 \uc0c1\ubd80 \uae08\uc18d\ubc30\uc120\ub4e4\uc740 \uc81c\uc870\ud558\uae30 \uc5b4\ub824\uc6b4 \ud14c\ud06c\ub2c9\uc744 \uc801\uc6a9\ud560 \ud544\uc694\uac00 \uc5c6\ub2e4. \uacfc\uac70\uc5d0 \uc54c\ub8e8\ubbf8\ub284\uc73c\ub85c \ud2b9\uc815 \ub450\uaed8\uc758 \ud558\ubd80\uce35 \ubc30\uc120\uc744 \ub9cc\ub4e4\uc5b4 \ubd24\ub2e4\uba74, \uc774\ubc88\uc5d0\ub294 \uac19\uc740 \ub450\uaed8\uc758 \uc54c\ub8e8\ubbf8\ub284 \ubc30\uc120\uc744 \uc0c1\ubd80\uc5d0 \ub9cc\ub4e4 \uc218 \uc788\ub294 \uac83\uc774\ub2e4. \ub530\ub77c\uc11c \uc0c1\ubd80 \ubc30\uc120\uce35\uc5d0\ub294 \uaf2d \ucca8\ub2e8 \uae30\uc220\uc744 \uc801\uc6a9\ud558\uc9c0\ub294 \uc54a\uace0, \uae30\uc874\uc5d0 \uc790\uc8fc \ud574 \ubcf8 \uacf5\uc815\uc744 \uc801\uc6a9\ud560 \uc218\ub3c4 \uc788\ub2e4. \uc774\ub97c \ud1b5\ud574, \ubc18\ub3c4\uccb4 \ud68c\uc0ac\ub294 \ud22c\uc790\ube44\ub97c \uc544\ub084 \ubfd0\ub9cc \uc544\ub2c8\ub77c, \uacf5\uc815 \ud559\uc2b5 \uc2dc\uac04\uc744 \uc904\uc77c \uc218 \uc788\ub2e4.<\/p>\n

\uae30\uc220\uc758 \uc870\ud569<\/h3>\n

\uc704 \uae30\uc220\ub4e4\uc740 \ub530\ub85c\ub530\ub85c \uc874\uc7ac\ud558\ub294 \uac83\uc774 \uc544\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud68c\uc0ac\ub4e4\uc758 \ubaa9\uc801\uc5d0 \ub9de\ucdb0 \ub2e4\uc591\ud558\uac8c \uc870\ud569\ub3fc, \uac01 \ud68c\uc0ac\uac00 \uc6d0\ud558\ub294 \ubc18\ub3c4\uccb4\ub97c \ub9cc\ub4dc\ub294 \ub370 \uc0ac\uc6a9\ub41c\ub2e4. SK\ud558\uc774\ub2c9\uc2a4\uc640 \uac19\uc740 \uba54\ubaa8\ub9ac \ud68c\uc0ac\uc640\ub294 \ub2ec\ub9ac TSMC, \uc778\ud154\uacfc \uac19\uc774 \ub85c\uc9c1 \ubc18\ub3c4\uccb4*<\/span>\ub97c \uc81c\uc870\ud558\ub294 \ud68c\uc0ac\ub4e4\uc740 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uc804\ub958 \uc81c\uc5b4 \ub2a5\ub825\uc774 \ub9e4\uc6b0 \ub192\uc544\uc57c \ud55c\ub2e4. \uc774\ub97c \uc704\ud574 FinFET\uacfc \uac19\uc740 3\ucc28\uc6d0 \uad6c\uc870\ub97c \ub3c4\uc785\ud568\uc73c\ub85c\uc368 \uc804\ub958 \ud1b5\uacfc \ubd80\ubd84\uc778 \ucc44\ub110\uc744 3\ucc28\uc6d0 \ubaa8\uc591\uc73c\ub85c \ub9cc\ub4e4\uc5b4 \uba74\uc801\uc744 \ub192\uc5ec\uc57c\ub9cc \ud55c\ub2e4. \uc774\ub7f0 \uad6c\uc870\uc758 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub97c \ub9cc\ub4e4\uc5c8\ub2e4\uba74, \ub2f9\uc5f0\ud788 DRAM \ub4f1\uc774 \uc0ac\uc6a9\ud558\ub294 \ud3c9\uba74 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ubcf4\ub2e4 \uc811\uc810 \ud615\uc131\uc774 \ub9e4\uc6b0 \uc5b4\ub824\uc6b8 \uac83\uc784\uc744 \uc9d0\uc791\ud560 \uc218 \uc788\ub2e4. <\uadf8\ub9bc 6> \uc67c\ucabd \uadf8\ub9bc\uc758 \uacbd\uc6b0 \uc804\ub958\uac00 \ud750\ub974\ub294 \ubd80\ubd84(\ucc44\ub110)\uacfc \ucee8\ud0dd\uc744 \ubc00\ucc29\uc2dc\ud0a4\uae30 \uc27d\uc9c0\ub9cc, \uc624\ub978\ucabd \uadf8\ub9bc\uc758 \uacbd\uc6b0 \ucc44\ub110\uc5d0 \ubc00\ucc29\ub418\ub294 \ucee8\ud0dd\uc744 \ub9cc\ub4dc\ub294 \uac83\uc774 \uc5b4\ub824\uc6b8 \uac83\uc784\uc744 \uc9d0\uc791 \uac00\ub2a5\ud558\ub2e4.<\/p>\n

*<\/span> \ub85c\uc9c1(Logic) \ubc18\ub3c4\uccb4 : CPU, GPU \ub4f1 \uc5f0\uc0b0 \ubaa9\uc801\uc744 \uac00\uc9c4 \ubc18\ub3c4\uccb4<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 6 : \ub85c\uc9c1 \ubc18\ub3c4\uccb4\uc758 FinFET\uc740 DRAM\uc758 \ud3c9\uba74 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ubcf4\ub2e4 \uc811\uc810 \ud615\uc131\uc774 \uc5b4\ub835\ub2e4.<\/p>\n

\ub3c4\uc120\uc758 \ubc30\ub9ac\uc5b4 \uba54\ud0c8\ub3c4 \ub9c8\ucc2c\uac00\uc9c0\ub2e4. \uc778\ud154\uc740 7\ub098\ub178 \uacf5\uc815\uc5d0\uc11c \uad6c\ub9ac\uc758 \uc77c\ub809\ud2b8\ub85c\ub9c8\uc774\uadf8\ub808\uc774\uc158*<\/span> \ubb38\uc81c\ub85c \uc778\ud574 \uad6c\ub9ac \ub300\uc2e0 \ucf54\ubc1c\ud2b8 \uae30\ubc18\uc758 \uae08\uc18d\ubc30\uc120\uce35\uc744 \uc2dc\ub3c4\ud588\ub2e4\uac00 \uc218\ub144\uac04 \ud070 \uc5b4\ub824\uc6c0\uc744 \uacaa\uc740 \ubc14 \uc788\ub2e4. \uc774\ub85c \uc778\ud574 \uc778\ud154\uc740 2022\ub144 \ud604\uc7ac \uac1c\ubc1c \uc911\uc778 4\ub098\ub178 \uacf5\uc815\uc5d0\uc11c \uad6c\ub9ac \ubc30\uc120\uc744 \ub2e4\uc2dc \ub3c4\uc785\ud558\ub418, \uad6c\ub9ac \ubc30\uc120\uc744 \ud0c4\ud0c8\ub968(Ta)\uacfc \ucf54\ubc1c\ud2b8\ub85c \uac10\uc2f8\uc11c \ubb38\uc81c\ub97c \ud574\uacb0\ud558\ub824 \uc2dc\ub3c4\ud558\uace0 \uc788\ub2e4. \uc778\ud154\uc5d0\uc120 \uc774\ub97c \uac1c\uc120\ub41c \uad6c\ub9ac \ubc30\uc120(Enhanced Cu)\ub77c\uace0 \ubd80\ub974\uace0 \uc788\ub2e4.<\/p>\n

*<\/span> \uc77c\ub809\ud2b8\ub85c\ub9c8\uc774\uadf8\ub808\uc774\uc158(Electromigration, EM) : \uae08\uc18d\ubc30\uc120\uc5d0 \uc804\ub958\uac00 \ud750\ub97c \ub54c, \uc6c0\uc9c1\uc774\ub358 \uc804\uc790\ub4e4\uc774 \uae08\uc18d\ubc30\uc120 \uc6d0\uc790\ub97c \ub54c\ub824 \uae08\uc18d \uc6d0\uc790\uc758 \uc704\uce58\ub97c \ubc14\uafd4\ubc84\ub9ac\ub294 \ud604\uc0c1<\/p>\n

\ubbf8\uc138\ud654\uac00 \uc9c4\ud589\ub420\uc218\ub85d \uc774\ub7f0 \uc5b4\ub824\uc6c0\uc740 \uacc4\uc18d \ub098\ud0c0\ub0a0 \uc218\ubc16\uc5d0 \uc5c6\ub2e4. \uc778\ud154\uc740 CPU \ud68c\uc0ac\uc774\uae30 \ub54c\ubb38\uc5d0 \uace0\uc18d \ub3d9\uc791\ud558\ub294 \uc18c\uc790\uac00 \uc911\uc694\ud558\ub2e4. \uace0\uc18d \ub3d9\uc791 \ud2b9\uc131 \ub54c\ubb38\uc5d0 \uc77c\ub809\ud2b8\ub85c\ub9c8\uc774\uadf8\ub808\uc774\uc158 \uc800\ud56d\ub825\uc774 \uc6b0\uc218\ud588\ub358 \uad6c\ub9ac\uc870\ucc28 \ud55c\uacc4\uc5d0 \ubd80\ub52a\ud614\ub358 \uac83\uc774\uace0, \uc774\ub97c \uc774\uaca8\ub0b4\uae30 \uc704\ud574 \uc5ec\ub7ec \uac00\uc9c0 \uc2dc\ub3c4\ub97c \ud558\uace0 \uc788\ub294 \uac83\uc774\ub2e4. SK\ud558\uc774\ub2c9\uc2a4\uc640 \uac19\uc740 \uba54\ubaa8\ub9ac \ud68c\uc0ac\uc758 \uacbd\uc6b0 \ud68c\ub85c \ub3d9\uc791 \uc18d\ub3c4\uc5d0 \uc758\ud55c \ubb38\uc81c\ub294 \uc5c6\uc9c0\ub9cc, \ub300\uc2e0 \uce90\ud328\uc2dc\ud130\ub97c \ub192\uc774 \uc313\uc544 \uc804\ud558 \uc6a9\ub7c9\uc744 \uc720\uc9c0\ud558\ub294 \uac83\uc5d0 \uc5b4\ub824\uc6c0\uc744 \uacaa\uace0 \uc788\ub2e4. \uc911\uc694\ud55c \uac83\uc740 \ubbf8\uc138\ud654\uc758 \uc5b4\ub824\uc6c0\uc740 \uac01 \ud68c\uc0ac\uac00 \ucc98\ud55c \ube44\uc988\ub2c8\uc2a4 \ud658\uacbd\uc5d0 \ub530\ub77c \ub2e4\ub974\uac8c \ub098\ud0c0\ub098\ub294 \uac83\uc774\ub2e4. \ubd84\uba85 SK\ud558\uc774\ub2c9\uc2a4\ub97c \uae30\ub2e4\ub9ac\ub294 \uae08\uc18d \ubc30\uc120\uc758 \uc5b4\ub824\uc6c0\ub3c4 \ub098\ud0c0\ub0a0 \uac83\uc774\ub2e4.<\/p>\n

\uacb0\ub860 : \uc554\uae30\ubcf4\ub2e4\ub294 \uc774\ud574\ub97c, \ud63c\uc790\ubcf4\ub2e4\ub294 \ud568\uaed8<\/h3>\n

\uc9c0\uae08\uae4c\uc9c0 \uc6b0\ub9ac\ub294 6\ud3b8\uc758 \uae34 \uc5ec\uc815\uc744 \ud568\uaed8 \ud588\ub2e4. \uc81c\ubc95 \uae38\ub2e4\uace0 \uc0dd\uac01\ud588\uc744 \uc218\ub3c4 \uc788\uc9c0\ub9cc, \uace0\uc791 6\ud3b8\uc758 \uae00\ub85c\ub294 \uc5ec\ub7ec\ubd84\uc5d0\uac8c \ubc29\ub300\ud55c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc9c0\uc2dd\uc758 1%\ub3c4 \uc804\ub2ec\ud558\uc9c0 \ubabb\ud560 \uac83\uc774\ub2e4. \uadf8\ub7fc\uc5d0\ub3c4 \uc774\ub7ec\ud55c \uae00\uc744 \uc4f4 \uc774\uc720\ub294 \uc774\ud6c4 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc744 \uc774\ub04c\uc5b4\uac08, \ud639\uc740 \uc0b0\uc5c5\uc5d0 \uad00\uc2ec\uc774 \uc788\ub294 \ub9ce\uc740 \ubd84\uc5d0\uac8c \uaf2d \uc804\ub2ec\ud558\uace0\uc790 \ud558\ub294 \uba54\uc2dc\uc9c0\uac00 \uc788\uae30 \ub54c\ubb38\uc774\ub2e4.<\/p>\n

\ubc18\ub3c4\uccb4\ub294 \uc218\ub9cc \uba85\uc758 \uc0ac\ub78c\ub4e4\uc774 \ubaa8\uc5ec \uc2ed\uc2dc\uc77c\ubc18\uc73c\ub85c \uacf5\ud5cc\ud574 \ub9cc\ub4dc\ub294 \uac70\ub300\ud55c \uc791\ud488\uc774\ub2e4. \uc6e8\uc774\ud37c \ud55c \uc7a5\uc774 \uc644\uc81c\ud488\uc774 \ub418\uae30 \uc704\ud574\uc11c\ub294 \uc218\ubc31 \ub2e8\uacc4\uc758 \uacf5\uc815\uc744 \uac70\uccd0\uc57c \ud55c\ub2e4. \uac01 \uacf5\uc815\uc5d0 \ucc38\uc5ec\ud558\ub294 \uc0ac\ub78c\ub4e4\uc740 \ucd5c\uc885 \uc81c\ud488\uc5d0 1%\ub3c4 \uc548 \ub418\ub294 \uae30\uc5ec\ub97c \ud558\ub294 \uc148\uc774\uc9c0\ub9cc, \uc774 \uc911 \ud55c \uacf5\uc815\uc774\ub77c\ub3c4 \uc2e4\ud328\ud558\uba74 \ubc18\ub3c4\uccb4\ub294 \uc791\ub3d9\ud558\uc9c0 \uc54a\ub294\ub2e4. \uadf8\ub9ac\uace0 \ubc18\ub3c4\uccb4 \ud68c\uc0ac\uc5d0\uc11c \uac1c\uac1c\uc778\uc774 \ud558\ub294 \uc77c\uc740 \uc644\uc804\ud788 \ub3c5\ub9bd\ub3fc \uc788\uc9c0 \uc54a\uace0, \uc11c\ub85c\uac00 \ud558\ub294 \uc77c\uc774 \uc11c\ub85c\uc5d0\uac8c \uc601\ud5a5\uc744 \uc8fc\ub294 \ud615\ud0dc\uc774\ub2e4.<\/p>\n

\uc774 \uae00\uc758 \ubaa9\uc801 \uc911 \ud558\ub098\ub294 \uc774 \uae00\uc744 \uc77d\ub294 \ub3c5\uc790\ub4e4\uc774 \uacf5\uc815 \uae30\uc220\uc744 \uc774\ud574\ud558\ub294 \uac83\uc774\ub2e4. \ud558\uc9c0\ub9cc \uadf8\uac83\ubcf4\ub2e4 \ub354 \uc911\uc694\ud55c \ubaa9\uc801\uc740 \ubc14\ub85c \uae30\uc220 \uc0ac\uc774\uc758 \uad00\uacc4\ub97c \uc774\ud574\ud558\ub294 \uac83\uc774\ub2e4. \uc99d\ucc29 \uacf5\uc815\uc5d0\uc11c \uc0ac\uc6a9\ud55c \ubb3c\uc9c8\uc740 \uc774\ud6c4 \uc5f4\uc744 \uc0ac\uc6a9\ud558\ub294 \uacf5\uc815\uacfc \uc2dd\uac01 \ub4f1\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce5c\ub2e4. \uc2dd\uac01\uc744 \ub109\ub109\ud558\uac8c \uc9c4\ud589\ud560 \uacbd\uc6b0, \ud6c4\uc18d\ud558\ub294 \uc99d\ucc29 \uacf5\uc815\uc758 \uac2d \ud544 \ud2b9\uc131\uc774 \uc88b\uc9c0 \uc54a\uc73c\uba74 \uc804\uccb4 \uc81c\ud488\uc5d0 \ubb38\uc81c\uac00 \uc0dd\uae38 \uc218 \uc788\ub2e4. \ubbf8\uc138 \ud328\ud134\uc744 \uadf8\ub824\uc57c \ud558\ub294 \ub178\uad11\uae30\uac00 \ubd80\uc871\ud558\ub2e4\uba74, \uba40\ud2f0\ud328\ud130\ub2dd*<\/span>\uc744 \ud574\uc57c \ud55c\ub2e4. \uc774 \uacfc\uc815\uc5d0\uc11c \ud558\ub4dc \ub9c8\uc2a4\ud06c \ucd94\uac00 \uc99d\ucc29, \uc2dd\uac01\uc774 \ud544\uc694\ud574\uc9c0\uac8c \ub41c\ub2e4.<\/p>\n

*<\/span> \uba40\ud2f0\ud328\ud130\ub2dd : \ub178\uad11\uae30\ub97c \uc5ec\ub7ec \ubc88 \uc0ac\uc6a9\ud574 \ub354\uc6b1 \ubbf8\uc138\ud55c \ud328\ud134\uc744 \uc6e8\uc774\ud37c \uc704\uc5d0 \uadf8\ub9ac\ub294 \uae30\ubc95<\/p>\n

\uc704\uc640 \uac19\uc740 \uc0ac\uc2e4\uc744 \ubcf4\uba74 \uc54c \uc218 \uc788\uaca0\uc9c0\ub9cc, \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc740 \ucca8\ub2e8 \uc0b0\uc5c5\uc77c \ubfd0\ub9cc \uc544\ub2c8\ub77c \uc77c\uc885\uc758 \uc2e0\ub8b0 \uc0b0\uc5c5\uc774\ub2e4. \ud68c\uc0ac \ub0b4 \uc9c1\uc6d0 \uac04 \uc758\uc0ac\uc18c\ud1b5 \ub2a5\ub825, \uc5c5\ubb34\uc758 \uc815\uc9c1\ud568, \uc0c8\ub85c\uc6b4 \uac83\uc744 \ub5a0\uc62c\ub9ac\ub294 \ucc3d\uc758\ub825\uc774 \ud544\uc694\ud55c \uc0b0\uc5c5\uc774\ub2e4. \ubc18\ub3c4\uccb4 \uae30\uc220 \ubc1c\uc804\uc740 \uc0c8\ub85c\uc6b4 \ubbf8\uc138\uacf5\uc815\uc744 \uac1c\ubc1c\ud588\uc744 \ub54c \uc0dd\uaca8\ub098\ub294 \ub2e4\uc591\ud55c \uc5b4\ub824\uc6c0\uc744 \ubaa8\ub450\uac00 \uc815\uc9c1\ud558\uac8c \uacf5\uc720\ud568\uc73c\ub85c\uc368 \ubb38\uc81c\ub97c \ud30c\uc545\ud55c \ub4a4, \ud574\uacb0\ucc45\uc744 \uac00\uc9c4 \uc870\uc9c1(\uacf5\uc815)\uc774 \ucc3d\uc758\ub825\uc744 \ubc1c\ud718\ud574 \ubb38\uc81c\ub97c \ud574\uacb0\ud558\ub294 \uacfc\uc815\uc758 \uc5f0\uc18d\uc774\ub2e4. \uc55e\uc11c \ud3ec\ud1a0 \uacf5\uc815\uc5d0\uc11c\ub3c4 \uc561\uce68 \ub178\uad11\uae30\ub85c \uc778\ud574 \uc77c\uc5b4\ub09c \uc0c8\ub85c\uc6b4 \ubb38\uc81c\ub97c \ub178\uad11\uae30\uac00 \uc544\ub2cc \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ud1b5\ud574 \ud574\uacb0\ud55c \uac83\uc744 \ubd24\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 7 : \ub178\uad11\uae30\uc5d0\uc11c \ubc1c\uc0dd\ud55c \ubb38\uc81c\ub97c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub85c \ud574\uacb0\ud55c \uc608\uc2dc<\/p>\n

\uc774 \uae00\uc744 \uc77d\uc740 \ub9ce\uc740 \ubd84\ub4e4, \ud2b9\ud788 \ud6c4\ubc30\uac00 \ub420 \uc5ec\ub7ec\ubd84\uc774 \uc774\ub7f0 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \ud2b9\uc9d5\uc744 \uc774\ud574\ud588\uc73c\uba74 \uc88b\uaca0\ub2e4. \uae30\uc220\uc5d0 \ub300\ud55c \uc774\ud574\ub97c \ud1b5\ud574 \uc790\uc2e0\uc758 \ucee4\ub9ac\uc5b4\ub97c \uc774\uc5b4\uac00\uace0, \uc218\ub9ce\uc740 \uc720\uad00 \uc870\uc9c1\uacfc \uc120\uc21c\ud658\uc801 \uad00\uacc4\ub97c \ub9cc\ub4e4\uc5b4\uac00\uba70 \uc138\uacc4 \ucd5c\uace0\uc758 \ubc18\ub3c4\uccb4\ub97c \ub9cc\ub4e4\uc5b4 \ub0c8\uc73c\uba74 \uc88b\uaca0\ub2e4.<\/p>\n

\ud604\uc7ac \ubc18\ub3c4\uccb4 \uae30\uc220\uc740 \ubbf8\uc138\ud654\uc5d0 \ud070 \uc5b4\ub824\uc6c0\uc744 \uacaa\uace0 \uc788\ub2e4. \uc774\ud6c4\uc5d0\ub294 \ubc18\ub3c4\uccb4\ub97c \ub9cc\ub4e4\uae30 \uc704\ud574 \ubc18\ub3c4\uccb4 \uc0ac\uc6a9\uc790\ub4e4\uc758 \ubaa9\uc18c\ub9ac\ub97c \uc9c0\uae08\ubcf4\ub2e4 \ub354 \ub9ce\uc774 \ub4e4\uc5b4\uc57c \ud560 \uac83\uc774\ub2e4. \uadf8\ub9ac\uace0 \uadf8 \uc2dc\ub300\uc5d0 \ubc18\ub3c4\uccb4 \ud68c\uc0ac \ub0b4\uc5d0\uc11c \uc18c\ud1b5\ud558\uba70 \uae30\uc220 \uac1c\ubc1c\ud588\ub358 \ub2a5\ub825\uc774 \ub354\uc6b1 \ube5b\uc744 \ubc1c\ud560 \uac83\uc774\ub2e4.<\/p>\n

\u203b \ubcf8 \uce7c\ub7fc\uc740 \ubc18\ub3c4\uccb4\/ICT\uc5d0 \uad00\ud55c \uc778\uc0ac\uc774\ud2b8\ub97c \uc81c\uacf5\ud558\ub294 \uc678\ubd80 \uc804\ubb38\uac00 \uce7c\ub7fc\uc73c\ub85c, SK\ud558\uc774\ub2c9\uc2a4\uc758 \uacf5\uc2dd \uc785\uc7a5\uacfc\ub294 \ub2e4\ub97c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

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