{"id":14197,"date":"2022-10-17T00:00:00","date_gmt":"2022-10-16T15:00:00","guid":{"rendered":"http:\/\/localhost:8080\/jeonginseong-column-photo\/"},"modified":"2025-02-16T12:49:45","modified_gmt":"2025-02-16T03:49:45","slug":"jeonginseong-column-photo","status":"publish","type":"post","link":"https:\/\/news.skhynix.co.kr\/jeonginseong-column-photo\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \uc804\uacf5\uc815 3\ud3b8] \ubc18\ub3c4\uccb4 \ud328\ud134\uc744 \ub9cc\ub4dc\ub294 \ud3ec\ud1a0 \uacf5\uc815 (3\/6)"},"content":{"rendered":"
\n

\ucd5c\uadfc \uc6b0\ub9ac\ub294 \uc218\ub9ce\uc740 \ubc18\ub3c4\uccb4 \uad00\ub828 \ub274\uc2a4\ub97c \uc81파라오 슬롯ud558\uace0 \uc788\ub2e4. \ubc18\ub3c4\uccb4 \uad00\ub828 \uc18c\uc2dd\uc744 \uc81파라오 슬롯ud558\uba74\uc11c \uc6b0\ub9ac\ub294 \uc790\uc5f0\uc2a4\ub808 \ubc18\ub3c4\uccb4\uac00 \ub2e8\uc21c\ud55c \uc218\ucd9c \uc5ed\uad70\uc744 \ub118\uc5b4\uc11c \uad6d\uac00 \uc548\ubcf4\uc5d0\uae4c\uc9c0 \uc60파라오 슬롯ud5a5\uc744 \ubbf8\uce58\ub294 \uc91파라오 슬롯uc694\ud55c \uc81c\ud488\uc774 \ub410\ub2e4\ub294 \uc810\uc744 \uc778\uc9c0\ud558\uae30 \uc2dc\uc79파라오 슬롯ud588\ub2e4. \ubc18\ub3c4\uccb4\uc758 \uc91파라오 슬롯uc694\ub3c4\uac00 \ub192\uc544\uc9d0\uc5d0 \ub530\ub77c \uc815\ubd80\ub97c \ube44\ub86f\ud574 \uc5ec\ub7ec \uae30\uc5c5\ub4e4\uc740 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uacbd\uc7c파라오 슬롯ub825\uc744 \ub192\uc774\uae30 \uc704\ud55c \ubc29\uc548\uc744 \uac15\uad6c\ud558\uace0 \uc788\ub2e4.<\/strong>
\n\u00a0<\/strong><\/p>\n

\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uacbd\uc7c파라오 슬롯ub825\uc744 \ub192\uc774\ub294 \uccab \ubc1c\uac78\uc74c\uc740 \ub2f9\uc5f0\ud788 \ubc18\ub3c4\uccb4\uc5d0 \ub300\ud55c \uc9c0\uc2dd\uc744 \uacf5\uc720\ud558\ub294 \uac83\uc774\ub2e4. \uc774\uc5d0 \ubcf8\uc778 \uc5ed\uc2dc \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0 \ubab8\ub2f4\uc558\ub358 \uc77c\uc6d0\uc73c\ub85c\uc11c \ubc18\ub3c4\uccb4\uc5d0 \ub300\ud574 \uad00\uc2ec\uc774 \uc788\uac70\ub098 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0 \uc885\uc0ac\ud558\uace0\uc790 \ud558\ub294 \ucde8\uc5c5\uc900\ube44\uc0dd\ub4e4\uc744 \uc704\ud55c \uc9c0\uc2dd\uc744 \uacf5\uc720\ud558\uace0\uc790 \ud55c\ub2e4.<\/strong>
\n\u00a0<\/strong><\/p>\n

\uc778\ud130\ub137\uc774\ub098 \uad50\uc7ac\uc5d0\uc11c \ucc3e\uc544\ubcfc \uc218 \uc788\ub294 \uae30\uc220\uc5d0 \uce58\uc91파라오 슬롯ub41c \uc9c0\uc2dd\uc774 \uc544\ub2c8\ub77c\u00a0\uac01 \uae30\uc220\uc774 \uac00\uc9c0\ub294 \uc5f0\uad00\uc13파라오 슬롯uc744 \ud1b5\ud55c \uad00\uacc4\uc758 \uc91파라오 슬롯uc2ec\uc73c\ub85c \ubc18\ub3c4\uccb4\ub97c \uc124\uba85\ud558\uace0\uc790 \ud55c\ub2e4. \u2018\ucef4\ud4e8\ud130\uc640 \ud2b8\ub79c\uc9c0\uc2a4\ud130\u2019\uc758 \uc8fc\uc81c\ub97c \uc2dc\uc79파라오 슬롯uc73c\ub85c \uacf5\uc815\uacfc \uc0b0\ud654, \ud3ec\ud1a0, \uc2dd\uac01, \uc99d\ucc29, \uae08\uc18d\ubc30\uc120 \ub4f1 \ucd1d 6\ud3b8\uc758 \uc2dc\ub9ac\uc988\ub85c \ubc18\ub3c4\uccb4 \uae30\uc220\uc5d0 \ub300\ud55c \uc124\uba85\uc744 \uc774\uc5b4\uac08 \uc608\uc815\uc774\ub2e4.<\/strong>
\n\u00a0<\/strong><\/p>\n

\uc774\ub97c \uc77d\ub294 \ub3c5\uc790 \uc5ec\ub7ec\ubd84\uc740 \uac1c\ubcc4 \uc6a9\uc5b4\uc5d0 \ub108\ubb34 \uc5bd\ub9e4\uc774\uc9c0 \ub9d0\uace0 \u2018\uad00\uacc4\u2019\uc5d0 \uc8fc\ubaa9\ud558\uae38 \ubc14\ub780\ub2e4. \uae00\uc744 \uc77d\ub2e4 \ubcf4\uba74 \uac1파라오 슬롯uc79파라오 슬롯uc2a4\ub7fd\uac8c \uc804\ubb38 \uc6a9\uc5b4\ub4e4\uc774 \ub4f파라오 슬롯uc7a5\ud560 \uc218 \uc788\uc9c0\ub9cc, \uc774\ud574\uac00 \ub418\uc9c0 \uc54a\ub294\ub2e4\uba74 \uadf8\ub0e5 \ub118\uc5b4\uac00\ub3c4 \uc88b\ub2e4.<\/strong> (\ud544\uc790 \uc8fc)<\/strong><\/p>\n<\/div>\n

\uc79파라오 슬롯uc740 \ud68c\ub85c\ub97c \ub9cc\ub4dc\ub294 \uccab \ub2e8\uacc4<\/h3>\n

\ubaa8\uc2a4\ud3ab(MOSFET) \ud60파라오 슬롯uba85\uc740 \uc6b0\ub9ac\uac00 \ub354 \ub9ce\uc740 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub97c \ub3d9\uc77c\ud55c \uba74\uc80파라오 슬롯uc5d0 \ubaa8\uc544 \uc313\uc744 \uc218 \uc788\uac8c \ud574 \uc92c\ub2e4. \ubaa8\uc2a4\ud3ab\uc744 \ub354 \uc79파라오 슬롯uac8c \ub9cc\ub4e4\uba74 \ud558\ub098\ud558\ub098\uc758 \ubaa8\uc2a4\ud3ab\uc774 \uc0ac\uc6a9\ud558\ub294 \uc804\ub825\uc774 \uc80파라오 슬롯uc5b4\uc9c8 \ubfd0 \uc544\ub2c8\ub77c, \ud2b8\ub79c\uc9c0\uc2a4\ud130 \uac1c\uc218\uac00 \ub298\uc5b4\ub098\ubbc0\ub85c \uae30\ub2a5\uc744 \ubd80\uc5ec\ud560 \uc218 \uc788\uac8c \ub41c\ub2e4. \ub450 \ub9c8\ub9ac \ud1a0\ub07c\ub97c \ud55c \ubc88\uc5d0 \uc7a파라오 슬롯uc744 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0 \ubaa8\uc2a4\ud3ab\uc744 \uc79파라오 슬롯uac8c \ub9cc\ub4dc\ub294 \uac83\uc740 \ub9e4\uc6b0 \uc91파라오 슬롯uc694\ud558\ub2e4. \uadf8\ub9ac\uace0 \uc79파라오 슬롯uc740 \ud68c\ub85c\ub97c \ub9cc\ub4e4\uae30 \uc704\ud574\uc11c\ub294 \uc77c\ub2e8 \u2018\uadf8\ub9b4 \uc218 \uc788\uc5b4\uc57c\u2019 \ud55c\ub2e4.<\/p>\n

\ubc00\uac00\ub8e8 \uc704\uc5d0 \ud589\ubcf5\ub0a0\uac1c \ubaa8\uc59파라오 슬롯uc758 \uacfc\uc790\ub97c \uc794\ub729 \ub9cc\ub4e4\uace0 \uc2f6\ub2e4\uace0 \ud574\ubcf4\uc790. \ub9cc\ub4e4\uc5b4\uc57c \ud558\ub294 \uacfc\uc790\uc758 \uac1c\uc218\uac00 \uc218\ubc31 \uac1c\ub77c\uba74, \uacfc\uc790\ub97c \ud558\ub098\uc529 \uc190\uc73c\ub85c \ube5a\ub294 \uac83\uc740 \uad49\uc7a5\ud788 \ud798\ub4e4 \uac83\uc774\ub2e4. \uc5b4\ub5bb\uac8c \ud558\ub294 \uac8c \uc88b\uc744\uae4c?<\/p>\n

\"\ubc18\ub3c4\uccb4,<\/p>\n

\u25b2 \uadf8\ub9bc 1 : \ubc00\uac00\ub8e8 \uc704\uc5d0 \ub3d9\uc77c\ud55c \ubaa8\uc59파라오 슬롯uc758 \uacfc\uc790\ub97c \ube60\ub974\uac8c \ub9cc\ub4dc\ub294 \ubc29\ubc95<\/p>\n

\uc88b\uc740 \ud574\uacb0\ucc45\uc740 \ud2c0\uc744 \uc0ac\uc6a9\ud558\ub294 \uac83파라오 슬롯ub2e4. \uc77c\ub2e8 \ubc00\uac00\ub8e8\ub97c \ub113\uac8c \ud3b4\uc11c \uad6c\uc6b4 \ub4a4, \uc704\uc5d0\uc11c \ud2c0(\ub3c4\uc7a5)\ub85c \ucc0d\uc5b4\ubc84\ub9ac\uba74 \ub41c\ub2e4. 파라오 슬롯ub7f0 \ud615\ud0dc\ub77c\uba74 \ud55c \ubc88\uc5d0 100\uac1c\uc758 \uacfc\uc790\ub97c \ub9cc\ub4dc\ub294 \uac83\ub3c4 \uc5b4\ub835\uc9c0 \uc54a\uc744 \uac83파라오 슬롯ub2e4.<\/p>\n

\ub9cc\uc57d \uacfc\uc790\ub97c \uc5b4\ub9b0\uc544\uc774\ub4e4\uc5d0\uac8c \ud314\uae30 \uc704\ud574 \uc79파라오 슬롯uac8c \ub9cc\ub4e4\uc5b4\uc57c \ud55c\ub2e4\uba74 \uc5b4\ub5a파라오 슬롯ud558\uba74 \ub420\uae4c? \uacfc\uc790 \ubaa8\uc59파라오 슬롯uc774 \ub354 \uc79파라오 슬롯uac8c \uc0c8\uaca8\uc9c4 \ud2c0\uc744 \ub9cc\ub4e4\uace0 \ub61파라오 슬롯uac19\uc774 \ucc0d\uc5b4\ub0b4\uba74 \ub41c\ub2e4. \uc5ec\uae30\uc11c \uacfc\uc790 \ud2c0\uc5d0 \ud574\ub2f9\ud558\ub294 \uac83\uc774 \ubc14\ub85c \uc774\ubc88 \uae00\uc5d0\uc11c \uc124\uba85\ud560 \uae30\uacc4\uc778 \u2018\ub178\uad1파라오 슬롯uae30\u2019\uc774\ub2e4. \uacfc\uc790\uc640 \ubc18\ub3c4\uccb4 \uc0ac\uc774\uc5d0 \ud070 \ucc28\uc774\uac00 \uc788\ub2e4\uba74, \ubaa8\uc2a4\ud3ab\uc740 \uacfc\uc790\uc640\ub294 \ub2ec\ub9ac \ub3d9\uc77c \uba74\uc80파라오 슬롯uc5d0 \uc79파라오 슬롯uac8c \uc5ec\ub7ec \uac1c \ub9cc\ub4e4\uc218\ub85d \uace0\uac1d\ub4e4\uc774 \ud658\ud638\ud55c\ub2e4\ub294 \uac83\uc774\ub2e4. \ubaa8\uc2a4\ud3ab\uc740 \ud070 \uac83 파라오 슬롯uac1c\ubcf4\ub2e4 \uc79파라오 슬롯uc740 \uac83 2\uac1c\uac00 \ud6e8\uc52c \uc720\uc6a9\ud558\ub2e4.<\/p>\n

\ubc18\ub3c4\uccb4\ub97c \uc644\uc13파라오 슬롯ud558\ub294 \uacfc\uc815\uc740 \uc704\uc758 \ubc18\ubcf5\uc744 \uacc4\uc18d \ubc18\ubcf5\ud558\ub294 \uac83\uc774\ub2e4. \ubc18\ub3c4\uccb4\ub97c \ub9cc\ub4dc\ub294 \uacfc\uc815\uc744 \uacfc\uc790\ub97c \ub9cc\ub4dc\ub294 \uacfc\uc815\uc5d0 \ube57\ub300\uc5b4 \uc124\uba85\ud574\ubcf4\uaca0\ub2e4. \uacfc\uc790\ub97c \ub9cc\ub4dc\ub294 \uc0ac\ub78c\uc774 \ud589\ubcf5\ub0a0\uac1c \ubaa8\uc59파라오 슬롯uc758 \uacfc\uc790\uc5d0 \uc0c9\uae4c\uc9c0 \uc785\ud600 \uc81c\ub300\ub85c \ub9cc\ub4e0\ub2e4\uace0 \uac00\uc815\ud574\ubcf4\uc790. \uc5b4\ub5bb\uac8c \ub9cc\ub4e4\uc5b4\uc57c \ud560\uae4c?<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 2 : \ud589\ubcf5\ub0a0\uac1c \ubaa8\uc591 \uacfc\uc790\ub97c \ucc44\uc0c9파라오 슬롯ub294 \uc21c\uc11c<\/p>\n

\"03\"<\/p>\n

\u25b2 \uadf8\ub9bc 3 : \uc218\uc2ed \uac1c\uc758 \uacfc\uc790\ub97c \ubb49\uccd0\uc11c \uc0c9\uc18c\ub97c \ubfcc\ub9ac\uba74 \ub9e4\uc6b0 \ube60\ub974파라오 슬롯.<\/p>\n

\uc704 \uadf8\ub9bc 2\uc640 3\uacfc \uac19\uc740 \uc21c\uc11c\ub85c \uc79파라오 슬롯uc5c5\uc744 \ud574 \ub098\uac00\uba74 \ub41c\ub2e4. \ubc00\uac00\ub8e8 \ud310 \uc804\uccb4 \uc704\uc5d0 \uacfc\uc790 \ubaa8\uc59파라오 슬롯uc744 \uc794\ub729 \ub9cc\ub4e0 \ub4a4, \ub0b4\uac00 \uce60\ud558\uace0 \uc2f6\uc9c0 \uc54a\uc740 \uacfc\uc790 \ubd80\ubd84\uc740 \uac00\ub9ac\uace0 \uc0c9\uc18c\ub97c \ud310 \uc804\uccb4\uc5d0 \ubfcc\ub824\ubc84\ub9ac\ub294 \uac83\uc774\ub2e4. \uc774\ub7f0 \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uba74 \uacb0\uad6d \ud2b9\uc815\ud55c \ubaa8\uc59파라오 슬롯uc774\ub098 \uc0c9\uc774 \uc0c8\uaca8\uc9c4 \uacfc\uc790\ub97c \ube60\ub978 \uc18d\ub3c4\ub85c \ub9cc\ub4e4 \uc218 \uc788\ub2e4. \ub208\uce58 \ube60\ub978 \ub3c5\uc790\ub77c\uba74, \uc704\uc758 \uae4c\ub9cc \ub36e\uac1c\ub294 \uc5b4\ub5bb\uac8c \uc794\ub729 \ub9cc\ub4dc\ub290\ub0d0\ub294 \uc758\ubb38\uc774 \uc0dd\uae38 \uac83\uc774\ub2e4. \uace7 \uc54c\uc544\ubcf4\uaca0\uc9c0\ub9cc \uc0ac\uc2e4 \uadf8\uac83\uc774 \ub178\uad11 \uacf5\uc815\uc758 \ud575\uc2ec\uc80파라오 슬롯uc778 \uc5ed\ud560\uc774\ub2e4.<\/p>\n

\uc704 \uacfc\uc790\uc5d0\ub294 \uacfc\uc790 \uce35\uacfc \uc0c9\uc18c(\ube68\uac15, \uc8fc\ud669) \uce35 \ub450 \uac1c\uc758 \uce35\ubc16\uc5d0 \uc5c6\uc9c0\ub9cc, \ud604\uc2e4\uc758 \ubc18\ub3c4\uccb4\uc5d0\ub294 \uc18c\uc790\uce35\ubd80\ud130 \uc5ec\ub7ec \ub2e8\uacc4\uc758 \uae08\uc18d\ubc30\uc120\uce35\uae4c\uc9c0 \uc218\uc2ed \uac1c\uc758 \uce35\uc774 \ud544\uc694\ud558\ub2e4. \ub178\uad1파라오 슬롯uc774 \ud575\uc2ec\uc80파라오 슬롯uc778 \uacf5\uc815\uc774 \ub420 \uc218\ubc16\uc5d0 \uc5c6\ub294 \uc774\uc720\ub2e4.<\/p>\n

\ud2c0파라오 슬롯 \ub9cc\ub4dc\ub294 \uacfc\uc815 : \ud3ec\ud1a0 \uacf5\uc815<\/h3>\n

\ubc18\ub3c4\uccb4 \uae30\uc5c5\ub4e4\uc774 \uacfc\uc790 \ud2c0(\ub36e\uac1c)\uc744 \ub9cc\ub4dc\ub294 \uacfc\uc815\uc744 \ud3ec\ud1a0 \uacf5\uc815\uc774\ub77c\uace0 \ubd80\ub978\ub2e4. \ud3ec\ud1a0 \uacf5\uc815\uc758 \uccab \ub2e8\uacc4\ub294 \uac10\uad1파라오 슬롯uc56파라오 슬롯uc744 \ubc14\ub974\ub294 \uac83\uc774\ub2e4. \uac10\uad1파라오 슬롯uc56파라오 슬롯uc740 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub77c\uace0\ub3c4 \ubd88\ub9ac\uba70, \ube5b\uacfc \ub2ff\uc740 \ubd80\ubd84\uc758 \uc13파라오 슬롯uc9c8\uc774 \ubcc0\ud558\ub294 \ubb3c\uc9c8\uc774\ub2e4. \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ubc14\ub978 \ub4a4\uc5d0\ub294 \uc6e8\uc774\ud37c\uc5d0 \ube5b(\ub808\uc774\uc800)\uc744 \uc42c\uc5b4 \uc90c\uc73c\ub85c\uc368 \uac10\uad1파라오 슬롯uc56파라오 슬롯uc758 \ud2b9\uc815 \ubd80\ubd84\ub9cc\uc774 \ubcc0\uc9c8\ud558\uac8c \ub9cc\ub4e0\ub2e4.<\/p>\n

\"04\"<\/p>\n

\u25b2 \uadf8\ub9bc 4 : \ud3ec\ud1a0 \uacf5\uc815\uc758 \ub300\ub7b5\uc80파라오 슬롯uc778 \uc21c\uc11c<\/p>\n

\ub2f9\uc5f0\ud558\uc9c0\ub9cc \uadf8\ub0e5 \uc6e8\uc774\ud37c \uc804\uccb4\uc5d0 \ube5b\uc744 \uc42c\uc5b4\uc904 \uacbd\uc6b0 \ubc1c\ub77c \ub193\uc740 \uac10\uad1파라오 슬롯uc561 \uc804\uccb4\uac00 \ubcc0\uc9c8\ud560 \uac83\uc774\ubbc0\ub85c, \uad1파라오 슬롯uc6d0 \uc55e\uc5d0 \uc6d0\ud558\ub294 \ud328\ud134\uc774 \uadf8\ub824\uc9c4 \ud310\uc744 \ud558\ub098 \ub193\ub294\ub2e4. \uc774 \ud310\uc744 \ud3ec\ud1a0\ub9c8\uc2a4\ud06c(Photomask)\ub77c\uace0 \ubd80\ub978\ub2e4. \uad1파라오 슬롯uc6d0\uc744 \ud3ec\ud1a0\ub9c8\uc2a4\ud06c\uc5d0 \ud1b5\uacfc\uc2dc\ud0a8 \ub4a4 \uc6e8\uc774\ud37c\uc5d0 \ucb10\uc5b4\uc8fc\uba74, \ube44\ub85c\uc18c \uc6b0\ub9ac\uac00 \uc6d0\ud558\ub294 \ud328\ud134\uc744 \uc6e8\uc774\ud37c \uc704\uc5d0 \uc0dd\uc13파라오 슬롯ud560 \uc218 \uc788\ub2e4.<\/p>\n

\ud328\ud134\uc774 \uc0dd\uc13파라오 슬롯ub41c \ub4a4\uc5d0\ub294 \ud604\uc0c1(Develop) \uacfc\uc815\uc744 \uac70\uce5c\ub2e4. \uc774 \uacfc\uc815\uc5d0\uc11c \ube5b\uc744 \ucb10\uc5b4 \ubcc0\uc13파라오 슬롯ub41c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ubd80\ubd84\ub4e4\uc744 \uc81c\uac70\ud574 \uc90c\uc73c\ub85c\uc368 \uc6d0\ud558\ub294 \ud328\ud134\uc744 \uac00\uc9c4 \uacfc\uc790\ud2c0\uc774 \ub9cc\ub4e4\uc5b4\uc9c0\uac8c \ub418\ub294 \uac83\uc774\ub2e4. \uc989, \ud3ec\ud1a0 \uacf5\uc815\uc740 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uac00 \ub3c4\ud3ec\ub41c \uc6e8\uc774\ud37c \uc704\uc5d0 \ud3ec\ud1a0\ub9c8\uc2a4\ud06c\ub97c \ud1b5\uacfc\ud55c \uad1파라오 슬롯uc6d0\uc744 \ucb10\uc5b4\uc90c\uc73c\ub85c\uc368 \uc6d0\ud558\ub294 \ud328\ud134\uc744 \ub9cc\ub4e4\uc5b4 \ub0b4\ub294 \uc79파라오 슬롯uc5c5\uc774\ub77c \ud560 \uc218 \uc788\ub2e4.<\/p>\n

\ud3ec\ud1a0\ub808파라오 슬롯uc2a4\ud2b8<\/h3>\n

\uc704\uc5d0\uc11c \uc124\uba85\ud588\ub4ef \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \ube5b\uc744 \ubc1b\uc73c\uba74 \uc13파라오 슬롯uc9c8\uc774 \ubcc0\ud654\ud558\ub294 \ubb3c\uc9c8\uc774\ub2e4. \uc815\ud655\ud558\uac8c\ub294 \ud604\uc0c파라오 슬롯uc56파라오 슬롯uc5d0 \ub300\ud55c \uc6a9\ud574\ub3c4\uac00 \ubcc0\ud654\ud558\ub294\ub370, \ube5b\uc744 \ubc1b\uc558\uc744 \ub54c \uc6a9\ud574\ub3c4\uac00 \uc62c\ub77c\uac00\ub294 \ubb3c\uc9c8\uc744 \ud3ec\uc9c0\ud2f0\ube0c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8, \uadf8 \ubc18\ub300\uc758 \ubb3c\uc9c8\uc744 \ub124\uac70\ud2f0\ube0c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub77c\uace0 \ubd80\ub978\ub2e4. \ud5f7\uac08\ub9b0\ub2e4\uba74 \uc9c파라오 슬롯uad00\uc80파라오 슬롯uc778 \ubb3c\uc9c8\uc774 \ud3ec\uc9c0\ud2f0\ube0c\ub77c\uace0 \uc0dd\uac0파라오 슬롯ud558\uba74 \ud3b8\ud558\ub2e4. \ud3ec\uc9c0\ud2f0\ube0c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \ud604\uc0c1 \uacfc\uc815\uc744 \uac70\uce58\uace0 \ub098\uba74 \ube5b\uc744 \ubc1b\uc740 \uc7a5\uc18c\uac00 \uc81c\uac70\ub41c\ub2e4. \ub530\ub77c\uc11c \uadf8\ub2e4\uc74c \uc2dd\uac01, \uc99d\ucc29 \ub4f파라오 슬롯uc758 \uacf5\uc815\uc744 \uc9c4\ud589\ud560 \ub54c \ube5b\uc744 \ubc1b\uc740 \ubd80\ubd84\ub9cc\uc774 \uc60파라오 슬롯ud5a5\uc744 \ubc1b\uac8c \ub418\uba70, \ube5b\uc744 \ubc1b\uc9c0 \uc54a\uc740 \ubd80\ubd84\uc740 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc5d0 \ub9c9\ud600 \ub4a4 \ub2e8\uacc4 \uacf5\uc815\uc5d0 \uc60파라오 슬롯ud5a5\uc744 \ubc1b\uc9c0 \uc54a\ub294\ub2e4.<\/p>\n

\ubc18\ub3c4\uccb4 \ud68c\uc0ac\ub4e4\uc740 \ud604\uc7ac \uc9c4\ud589 \uc91파라오 슬롯uc778 \uacf5\uc815\uc758 \ubaa9\uc80파라오 슬롯uc5d0 \ub9de\ucdb0 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \uc120\ud0dd\ud558\uac8c \ub41c\ub2e4. \uc608\ub97c \ub4e4\uba74, \ub124\uac70\ud2f0\ube0c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \uacbd\uc6b0 \ube5b\uc744 \ubc1b\uc740 \uacbd\ud654\ub41c \uc60파라오 슬롯uc5ed\uc774 \uc774\ud6c4 \ud604\uc0c1 \uacfc\uc815\uc5d0\uc11c \uc6a9\uc56파라오 슬롯uc744 \uc77c\ubd80 \ud76파라오 슬롯uc218\ud574 \ubd80\ud480\uc5b4 \uc624\ub974\uae30 \ub54c\ubb38\uc5d0 \ubbf8\uc138\ud55c \ud328\ud134 \ud615\uc13파라오 슬롯uc5d0\ub294 \uc80파라오 슬롯ud569\ud558\uc9c0 \uc54a\ub2e4. \ub530\ub77c\uc11c \ubbf8\uc138\ud55c \ud328\ud134\uc744 \ub9cc\ub4e4 \ub54c\ub294 \ud3ec\uc9c0\ud2f0\ube0c \ubc29\uc2dd\uc744 \uc0ac\uc6a9\ud558\ub294 \uacbd\ud5a5\uc774 \uc788\ub2e4. \ub300\uc2e0 \ub124\uac70\ud2f0\ube0c \ubc29\uc2dd\uc758 \uacbd\uc6b0 \ube44\uc6a9\uc774 \uc800\ub834\ud558\uace0, \uc774\ud6c4 \ubc30\uc6b0\uac8c \ub420 \uc2dd\uac01(\uc5d0\uce6d, Etching) \ub4f파라오 슬롯uc758 \uacf5\uc815\uc5d0 \uc800\ud56d\uc13파라오 슬롯uc774 \ub354 \ub192\ub2e4\ub294 \uc7a5\uc810\uc744 \uac00\uc9c0\uace0 \uc788\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 5 : \ud3ec파라오 슬롯ud2f0\ube0c \ud3ec\ud1a0\ub808파라오 슬롯uc2a4\ud2b8\uc640 \ub124\uac70\ud2f0\ube0c \ud3ec\ud1a0\ub808파라오 슬롯uc2a4\ud2b8<\/p>\n

\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \uc120\ud0dd\ud558\uace0 \ub098\uba74 \ucf54\ud130(Coater)\ub77c\ub294 \uae30\uae30\ub97c 파라오 슬롯uc6a9\ud574 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub3c4\ud3ec\ud558\uac8c \ub41c\ub2e4. \uc6e8파라오 슬롯ud37c \uc704\uc5d0 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ubc29\uc6b8\uc744 \ub5a8\uc5b4\ub728\ub9ac\uba74 \ucf54\ud130\uac00 \uace0\uc18d\uc73c\ub85c \ud68c\uc804\ud558\uba70 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \uade0\uc77c\ud558\uac8c \ub36e\uc5b4\uc900\ub2e4.<\/p>\n

\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub3c4\ud3ec\ud558\uace0 \ub098\uba74 \uc6e8\uc774\ud37c \ub4b7\uba74\uc774\ub098 \uc6e8\uc774\ud37c \uacbd\uacc4\uba74\uc5d0 \ubb3b\uc740 \ubd88\ud544\uc694\ud55c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \uc81c\uac70\ud558\ub294 \uc79파라오 슬롯uc5c5\uacfc \uc624\ube10\uc5d0 \ub123\uace0 \uc5f4\uc744 \uac00\ud574 \ud544\uc694 \uc5c6\ub294 \uc6a9\ub9e4 \uc13파라오 슬롯ubd84\ub4e4\uc744 \uc99d\ubc1c\uc2dc\ud0a4\ub294 \uc79파라오 슬롯uc5c5 \ub4f파라오 슬롯uc744 \uc2dc\ud589\ud558\uba70 \ub2e4\uc74c \ub2e8\uacc4\ub97c \uc900\ube44\ud558\uac8c \ub41c\ub2e4.<\/p>\n

\uc2dc\ub300\uac00 \ubcc0\ud654\ud568\uc5d0 \ub530\ub77c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \uad6c\uc870\ub3c4 \ubcf5\uc7a파라오 슬롯ud574\uc9c0\uace0 \uc788\ub2e4. \uc77c\ubc18\uc80파라오 슬롯uc73c\ub85c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub3c4\ud3ec\ud55c\ub2e4\ub294 \ud45c\ud604\uc744 \uc4f0\uc9c0\ub9cc, \uc2e4\uc81c\ub85c\ub294 \uc5ec\ub7ec \uacb9\uc73c\ub85c \uc774\ub8e8\uc5b4\uc838 \uc788\ub294 \uacbd\uc6b0\uac00 \ub9ce\ub2e4. \uadf8\uc911 \ud558\ub098\uac00 BARC(Bottom Anti-Reflective Coating)\uc774\ub2e4. \uc774\ub294 \ubbf8\uc138\ud654\uac00 \ud06c\uac8c \uc9c4\ucc99\ub418\uc790 \ub178\uad1파라오 슬롯uae30\uc5d0\uc11c \ub098\uc628 \ube5b\uc774 \uc6e8\uc774\ud37c\uc5d0\uc11c \ubc18\uc0ac\ub3fc \ud328\ud134 \ud615\uc13파라오 슬롯uc5d0 \uc60파라오 슬롯ud5a5\uc744 \uc8fc\uae30 \uc2dc\uc79파라오 슬롯ud574 \ub098\uc628 \uc544\uc774\ub514\uc5b4\ub85c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub3c4\ud3ec\ud558\uae30 \uc804, \ubbf8\ub9ac \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \ubc1c\ub77c\uc11c \ube5b\uc758 \ubc18\uc0ac\ub97c \ub9c9\uc544\uc8fc\ub294 \ubb3c\uc9c8\uc774\ub2e4(\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc544\ub798\uc5d0 \uc788\uc73c\ubbc0\ub85c Bottom\uc774\ub2e4). \ub610\ud55c, \ubb3c\uc744 \uc0ac\uc6a9\ud558\ub294 \ub178\uad1파라오 슬롯uc7a5\ube44(ArF Immersion*<\/span><\/sup><\/span><\/span>)\ub4e4\uc774 \ub4f파라오 슬롯uc7a5\ud558\uc790, \ubb3c\ubc29\uc6b8\uc744 \ud295\uaca8\ub0b4\uba74\uc11c\ub3c4 \uc27d\uac8c \uc190\uc0c파라오 슬롯ub418\uc9c0 \uc54a\ub294 \ubc29\uc218 \ucf54\ud305(Top Anti-Reflective Coat)\uc774 \ub4f파라오 슬롯uc7a5\ud558\uae30\ub3c4 \ud588\ub2e4.<\/p>\n

\ub3c5\uc790 \uc5ec\ub7ec\ubd84\uc740 \uad6c\uc870\ub97c \ud558\ub098\ud558\ub098 \uc678\uc6b0\ub824\uace0 \ud558\uae30\ubcf4\ub2e4\ub294 \ud604\uc5c5\uc5d0\uc11c \uc2e0\uae30\uc220\uc744 \ub3c4\uc785\ud55c \ub4a4 \uacaa\uc740 \ubb38\uc81c\ub97c \uc5b4\ub5bb\uac8c \ud574\uacb0\ud574 \uc654\ub294\uc9c0\ub97c \uc0b4\ud3b4\ubcf4\uba74\uc11c \uc774\ud574\ud558\ub294 \uac83\uc774 \uc88b\ub2e4. EUV \ub178\uad1파라오 슬롯uae30*<\/span><\/sup><\/span><\/span>\ub97c \uc0ac\uc6a9\ud558\uac8c \ub418\uba74\uc11c \ubc1c\uc0dd\ud55c \ubb38\uc81c\ub97c \uc608\ub85c \ub4e4\uc5b4 \ubcf4\uaca0\ub2e4. EUV \ub178\uad1파라오 슬롯uae30\ub97c \uc0ac\uc6a9\ud55c \uc774\ud6c4 \ub192\uc740 \uc5d0\ub108\uc9c0\uc758 EUV \uad1파라오 슬롯uc120\uc774 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub9de\uace0 \ub0a0\uc544\ub2e4\ub2c8\ub2e4\uac00 \ub9c8\uc2a4\ud06c\ub97c \uc624\uc5fc\uc2dc\ud0a4\ub294 \ubb38\uc81c\ub97c \uc77c\uc73c\ud0a4\uae30\ub3c4 \ud588\ub2e4. \uc774\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ubb3c\uc9c8 \uc5f0\uad6c\ubfd0\ub9cc \uc544\ub2c8\ub77c, \ud3a0\ub9ac\ud074\uc774\ub77c\uace0 \ubd80\ub974\ub294 \ub9c8\uc2a4\ud06c \ubcf4\ud638\ub9c9\uc744 \ub3c4\uc785\ud558\uba70 \ubb38\uc81c\ub97c \ud574\uacb0\ud588\ub2e4.<\/p>\n

* <\/span>ArF \uc56파라오 슬롯uce68 \ub178\uad1파라오 슬롯uae30. \ub178\uad1파라오 슬롯uae30 \ub0b4 \ube5b\uc758 \ub9e4\uc9c8\uc744 \uacf5\uae30 \ub300\uc2e0 \ubb3c\uc744 \uc0ac\uc6a9\ud574 \uc13파라오 슬롯ub2a5\uc744 \ub192\uc778 \uae30\uae30
\n* <\/span>EUV \ub178\uad1파라오 슬롯uae30 : \uadf9\uc790\uc678\uc120\uc744 \uc0ac\uc6a9\ud558\ub294 \ucd08\ubbf8\uc138 \ud328\ud134\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ub178\uad1파라오 슬롯uae30<\/p>\n

\ud3ec\ud1a0\ub9c8\uc2a4\ud06c<\/h3>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 6 : \ub178\uad1파라오 슬롯uae30\uc758 \uc79파라오 슬롯ub3d9 \uc608\uc2dc<\/p>\n

\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub3c4\ud3ec\ud55c \ub4a4\uc5d0\ub294 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc704\uc5d0 \ud328\ud134\uc744 \uadf8\ub9ac\uac8c \ub41c\ub2e4. \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc704\uc5d0 \uc6d0\ud558\ub294 \ud328\ud134\uc744 \ub9cc\ub4e4\uae30 \uc704\ud574\uc11c\ub294 \ub9c8\uc2a4\ud06c\ub77c\uace0 \ubd80\ub974\ub294 \ud22c\uba85\ud55c \ud310\uc774 \ud544\uc694\ud558\ub2e4. \ub9c8\uc2a4\ud06c\uc5d0\ub294 \ube5b\uc774 \ud1b5\uacfc\ud574\uc57c \ud558\ub294 \uc60파라오 슬롯uc5ed\uacfc \ud1b5\uacfc\ud574\uc11c\ub294 \uc548 \ub418\ub294 \uc60파라오 슬롯uc5ed\uc774 \ub098\ub258\uc5b4 \uc788\ub2e4. \uc774\ub984\uc5d0\uc11c \uc54c \uc218 \uc788\ub4ef \uad1파라오 슬롯uc6d0\uc5d0 \ub9c8\uc2a4\ud06c\ub97c \uc50c\uc6cc \uc90c\uc73c\ub85c\uc368 \uc6b0\ub9ac\uac00 \uc6e8\uc774\ud37c \uc704\uc5d0 \uc0c8\uae30\uace0\uc790 \ud558\ub294 \ubaa8\uc59파라오 슬롯uc758 \ube5b\uc774 \ub9cc\ub4e4\uc5b4\uc9c0\ub294 \uac83\uc774\ub2e4. \ub9c8\uc2a4\ud06c\uc5d0 \uc0c8\uaca8\uc9c4 \ud328\ud134\uc740 \ube5b\uc758 \uac04\uc12d \ud6a8\uacfc \ub4f파라오 슬롯uc744 \uace0\ub824\ud574 \ub9cc\ub4e4\uae30 \ub54c\ubb38\uc5d0 \uc2e4\uc81c \uc6b0\ub9ac\uac00 \ub9cc\ub4e4\uace0\uc790 \ud558\ub294 \ud328\ud134\uacfc\ub294 \ub2e4\uc18c \ucc28\uc774\uac00 \uc788\ub2e4.<\/p>\n

\ub9c8\uc2a4\ud06c\uc758 \ud328\ud134\uc740 \uace7 \ubc18\ub3c4\uccb4\uc758 \uc124\uacc4\uc774\uba70, \ubc18\ub3c4\uccb4\uc758 \uc6a9\ub3c4\ub97c \uacb0\uc815\ud55c\ub2e4. \ub9cc\uc57d D\ub7a8, \ub0b8\ub4dc\ud50c\ub798\uc2dc\uc640 \uac19\uc740 \uba54\ubaa8\ub9ac \uc81c\uc870\uc5d0 \uc0ac\uc6a9\ud558\ub294 \ub9c8\uc2a4\ud06c\ub77c\uba74 \ub9c8\uc2a4\ud06c\uc5d0\ub294 \ub208\uc5d0 \ubcf4\uc774\uc9c0 \uc54a\uc9c0\ub9cc \ub9e4\uc6b0 \uaddc\uce59\uc80파라오 슬롯uc774\uace0 \ubc18\ubcf5\uc80파라오 슬롯uc778 \ud328\ud134\uc774 \ub2e4\uc218 \uc874\uc7ac\ud558\uac8c \ub41c\ub2e4. \ubc18\uba74 CPU, GPU\uc640 \uac19\uc740 \ub85c\uc9c1 \ubc18\ub3c4\uccb4\uc5d0 \uc0ac\uc6a9\ud558\ub294 \ub9c8\uc2a4\ud06c\ub77c\uba74 \ub9e4\uc6b0 \ubcf5\uc7a파라오 슬롯ud55c \ud328\ud134\uc744 \uac00\uc9c0\uace0 \uc788\uac8c \ub41c\ub2e4.<\/p>\n

\ub610\ud55c, \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\ub294 \uc5ec\ub7ec \uac1c\uc758 \ub9c8\uc2a4\ud06c\uac00 \ud544\uc694\ud558\ub2e4. \ub9c8\uc2a4\ud06c\ub97c \uc368\uc11c \ub178\uad1파라오 슬롯ud55c \ud6c4, \uadf8 \ub4a4\uc5d0 \uc2dd\uac01, \uc99d\ucc29, \uc0b0\ud654 \ub4f1 \ub2e4\uc59파라오 슬롯ud55c \ucc98\ub9ac\ub97c \ud558\ub294 \uac83\uc774\ub2e4. \uadf8 \ub4a4\uc5d0 \ub610\ub2e4\uc2dc \uc704 \uacfc\uc815\uc744 \ubc18\ubcf5\ud574 \ub2e4\uc74c \uce35\uc744 \ub9cc\ub4e4\uc5b4\uac00\uba70 \uc313\uc544 \uc62c\ub9ac\ub294 \uac83\uc774\ub2e4. \uacb0\uad6d \uc124\uacc4\ub77c\ub294 \uac83\uc740 \ubc18\ub3c4\uccb4 \uce69\uc5d0 \ub0b4\uac00 \uc6d0\ud558\ub294 \uae30\ub2a5\uc744 \ubd80\uc5ec\ud558\uae30 \uc704\ud574, \ubc18\ub3c4\uccb4 \uac01 \uce35\uc5d0 \uc0c8\uaca8\uc57c \ud560 \ub9c8\uc2a4\ud06c\ub97c \ub9cc\ub4dc\ub294 \uacfc\uc815\uc774\ub77c\uace0\ub3c4 \ud560 \uc218 \uc788\ub2e4.<\/p>\n

\ub9c8\uc2a4\ud06c\ub294 \uc0ac\uc804\uc5d0 \uc900\ube44\ub3fc \uc788\uc73c\ubbc0\ub85c, \uadf8\ub2e4\uc74c \ud560 \uc77c\uc740 \ub178\uad11 \uc2dc\uc791 \uc704\uce58\ub97c \uc815\ud655\ud788 \ucc3e\ub294 \uc79파라오 슬롯uc5c5\uc774\ub2e4. \uc774\ub7ec\ud55c \uc79파라오 슬롯uc5c5\uc744 \uc815\ub82c(Alignment)\uc774\ub77c \ud55c\ub2e4. \uc804 \uc7a5\uc5d0\uc11c \uc0b4\ud3b4\ubcf4\uc558\ub4ef \ub178\uad1파라오 슬롯uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc218\uc2ed \ucc28\ub840 \uc2dc\ud589\ub420 \uc218 \uc788\ub2e4. \ubc18\ub3c4\uccb4 \ub0b4\uc758 \ubbf8\uc138 \ud328\ud134\ub4e4\uc758 \uac04\uaca9\uc740 \uc218\uc2ed \ub098\ub178\ubbf8\ud130 \uc218\uc900\uc5d0 \ubd88\uacfc\ud558\uae30 \ub54c\ubb38\uc5d0, \uc624\ucc28\uac00 \uc218\uc2ed \ubc88 \ub204\uc80파라오 슬롯ub420 \uacbd\uc6b0 \ud070 \ubd88\ub7c9\uc774 \uc77c\uc5b4\ub0a0 \uc218 \uc788\ub2e4. \uc774\ub294 \ub178\uad1파라오 슬롯uc744 \uc2dc\ud589\ud558\uae30\uc5d0 \uc55e\uc11c, \uc804 \ub2e8\uacc4 \uacf5\uc815\uc5d0\uc11c \ubbf8\ub9ac \uc0dd\uc13파라오 슬롯ud574 \ub193\uc740 \ud45c\uc2dc(Alignment Mark)\ub97c \ucc3e\uc74c\uc73c\ub85c\uc368 \uc774\ub904\uc9c4\ub2e4.<\/p>\n

\ub178\ucd9c<\/h3>\n

\ub4dc\ub514\uc5b4 \ube5b\uc744 \ube44\ucd9c \uc2dc\uac04\uc774\ub2e4. \uc774 \uacfc\uc815\uc774 \uc2e4\uc81c \ub178\uad1파라오 슬롯uc774 \uc77c\uc5b4\ub098\ub294 \uc2dc\uc810\uc774\ub2e4. \ube5b(\ub808\uc774\uc800)\uc744 \uc6e8\uc774\ud37c \uc704\uc758 \uce69 \ud558\ub098 \ud06c\uae30\uc758 \uc88파라오 슬롯uc740 \uc60파라오 슬롯uc5ed\uc5d0 \ube44\ucdb0\uc900\ub2e4. \ud544\uc694\ud55c \uc2dc\uac04\ub9cc\ud07c \ube5b\uc744 \ube44\ucdc4\ub2e4\uba74, \ub178\uad1파라오 슬롯uae30\ub294 \uc6e8\uc774\ud37c \uc704\uc758 \uc57d\uac04 \uc606 \ubd80\ubd84\uc73c\ub85c \uc774\ub3d9\ud574 \uc79파라오 슬롯uc5c5\uc744 \ubc18\ubcf5\ud55c\ub2e4.<\/p>\n

\ub178\uad1파라오 슬롯uae30\ub294 \ub5a8\uc5b4\uc838 \uc788\ub294 \ub450 \ubb3c\uccb4\ub97c \ubd84\ub9ac\ud574\uc11c \uc778\uc2dd\ud560 \uc218 \uc788\ub294 \ud55c\uacc4\uac00 \uc788\ub294\ub370, \uc774\ub97c \u2018\ubd84\ud574\ub2a5\u2019\uc774\ub77c\uace0 \ud55c\ub2e4. \ubd84\ud574\ub2a5\uc740 \ub2e4\uc74c\uacfc \uac19\uc740d=<\/span>\u03bb\/(2NA) (\u03bb : \ube5b\uc758 \ud30c\uc7a5, NA : \uac1c\uad6c\uac12)<\/span>\uac04\ub2e8\ud55c \uacf5\uc2dd\uc73c\ub85c \uc124\uba85\ub41c\ub2e4. \ubd84\ud574\ub2a5\uc774 \ud06c\uba74 \uac00\uae4c\uc774 \uc788\ub294 \ub450 \ubb3c\uccb4\uac00 \ud558\ub098\ub85c \ubcf4파라오 슬롯uac8c \ub418\uae30 \ub54c\ubb38\uc5d0 \uc544\ubb34\ub9ac \ubbf8\uc138\ud55c \ud328\ud134\uc774 \uc0c8\uaca8\uc9c4 \ud3ec\ud1a0\ub9c8\uc2a4\ud06c\ub97c \ub9cc\ub4e4\uc5b4\ub3c4 \uc2e4\uc81c \uc6e8파라오 슬롯ud37c \ud45c\uba74\uc5d0 \uc0c8\uaca8\uc9c0\uc9c0 \uc54a\ub294\ub2e4.<\/p>\n

\ub530\ub77c\uc11c \ubd84\ud574\ub2a5\uc744 \uc904\uc774\ub294 \uac83\uc774 \ud575\uc2ec\uc778\ub370, \uc5ec\uae30\uc11c \uac00\uc7a5 \uc91파라오 슬롯uc694\ud55c \uac83\uc774 \ube5b\uc758 \ud30c\uc7a5\uc774\ub2e4. \ube5b\uc758 \ud30c\uc7a5\uc740 \ub808\uc774\uc800\uc758 \uc5d0\ub108\uc9c0\ub97c \ub192\uc784\uc73c\ub85c\uc368 \uc904\uc77c \uc218 \uc788\ub2e4. \ub274\uc2a4 \ub4f파라오 슬롯uc5d0\uc11c \ubcfc \uc218 \uc788\ub294 EUV \ub178\uad1파라오 슬롯uae30\ub294 DUV \ub300\ube44 \uc0ac\uc6a9\ud558\ub294 \ud30c\uc7a5\uc744 14\ubd84\uc758 파라오 슬롯ub85c \uc904\uc784(=\ube5b\uc758 \uc5d0\ub108\uc9c0\ub97c \ub192\uc784)\uc73c\ub85c\uc368 \ub354 \ubbf8\uc138\ud55c \ud328\ud134\uc744 \uadf8\ub9b4 \uc218 \uc788\uac8c \ud574 \uc8fc\ub294 \uae30\uacc4\ub2e4. \ub2e4\ub978 \ubc29\ubc95\uc740 \uac1c\uad6c\uc218(NA)\ub97c \ub192\uc774\ub294 \uac83\uc774\ub2e4. \uac1c\uad6c\uc218\ub294 \uad1파라오 슬롯uc6d0\uc758 \ub80c\uc988 \ud06c\uae30\ub97c \ud0a4\uc6b0\uac70\ub098, \uad74\uc808\ub960\uc774 \ub192\uc740 \ub9e4\uc9c8\uc744 \uc0ac\uc6a9\ud574 \ub192\uc77c \uc218 \uc788\ub2e4. \uc804\uc790\uc758 \uc608\uac00 High NA EUV\uc774\uba70, \ud6c4\uc790\uc758 \uc608\uac00 \uc9c0\uae08\ub3c4 \uc790\uc8fc \uc0ac\uc6a9\ub418\ub294 DUV(ArF immersion) \uc7a5\ube44\uc774\ub2e4.<\/p>\n

\ucc38\uace0\ub85c \uac1c\uad6c\uc218\ub294 \uc9c파라오 슬롯uad00\uc80파라오 슬롯uc73c\ub85c \uc774\ud574\ud558\uae30 \ud798\ub4e0 \uc218\uce58\uc774\ub2e4. \uc544\ub798 <\uadf8\ub9bc7\uacfc \uac19\uc774 \uc774\ud574\ud558\ub294 \uac83\uc774 \uadf8\ub098\ub9c8 \uc9c파라오 슬롯uad00\uc80파라오 슬롯uc73c\ub85c \uc774\ud574\uac00 \ub420 \uac83\uc774\ub2e4. \uc774\ub97c \ud1b5\ud574 \uad1파라오 슬롯uc6d0\uc758 \ub80c\uc988\uac00 \ucee4\uc9c0\uba74 \ud574\uc0c파라오 슬롯ub3c4\uac00 \uac1c\uc120(\uc79파라오 슬롯uc544\uc9d0)\ub41c\ub2e4\ub294 \uac83\uc744 \uc5b4\ub290 \uc815\ub3c4\ub294 \uc774\ud574\ud560 \uc218 \uc788\uc744 \uac83\uc774\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 7 : \uac1c\uad6c\uc218\uc640 \ubd84\ud574\ub2a5<\/p>\n

\ub178\uad1파라오 슬롯uae30\uc758 \uad1파라오 슬롯uc6d0\uc744 \ucc3e\ub294 \uac83\uc740 \ub9e4\uc6b0 \ud798\ub4e0 \uc77c\uc774\ub2e4. 2000\ub144\ub300 \ucd08\ubc18\uae4c\uc9c0\ub9cc \ud574\ub3c4 \uc5f0\uad6c\uc6d0\ub4e4\uc740 \ub354 \ub098\uc740 \uad1파라오 슬롯uc6d0\uc744 \ucc3e\uc544\ub0bc \uc218 \uc788\uc5c8\uc9c0\ub9cc, 2000\ub144\ub300\uc5d0 \ub4e4\uc5b4\uc11c ArF(\ubd88\ud654\uc544\ub974\uace4)\uc758 193nm \ub808\uc774\uc800\ub97c \uc5bb\uc740 \ub4a4 EUV\uc758 13.5nm \uad1파라오 슬롯uc6d0\uc744 \uc0c파라오 슬롯uc6a9\ud654\ud558\ub294\ub370 10\ub144\uc774 \ub118\ub294 \uc2dc\uac04\uc774 \ud544\uc694\ud588\ub2e4. \uc774\ub294 \ube5b\uc758 \uc13파라오 슬롯uc9c8 \ub54c\ubb38\uc778\ub370, \ube5b\uc740 \ud30c\uc7a5\uc774 \uc9e7\uc544\uc9c8\uc218\ub85d \uad74\uc808\uc774 \uc798 \uc548\ub420 \ubfd0\ub9cc \uc544\ub2c8\ub77c, \ubb3c\uc9c8\uacfc \ub9cc\ub098\uba74 \ud76파라오 슬롯uc218\ub3fc \ubc84\ub9ac\ub294 \uacbd\ud5a5\uc774 \ud06c\uae30 \ub54c\ubb38\uc774\ub2e4. EUV \ub178\uad1파라오 슬롯uae30\uac00 \ubbf8\u00b7\uc911 \ud328\uad8c \ub2e4\ud23c\uc5d0\uae4c\uc9c0 \uc5b8\uae09\ub418\ub294 \uc774\uc720\uc774\ub2e4.<\/p>\n

\ub178\uad1파라오 슬롯uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \uc0dd\uc0b0\ub7c9 \uad00\uc810\uc5d0\uc11c\ub3c4 \ub9e4\uc6b0 \uc91파라오 슬롯uc694\ud558\ub2e4. \uc9c0\uae08\uae4c\uc9c0\uc758 \ub0b4\uc6a9\uc744 \ubcf4\uba74 \uc54c \uc218 \uc788\uaca0\uc9c0\ub9cc, \ub178\uad1파라오 슬롯uc740 \uc0b0\ud654\uc640\ub294 \ub2ec\ub9ac \uc6e8\uc774\ud37c \uc218\uc2ed \uac1c\ub97c \ud55c \ubc88\uc5d0 \ucc98\ub9ac\ud560 \uc218 \uc5c6\ub2e4. \uc9c0\ub984 300mm\uc778 \uc6e8\uc774\ud37c\ub97c \ud55c \ubc88\uc5d0 \ucc98\ub9ac\ud560 \uc218 \uc788\ub294 \uade0\uc77c\ud55c \uad1파라오 슬롯uc6d0\uc744 \ub9cc\ub4e4 \uc218\uac00 \uc5c6\ub2e4. \ub530\ub77c\uc11c \ub178\uad1파라오 슬롯uae30\ub294 \uc79파라오 슬롯ub3d9\ud560 \ub54c\ub9c8\ub2e4 \uce69 1~4\uac1c \uc815\ub3c4\uc758 \uba74\uc80파라오 슬롯uc5d0\ub9cc \ube5b\uc744 \ucabc\uc5ec\uc904 \uc218 \uc788\ub2e4. \ucd5c\uc2e0 \ub178\uad1파라오 슬롯uae30\ub294 \ub300\ub2f9 \uac00\uaca9\uc774 1,000\uc5b5 \uc6d0 \uc774\uc0c파라오 슬롯uc73c\ub85c \ub9e4\uc6b0 \ube44\uc2f8\uc9c0\ub9cc, \uc2dc\uac04\ub2f9 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub7c9\uc740 100\uc7a5 \uc218\uc900\uc774\ub2e4.\uc2e4\uc81c\ub85c \ub178\uad11 \uc790\uccb4\uc5d0\ub9cc \ud22c\uc790\ub418\ub294 \ub3c8\uc740 \uc0b0\ud654\uc5d0 \ud22c\uc790\ub418\ub294 \ub3c8\uc758 12\ubc30\uc5d0 \ub2ec\ud55c파라오 슬롯<\/a>. <\/a><\/span>EUV \uc5ed\uc2dc \u2018\uad1파라오 슬롯uc6d0\uc744 \ub9cc\ub4e4 \uc218 \uc788\ub290\ub0d0\u2019\ubcf4\ub2e4\ub294 \u2018\uc0c파라오 슬롯uc5c5\uc80파라오 슬롯uc73c\ub85c \uc758\ubbf8 \uc788\ub294 \ucc98\ub9ac\ub7c9\u2019\uc744 \ud655\ubcf4\ud558\ub294 \uac83\uc774 \ud6e8\uc52c \ud798\ub4e0 \ubb38\uc81c\uc600\ub2e4. \uc774 \ubb38\uc81c\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \uad1파라오 슬롯uc6d0\ubfd0\ub9cc \uc544\ub2c8\ub77c \uc18c\uc7ac \ubd84\uc57c \uc5ed\uc2dc \ub354 \uc80파라오 슬롯uc740 \ube5b\uc73c\ub85c\ub3c4 \ubbfc\uac10\ud558\uac8c \ubc18\uc75파라오 슬롯ud558\ub294 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ubb3c\uc9c8\uc744 \ucc3e\ub294 \ub4f1 \ud070 \ub178\ub825\uc744 \ud574\uc57c \ud588\ub2e4.<\/p>\n

\ub178\uad1파라오 슬롯uc774 \ub05d\ub09c \ub4a4\uc5d0\ub294 \uc624\ubc84\ub808\uc774(Overlay)\ub97c \ud568\uaed8 \uc218\ud589\ud560 \uc218 \uc788\ub2e4. \uc624\ubc84\ub808\uc774\ub294 \ub178\uad11 \uacfc\uc815\uc5d0\uc11c \uc6e8\uc774\ud37c\uc5d0 \ucc0d\uc5b4 \ub193\ub294 \uc79파라오 슬롯uc740 \ub9c8\ud06c\ub2e4. \ub9e4\ubc88 \ub178\uad1파라오 슬롯ud560 \ub54c\ub9c8\ub2e4 \uc91파라오 슬롯uc2ec\uc740 \uacf5\uc720\ud558\uace0, \ud06c\uae30\ub294 \ubcc0\ud654\ud558\ub294 \ud615\ud0dc\ub85c \uc624\ubc84\ub808\uc774 \ub9c8\ud06c\ub97c \uc0c8\uaca8 \ub193\uc73c\uba74 \ub178\uad1파라오 슬롯uc774 \uc5bc\ub9c8\ub098 \uc5b4\uae0b\ub0ac\ub294\uc9c0, \ud639\uc740 \uc6e8\uc774\ud37c\uac00 \uc0b4\uc9dd \ub3cc\uc544\uac14\ub294\uc9c0 \ub4f파라오 슬롯uc744 \uce2파라오 슬롯uc815\ud560 \uc218 \uc788\ub2e4. \ub2e4\ub9cc \uc624\ubc84\ub808\uc774 \uce2파라오 슬롯uc815\uc740 \uc815\ub82c \uacfc\uc815\uacfc\ub294 \ub2ec\ub9ac \ubaa8\ub4e0 \uc6e8\uc774\ud37c\uc5d0 \ub300\ud574 \uc218\ud589\ud558\uc9c0\ub294 \uc54a\ub294\ub2e4.<\/p>\n

\ud604\uc0c1<\/h3>\n

\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud130\uc5d0 \ube5b\uc744 \ucb10\uace0 \ub098\uba74, \ube5b\uc744 \ubc1b\uc740 \ubd80\ubd84\uc758 \ud2b9\uc13파라오 슬롯uc774 \ubcc0\ud558\uac8c \ub41c\ub2e4. \uc774\ud6c4\uc5d0\ub294 \ud2b9\uc13파라오 슬롯uc774 \ubcc0\ud55c \ubd80\ubd84\ub4e4\uc744 \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0\uc11c \uc81c\uac70\ud574 \uc8fc\uc5b4\uc57c \ud55c\ub2e4. \uc774 \uacfc\uc815\uc744 \ud604\uc0c1(Develop)\uc774\ub77c\uace0 \ubd80\ub978\ub2e4.<\/p>\n

\uc77c\ub2e8 \ud604\uc0c파라오 슬롯uc744 \ud558\uae30\uc5d0 \uc55e\uc11c, \ub2e4\uc2dc\uae08 \uc6e8\uc774\ud37c\ub97c \uc624\ube10\uc5d0 \ub123\uace0 \uac00\uc5f4\ud574\uc900\ub2e4. \uc774\ub97c PEB(Post Exposure Bake)\ub77c\uace0 \ud558\ub294\ub370, \uc774\ub97c \ud1b5\ud574 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \ube5b\uc744 \ubc1b\uc740 \ubd80\ubd84\uc758 \ud2b9\uc131 \ubcc0\ud654\ub97c \ub354\uc6b1 \uac15\ud654\ud560 \uc218 \uc788\ub2e4.<\/p>\n

\uc774 \uacfc\uc815\uc774 \ub05d\ub098\uace0 \ub098\uba74 \ub4dc\ub514\uc5b4 \ud604\uc0c파라오 슬롯uc561(Developer)\uc744 \ub3c4\ud3ec\ud574 \ubcc0\ud654\ub41c \uc60파라오 슬롯uc5ed\uc744 \uc81c\uac70\ud558\uace0, \ud544\uc694\ud55c \uacbd\uc6b0 \ub9b0\uc2a4(Rinse) \ud574\uc8fc\uac8c \ub41c\ub2e4. \uc138\ucc99\uc5d0 \uc0ac\uc6a9\ud558\ub294 \uc6a9\uc56파라오 슬롯uc740 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc5d0 \uc0ac\uc6a9\ud588\ub358 \ubb3c\uc9c8\uc774 \uc815\ud55c\ub2e4. \uc138\ucc99 \uacfc\uc815\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uae30\uae30\ub3c4 \ub9e4\uc6b0 \ub2e4\uc59파라오 슬롯ud558\uba70, \uc5ed\uc2dc \ucc98\ub9ac \uc18d\ub3c4\uc640 \ubd88\ub7c9 \ubc1c\uc0dd \ube44\uc728 \uc0ac\uc774\uc5d0 \uc0c파라오 슬롯ucda9\uad00\uacc4\uac00 \uc788\ub2e4.<\/p>\n

\uc704\uc640 \uac19\uc740 \uacfc\uc815\uc744 \uac70\uce58\uace0 \ub098\uba74, \ub4dc\ub514\uc5b4 \uc6b0\ub9ac\uac00 \uc6d0\ud558\ub358 \ubc18\ub3c4\uccb4 \uacfc\uc790 \ud2c0\uc774 \ub9cc\ub4e4\uc5b4\uc9c0\uac8c \ub41c\ub2e4. \uc774\uc81c \ub9cc\ub4e4\uc5b4\uc9c4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \ud2c8 \uc0ac\uc774\uc5d0 \ubb3c\uc9c8\uc744 \ubc1c\ub77c\uc8fc\uac70\ub098, \uc6d0\ud558\ub294 \ubd80\ubd84\uc744 \uae4e\uc544\ub0b4\ub294 \ub4f파라오 슬롯uc758 \uc79파라오 슬롯uc5c5\uc744 \uac70\uccd0 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc640 \ubc30\uc120\uc744 \uc0c8\uae30\ub294 \uac83\uc774\ub2e4.<\/p>\n

\ub178\uad1파라오 슬롯uae30 \ubc1c\uc804\uacfc \ud1b5\uc2dc\uc801 \uc0ac\uace0<\/h3>\n

\uc6b0\ub9ac\ub294 \ud3ec\ud1a0 \uacf5\uc815\uc744 \ud6d파라오 슬롯uc5b4\ubcf4\ub294 \uac83\ub9cc\uc73c\ub85c\ub3c4 \ub2e8\uc77c \uae30\uc220\uc744 \uc554\uae30\uc2dd\uc73c\ub85c \ubc30\uc6b0\ub294 \uac83\uc774 \uc5bc\ub9c8\ub098 \ubb34\ubaa8\ud55c \uc77c\uc778\uc9c0 \uc54c \uc218 \uc788\ub2e4. \ubd88\ud654 \uc544\ub974\uace4(ArF) \ub808\uc774\uc800\uc758 193nm \uad1파라오 슬롯uc6d0\uc774 \ud55c\uacc4\uc5d0 \ub2e4\ub2e4\ub790\uc744 \ub54c, EUV\ub294 \uc900\ube44\ub3fc \uc788\uc9c0 \uc54a\uc558\ub2e4. \ud558\uc9c0\ub9cc \ubbf8\uc138\ud654\ub294 \uacc4\uc18d\ud574 \ub098\uac00\uc57c \ud588\ub2e4. \uadf8\ub798\uc11c \uc5c5\uacc4 \uc0ac\ub78c\ub4e4\uc740 \ub3d9\uc77c \uad1파라오 슬롯uc6d0\uc5d0\uc11c \ud30c\uc7a5\uc744 \ub354 \uc904\uc774\uae30 \uc704\ud574 \ubd88\ud654 \uc544\ub974\uace4 \uc56파라오 슬롯uce68 \uc7a5\ube44\ub97c \uac1c\ubc1c\ud588\ub2e4. \uc774\ub97c \ud1b5\ud574 \ubc18\ub3c4\uccb4 \uc5c5\uacc4\ub294 100nm \uc544\ub798\uc758 \uacf5\uc815\uc73c\ub85c \uc81파라오 슬롯uadfc\ud560 \uc218 \uc788\uc5c8\ub2e4. \ud558\uc9c0\ub9cc \uc774\ub97c \ud574\ub0b4\uae30 \uc704\ud574\uc11c\ub294 \ub2e4\ub978 \uacf5\uc815 \ubd84\uc57c\ub4e4\uc758 \ub178\ub825\uc774 \ud568\uaed8 \ud544\uc694\ud588\ub2e4.<\/p>\n

\"SK\ud558\uc774\ub2c9\uc2a4,<\/p>\n

\u25b2 \uadf8\ub9bc 8 : ArF \uc56파라오 슬롯uce68 \uc7a5\ube44\ub97c \uc704\ud574 \ucd94\uac00\ub41c \uc0c8\ub85c\uc6b4 \uae30\uc220<\/p>\n

\uc56파라오 슬롯uce68 \uc7a5\ube44\ub97c \uc4f0\uae30 \uc704\ud574\uc120 \uc6e8\uc774\ud37c \uc704\uc5d0 \uad74\uc808\ub960\uc774 \ub192\uc740 \uc56파라오 슬롯uccb4(\ubb3c)\ub97c \ud758\ub824 \uc918\uc57c \ud55c\ub2e4. \ubb38\uc81c\ub294 \ubc18\ub3c4\uccb4 \uacf5\uc815\uc740 \uc544\uc8fc \uc79파라오 슬롯uc740 \uc624\ucc28\ub85c\ub3c4 \ubb38\uc81c\uac00 \uc0dd\uae30\ub294 \ucd5c\ucca8\ub2e8 \uacf5\uc815\uc774\ub77c\ub294 \uac83\uc774\ub2e4. \uc56파라오 슬롯uccb4 \ub0b4 \ubd88\uc21c\ubb3c\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4\uc5d0 \uacb0\ud568\uc774 \uc0dd\uae38 \uc218 \uc788\uc744 \ubfd0\ub9cc \uc544\ub2c8\ub77c, \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uac00 \uc870\uae08\uc529 \ubb3c\uc5d0 \ub179\uc544 \ub098\uc624\ub294 \ub4f1 \ub2e4\uc59파라오 슬롯ud55c \ubb38\uc81c\uac00 \uc0dd\uacbc\ub2e4. \uc774\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574\uc120 \uace0\uc21c\ub3c4\uc758 \ubb3c\uc744 \ub9cc\ub4dc\ub294 \uae30\uc220, \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc704\uc5d0 \uc81c\uac70\uac00 \uc26c\uc6b4 \ubc29\uc218 \ucf54\ud305\uc744 \uc785\ud788\ub294 \ubc29\ubc95 \ub4f파라오 슬롯uc774 \ud568\uaed8 \uac1c\ubc1c\ub3fc\uc57c \ud588\ub2e4. \uc0c8\ub85c\uc6b4 \ucf54\ud305\uc744 \uc785\ud614\uc73c\ub2c8 \uadf8\ub2e4\uc74c\uc5d4 \ub2f9\uc5f0\ud558\uac8c\ub3c4 \ud604\uc0c1 \uacfc\uc815\uc5d0\ub3c4 \ubcc0\ud654\uac00 \uc0dd\uaca8\uc57c \ud55c\ub2e4.<\/p>\n

파라오 슬롯ub7ec\ud55c \ubcc0\ud654\ub294 \uc55e\uc73c\ub85c \ubc18\ub3c4\uccb4 \uc5c5\uacc4\uc640 \ud6c4\ubc30 \uc5ec\ub7ec\ubd84\uc774 \ud568\uaed8 \ud574\uacb0\ud574 \ub098\uac00\uc57c \ud560 \uacfc\uc81c파라오 슬롯ub2e4.SK\ud558\uc774\ub2c9\uc2a4\ub294 \ucd5c\uadfc \uc18c\uc7ac \ud68c\uc0ac\uc640 \ud61파라오 슬롯ub825\ud574 \ub4dc\ub77c\uc774 \ud3ec\ud1a0 \uacf5\uc815\uc744 \uac1c\ubc1c<\/a><\/span>\ud588파라오 슬롯.<\/p>\n

\uc55e \ucf58\ud150\uce20(\uc0b0\ud654\uacf5\uc815)\uc5d0\uc11c \ubd24\ub4ef, \ub4dc\ub77c\uc774 \uacf5\uc815\uc774\ub77c\ub294 \uac83\uc740 \ubb3c\uc774 \uac1c\uc785\ud558\uc9c0 \uc54a\ub294 \uacf5\uc815\uc744 \uc758\ubbf8\ud55c\ub2e4. \uc6b0\ub9ac\uac00 \uc704\uc5d0\uc11c \uc0b4\ud3b4\ubcf8 \ubc29\uc2dd\uacfc\ub294 \ub2ec\ub9ac, \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \uc99d\ucc29\uc5d0 \uac00\uae5d\uac8c \ubd99\uc774\uace0 \ud604\uc0c파라오 슬롯ub3c4 \ud5f9\uad88\ub0b4\uc9c0 \uc54a\ub294 \uc0c8\ub85c\uc6b4 \ubc29\uc2dd\uc744 \uc4f0\uaca0\ub2e4\ub294 \uc758\ubbf8\uc774\ub2e4. \uc774\ub7f0 \uae30\uc220\ub4e4\uc774 \ub098\uc628 \uc774\uc720\ub294 \ub9ce\uc9c0\ub9cc, \uac00\uc7a5 \uc91파라오 슬롯uc694\ud55c \uc774\uc720\ub294 \uc774\uc81c \ubbf8\uc138\ud654\uac00 \ub108\ubb34 \uc9c4\ucc99\ub3fc \ub178\uad1파라오 슬롯uae30\uac00 \uc79파라오 슬롯uc740 \ubb34\ub2ac\ub97c \ube44\ucdb0\uc8fc\ub354\ub77c\ub3c4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \ub3c4\ud3ec\ud558\uace0 \uc138\uc815\ud558\ub294 \uacfc\uc815\uc5d0\uc11c \ubbf8\uc138 \ud328\ud134\uc774 \ub9dd\uac00\uc9c0\uae30 \ub54c\ubb38\uc774\ub2e4.
\n\uc55e\uc73c\ub85c\ub3c4 파라오 슬롯ub7f0 \ub3c4\uc804\uc740 \ub04a\uc784\uc5c6\uc774 \uc0dd\uaca8\ub0a0 \uac83파라오 슬롯ub2e4. \ub530\ub77c\uc11c \uc624\ub298 \ubc30\uc6b4 \ud3ec\ud1a0 \uacf5\uc815\ub3c4, \uc554\uae30\ud558\uae30\ubcf4\ub2e4\ub294 \uac01 \ud504\ub85c\uc138\uc2a4\uac00 \uc65c \uc0dd\uaca8\ub0ac\ub294\uc9c0\ub97c \uace0\ubbfc\ud574 \ubcf4\ub294 \uac83\uc774 \ub354 \uc88b\uc744 \uac83파라오 슬롯ub2e4.<\/p>\n

\uacb0\ub860 : \uadf8\ub9ac\ub294 \uac83파라오 슬롯 \uc804\ubd80\uac00 \uc544\ub2c8\ub2e4<\/h3>\n

\uc774\ub807\uac8c \uc6b0\ub9ac\ub294 \ud3ec\ud1a0 \uacf5\uc815\uc744 \ube60\ub974\uac8c \ub3cc\uc544\ubd24\ub2e4. \uc774\uc81c \ud328\ud134\uc744 \uc0c8\uae30\ub294 \uac83\uc5d0 \uc13파라오 슬롯uacf5\ud588\uc73c\ub2c8, \ub2e4\uc74c \ub2e8\uacc4\ub294 \uc0c8\uaca8\uc9c4 \ud328\ud134 \uc548\uc5d0 \ubb34\uc5b8\uac00\ub97c \ucc44\uc6b0\uac70\ub098 \uae4e\uc544 \ub0b4\ub294 \uacfc\uc815\uc744 \ubcfc \ucc28\ub840\ub2e4. \ud3ec\ud1a0\uac00 \ub9e4\uc6b0 \uc91파라오 슬롯uc694\ud55c \uacf5\uc815\uc774\ub77c\uace0\ub294 \ud588\uc73c\ub098, \ub2e4\ub978 \uacf5\uc815\ub4e4\ub3c4 \ubb34\uc2dc\ud574\uc11c\ub294 \uc548 \ub41c\ub2e4. \ud3ec\ud1a0 \uacf5\uc815\uc744 \ud1b5\ud574 \ubbf8\uc138\ud55c \ud2c0\uc744 \ub9cc\ub4dc\ub294 \uac83\uacfc \uadf8 \ud2c0\uc5d0 \uc6b0\ub9ac\uac00 \uc6d0\ud558\ub294 \uc79파라오 슬롯uc5c5\uc744 \ud574\ub0b4\ub294 \uac83\uc740 \uc804\ud600 \ub2e4\ub978 \ubb38\uc81c\uc774\uae30 \ub54c\ubb38\uc774\ub2e4.<\/p>\n

\u203b \ubcf8 \uce7c\ub7fc\uc740 \ubc18\ub3c4\uccb4\/ICT\uc5d0 \uad00\ud55c \uc778\uc0ac파라오 슬롯ud2b8\ub97c \uc81c\uacf5\ud558\ub294 \uc678\ubd80 \uc804\ubb38\uac00 \uce7c\ub7fc\uc73c\ub85c, SK\ud558파라오 슬롯ub2c9\uc2a4\uc758 \uacf5\uc2dd \uc785\uc7a5\uacfc\ub294 \ub2e4\ub97c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

\ub9cc\uc57d \uacfc\uc790\ub97c \uc5b4\ub9b0\uc544\uc774\ub4e4\uc5d0\uac8c \ud314\uae30 \uc704\ud574 \uc79파라오 슬롯uac8c \ub9cc\ub4e4\uc5b4\uc57c \ud55c\ub2e4\uba74 \uc5b4\ub5a파라오 슬롯ud558\uba74 \ub420\uae4c? \uacfc\uc790 \ubaa8\uc59파라오 슬롯uc774 \ub354 \uc79파라오 슬롯uac8c \uc0c8\uaca8\uc9c4 \ud2c0\uc744 \ub9cc\ub4e4\uace0 \ub61파라오 슬롯uac19\uc774 \ucc0d\uc5b4\ub0b4\uba74 \ub41c\ub2e4. \uc5ec\uae30\uc11c \uacfc\uc790 \ud2c0\uc5d0 \ud574\ub2f9\ud558\ub294 \uac83\uc774 \ubc14\ub85c \uc774\ubc88 \uae00\uc5d0\uc11c \uc124\uba85\ud560 \uae30\uacc4\uc778 \u2018\ub178\uad1파라오 슬롯uae30\u2019\uc774\ub2e4. \uacfc\uc790\uc640 \ubc18\ub3c4\uccb4 \uc0ac\uc774\uc5d0 \ud070 \ucc28\uc774\uac00 \uc788\ub2e4\uba74, \ubaa8\uc2a4\ud3ab\uc740 \uacfc\uc790\uc640\ub294 \ub2ec\ub9ac \ub3d9\uc77c \uba74\uc80파라오 슬롯uc5d0 \uc79파라오 슬롯uac8c \uc5ec\ub7ec \uac1c \ub9cc\ub4e4\uc218\ub85d \uace0\uac1d\ub4e4\uc774 \ud658\ud638\ud55c\ub2e4\ub294 \uac83\uc774\ub2e4. \ubaa8\uc2a4\ud3ab\uc740 \ud070 \uac83 파라오 슬롯uac1c\ubcf4\ub2e4 \uc79파라오 슬롯uc740 \uac83 2\uac1c\uac00 \ud6e8\uc52c \uc720\uc6a9\ud558\ub2e4.<\/p>\n","protected":false},"author":24,"featured_media":14195,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[86],"tags":[909,260,509,910],"class_list":["post-14197","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-tech","tag-909","tag-260","tag-509","tag-910","series-frond-end-process"],"acf":[],"_links":{"self":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts\/14197","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/users\/24"}],"replies":[{"embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/comments?post=14197"}],"version-history":[{"count":18,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts\/14197\/revisions"}],"predecessor-version":[{"id":44619,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts\/14197\/revisions\/44619"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/media\/14195"}],"wp:attachment":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/media?parent=14197"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/categories?post=14197"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/tags?post=14197"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}