{"id":20550,"date":"2018-08-22T05:00:00","date_gmt":"2018-08-21T20:00:00","guid":{"rendered":"http:\/\/localhost:8080\/pvd-in-which-electrons-move\/"},"modified":"2024-12-20T11:04:41","modified_gmt":"2024-12-20T02:04:41","slug":"pvd-in-which-electrons-move","status":"publish","type":"post","link":"https:\/\/news.skhynix.co.kr\/pvd-in-which-electrons-move\/","title":{"rendered":"[\ubc18\ub3c4\uccb4 \ud2b9\uac15] PVD, \uc804\uc790\uac00 \uc774\ub3d9\ud558\ub294 \ub3c4\ub85c\ub97c \ub9cc\ub4e4\ub2e4"},"content":{"rendered":"

\"aImzSGrIzcMGtlUDZefq4K\/img.png\"<\/p>\n

\uc9c0\ub09c \uac15\uc758\ub97c \ud1b5\ud574 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 3\uac1c \ub2e8\uc790\uc778 \uc18c\uc2a4\/\ub4dc\ub808\uc778\/\uac8c\uc774\ud2b8\ub97c \uc644\uc131\ud588\uc2b5\ub2c8\ub2e4. \uc774\uc81c\ub294 3\uac1c \ub2e8\uc790\uc5d0 \uc804\uc555\uc744 \uac00\ud558\uac70\ub098 \uc804\ub958\ub97c \ube7c\ub0b4\uc5b4 \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub97c \ub3d9\uc791\uc2dc\ud0ac \uc218 \uc788\ub3c4\ub85d \ub2e8\uc790\ub4e4\uc744 \uce69 \ud68c\ub85c \ubc16\uc73c\ub85c \uc5f0\uacb0\ud558\ub294 \uae08\uc18d\ubc30\uc120\uc744 \ub9cc\ub4e4 \ucc28\ub840\uc785\ub2c8\ub2e4. \uae08\uc18d\ubc30\uc120 \uc6d0\ub8cc\ub85c \uacfc\uac70\uc5d0\ub294 40\ub144 \uc774\uc0c1 \uc54c\ub8e8\ubbf8\ub284\uc774 \uc560\uc6a9\ub418\uc5c8\uc73c\ub098, 10\ub144 \uc804\ubd80\ud130 \ucd5c\uadfc\uae4c\uc9c0\ub294 \uad6c\ub9ac\ub97c \uc774\uc6a9\ud558\ub294 \ucd94\uc138\uc774\uc9c0\uc694. \uc624\ub298\uc740 \uace0\uc804\uc801\uc778 \uc6d0\ub8cc\uc778 \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc18c\ub85c \ubc30\uc120\ud558\ub294 \ubc29\uc2dd\uc744 \uc54c\uc544\ubcfc \ud150\ub370\uc694. \ubc14\ub85c \uae08\uc18d\uc99d\uae30(Vapor)\ub97c \uc774\uc6a9\ud574 \ubb3c\ub9ac\uc801\uc778 \ubc29\uc2dd\uc73c\ub85c \uc587\uc740 \ub9c9\uc744 \uc785\ud788\ub294 PVD(Physical Vapor Deposition)\uc785\ub2c8\ub2e4.<\/p>\n

\ub9c9 \ud615\uc131 \ubc29\ubc95<\/h3>\n

\"1<\/p>\n

\u25b2 \ubc15\ub9c9\uc744 \ud615\uc131\ud558\ub294 \ubc29\uc2dd<\/p>\n

\ubc18\ub3c4\uccb4\uc5d0 \ub9c9\uc744 \ud615\uc131\ud558\ub294 \ubc29\ubc95\uc740 5\uac00\uc9c0 \uc815\ub3c4\uac00 \uc788\uc9c0\ub9cc, \ud06c\uac8c\ub294 3\uac00\uc9c0\ub97c \uc8fc\ub85c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uadf8\uc911 \ubb3c\ub9ac\uc801\uc73c\ub85c \uc99d\uae30(Vapor)\ub97c \uc774\uc6a9\ud574 \uc99d\ucc29\ud558\ub294 \ubc29\ubc95(PVD)\uacfc \ud654\ud559\uc801\uc73c\ub85c \uc99d\uae30\ub97c \uc774\uc6a9\ud574 \uc99d\ucc29\ud558\ub294 \ubc29\ubc95(CVD)\uc744 \ub9ce\uc774 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774\ud6c4\uc5d0\ub294 \uc6d0\uc790\uce35\uc744 \ud55c \uacb9 \ud55c \uacb9 \uc313\uc544 \uc62c\ub9ac\ub294 \uc6d0\uc790\uce35\ud654\ud559\uc99d\ucc29(ALD) \ubc29\uc2dd\uc744 \uc8fc\ub85c \uc0ac\uc6a9\ud558\ub294 \ucd94\uc138\uc785\ub2c8\ub2e4.<\/p>\n

\uadf8 \uc678\uc5d0\ub294 \ud654\ud559\uc6a9\uc561\uc744 \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \ubd84\uc0ac\uc2dc\ud0a4\uace0 \uc6e8\uc774\ud37c\ub97c \ud68c\uc804\uc2dc\ucf1c \ub9c9\uc744 \ud615\uc131\ud558\ub294 SOG(Spin on Glass) \ubc29\uc2dd\uc774 \uc788\uace0, \uace0\uc804\uc801\uc778 \uc804\ud574\ub3c4\uae08\ubc29\uc2dd(EP:Electrical Plating)\uc744 \uc751\uc6a9\ud574 \uad6c\ub9ac \uc6a9\uc561\uc744 \uc804\uae30\ubd84\ud574\ub97c \uc77c\uc73c\ucf1c \uc804\ucc29\ud558\ub294 \ubc29\uc2dd\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ud2b9\ud788 \ub2e4\ub9c8\uc2e0 \uacf5\uc815\uc740 \uc720\uc804\uccb4 \ubb3c\uc9c8 \uc0ac\uc774\uc5d0 \uacf5\uadf9\uc744 \ub6ab\uc5b4 \ub193\uace0, \uadf8 \uc18d\uc5d0 \uc2dc\ub4dc(Seed) \uce35\uc744 \ud615\uc131\ud55c \ub2e4\uc74c \uad6c\ub9ac\ub97c \ub3c4\uae08\ud558\ub294 \ubc29\uc2dd\uc778\ub370\uc694. \uc774\ub294 \uc804\ud574\ub3c4\uae08\ubc29\uc2dd\uc744 \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0 \ub9de\ub3c4\ub85d \uac1c\ub7c9\ud55c \ubc29\uc2dd\uc785\ub2c8\ub2e4. \uc774\ub294 \uc54c\ub8e8\ubbf8\ub284 \uc7ac\uc9c8\uc758 \ub2e8\uc810\uc744 \ubcf4\uc644\ud558\uace0, \uc120\ud3ed\uc758 \ubbf8\uc138\ud654\uc5d0 \ub300\uc751\ud558\uae30 \uc704\ud574 \ub3c4\uc785\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n

\ubc15\ub9c9 \ud615\uc131 \ud6c4 Fab\uae30\ubcf8\uacf5\uc815\uc744 \ud1b5\ud574 \uae08\uc18d\ubc30\uc120 \ub9cc\ub4e4\uae30<\/h3>\n

\"2<\/p>\n

\u25b2 \ubc15\ub9c9 \ud6c4\uc758 \uae08\uc18d\ubc30\uc120 \uc644\uc131\uc2dd<\/p>\n

\ubc18\ub3c4\uccb4 \uce69 \ud558\ub098\uac00 \ub3c4\uc2dc\ub77c\uba74 \uae08\uc18d\ubc30\uc120\uc740 \uc77c\uc885\uc758 \ub3c4\ub85c\uac00 \ub429\ub2c8\ub2e4. \uce69 \uc704\uc5d0 \ub3c4\uc120\uc744 \ubc30\uce58\ud558\ub294\ub370 \ub3c4\ub85c\ucc98\ub7fc \ub2ec\ub791 \ubc30\uc120\ub9cc\uc744 \uadf8\uc744 \uc218\ub294 \uc5c6\uaca0\uc9c0\uc694. \uadf8\ub7ec\ubbc0\ub85c \ubc18\ub3c4\uccb4\uc5d0\uc11c\ub294 \uc804\uccb4 \ud45c\uba74\uc5d0 \uc587\uc740 \ubc15\ub9c9\uc744 \ud615\uc131\uc2dc\ud0a8 \ud6c4 \ud3ec\ud1a0>\uc2dd\uac01>\uc138\uc815\uc774\ub77c\ub294 \uae30\ubcf8\uacf5\uc815\uc744 \uc9c4\ud589\ud574 \uc587\uc740 \ub9c9 \uc798\ub77c\ub0b4\uae30\ub97c \ud569\ub2c8\ub2e4. \uadf8\ub7ec\uba74 \ub098\uba38\uc9c0\uac00 \uc774\ub9ac\uc800\ub9ac \uc5bd\ud788\uace0\uc124\ud0a8 \ubc30\uc120\uc774 \ub429\ub2c8\ub2e4. \ubc15\ub9c9\uc740 \ud06c\uac8c, \uc587\uc740 \uc808\uc5f0\uccb4\ub9c9\uacfc \uae08\uc18d\ub9c9, \ub450 \uc885\ub958\ub85c \uad6c\ubd84\ud560 \uc218 \uc788\ub294\ub370\uc694. \uc774 \ub458\uc740 \ub9c9\uc744 \ud615\uc131\ud558\ub294 \ubc29\uc2dd\uc774 \uc870\uae08\uc529 \ub2e4\ub985\ub2c8\ub2e4. \uc808\uc5f0\uccb4\ub9c9\uc740 CVD\ub098 \ud639\uc740 ALD(\ud5a5\ud6c4)\ub77c\ub294 \ud654\ud559\uc801 \ubc29\uc2dd\uc744 \uc8fc\ub85c \uc0ac\uc6a9\ud558\uace0, \uae08\uc18d\ub9c9\uc740 PVD\ub77c\ub294 \ubb3c\ub9ac\uc801 \ubc29\uc2dd\uc73c\ub85c \ub300\ubd80\ubd84 \uc0ac\uc6a9\ud558\uc9c0\uc694.<\/p>\n

PVD\uc640 CVD\uc758 \uc7a5\ub2e8\uc810<\/h3>\n

\"3<\/p>\n

\u25b2 \ubb3c\ub9ac\uc801 \ubc29\uc2dd PVD vs \ud654\ud559\uc801 \ubc29\uc2dd CVD\uc758 \uc7a5\ub2e8\uc810<\/p>\n

\ud654\ud559\uc801 \ubc29\uc2dd\uc778 CVD\ub294 \uc12d\uc528 \uba87 \ubc31\ub3c4\ub97c \ud544\uc694\ub85c \ud558\uc9c0\ub9cc, \ubb3c\ub9ac\uc801 \ubc29\uc2dd\uc778 PVD\ub294 CVD\uc5d0 \ube44\ud574 \uc800\uc628\uc5d0\uc11c \uacf5\uc815\uc744 \uc9c4\ud589\ud55c\ub2e4\ub294 \uc774\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\uc11c CVD\uc640 PVD\ub294 \ub2e4\ub974\uba74\uc11c\ub3c4 \uac19\uc740 \uc810\uc774 \uc788\ub294 \uc0ac\ucd0c \uad00\uacc4\ub77c\uace0 \ubcfc \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ucc54\ubc84 \ubd84\uc704\uae30\uc640 \uc9c4\ud589\ubc29\uc2dd\uc740 \ub2e4\ub974\uc9c0\ub9cc, CVD\uc640 PVD \ubaa8\ub450 Vapor\ub97c \uc774\uc6a9\ud558\uc5ec \ub9c9\uc744 \ud615\uc131\ud558\ub294 \uacf5\ud1b5\uc810\uc774 \uc788\uc9c0\uc694.<\/p>\n

PVD\ub294 \uc9c4\uacf5 \ud558\uc5d0\uc11c \uacf5\uc815\uc744 \uc9c4\ud589\ud558\uace0, \ub2e4\ub978 \ud654\ud559\ubb3c\uc9c8\uacfc \uc11e\uc774\uc9c0 \uc54a\uae30 \ub54c\ubb38\uc5d0 \ubd88\uc21c\ubb3c\ub85c \uc778\ud55c \uc624\uc5fc\uc774 CVD\uc5d0 \ube44\ud574 \uc0c1\ub300\uc801\uc73c\ub85c \ub0ae\uc2b5\ub2c8\ub2e4. \uadf8\ub7f0\ub370 PVD\ub85c \ub9cc\ub4e0 \uce35\uc740 \ubb3c\ub9ac\uc801\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub284\uacfc \uac19\uc740 \uae08\uc18d \uce35\uc774 \ub2e4\ub978 \uc808\uc5f0\uce35 \uc704\uc5d0 \ub0b4\ub824\uc549\uc544 \ud615\uc131\ub418\uae30 \ub54c\ubb38\uc5d0 \ud654\ud559\uc801\uc778 CVD\ubcf4\ub2e4\ub294 \uc811\ud569 \uc0c1\ud0dc\uac00 \uc88b\uc9c0 \ubabb\ud558\uc9c0\uc694. \ub530\ub77c\uc11c \uc5ec\ub7ec \uac00\uc9c0 \ubc29\ubc95\uc744 \ub3d9\uc6d0\ud574 \uc811\ud569\uc131\uc744 \ub192\uc774\ub294 \uac1c\uc120\uc744 \ud569\ub2c8\ub2e4. \ubc18\uba74, PVD\ub294 CVD\ubcf4\ub2e4 \uc548\uc804\ud558\uc9c0\ub9cc \uc2a4\ud37c\ud130 \ub4f1\uc744 \uc0ac\uc6a9\ud558\uae30 \ub54c\ubb38\uc5d0 \uc7a5\ube44\uac00 \ube44\uad50\uc801 \uace0\uac00\uc785\ub2c8\ub2e4. \ub610\ud55c CVD\uc5d0 \ube44\ud574 \ud22c\uc2b5\uc131 \ub4f1 \ubcf4\ud638\ub9c9\uc73c\ub85c\uc368 \uc131\ub2a5\uc774 \ub5a8\uc5b4\uc9c0\uae30 \ub54c\ubb38\uc5d0 \uc808\uc5f0\uae30\ub2a5\uc744 \ud558\ub294 \uacf3\uc5d0\ub294 \uc0ac\uc6a9\ud558\uc9c0 \ubabb\ud558\uace0 \uae08\uc18d\ubc30\uc120 \ub4f1\uc5d0 \uad6d\ud55c\uc801\uc73c\ub85c \uc0ac\uc6a9\ub41c\ub2f5\ub2c8\ub2e4.<\/p>\n

\uc2a4\ud37c\ud130\ub9c1\uc774\ub780?<\/h3>\n

\"4<\/p>\n

\u25b2 \uc2a4\ud37c\ud130\ub9c1 \uac1c\ub150<\/p>\n

\ud654\ud559\uc801 \ubc29\uc2dd\uc778 CVD\ub294 \uc12d\uc528 \uba87 \ubc31\ub3c4\ub97c \ud544\uc694<\/p>\n

\uc2a4\ud37c\ud130\ub9c1\uc774\ub780 \uac74\uc2dd\ubc29\uc2dd\uc744 \uc0ac\uc6a9\ud574 \uc587\uc740 \ubc15\ub9c9\uc744 \ucf54\ud305\ud558\ub294 \uacf5\uc815\uc744 \ub9d0\ud569\ub2c8\ub2e4. \ub192\uc740 \uc5d0\ub108\uc9c0\ub97c \uac16\ub294 \uc774\uc628\uc744 \ub9cc\ub4e4\uc5b4\uc11c \uc774 \uc774\uc628\ub4e4\uc744 \uc54c\ub8e8\ubbf8\ub284\ud310(Target)\uc5d0 \ucda9\ub3cc\uc2dc\ud0a4\uba74 \uc54c\ub8e8\ubbf8\ub284\ud310\uc744 \uc774\ub8e8\ub294 \ub2e4\uc218\uc758 \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub4e4\uc774 \ub5a8\uc5b4\uc838 \ub098\uc624\uac8c \ud558\ub294 \ud604\uc0c1\uc744 \uc774\uc6a9\ud55c \uac83\uc774\uc9c0\uc694. \uc774\ub807\uac8c \ub5a8\uc5b4\uc838 \ub098\uc624\ub294 \ub9ce\uc740 \uc218\uc758 \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub4e4\uc774 \uc6e8\uc774\ud37c \uae30\ud310(\uc18c\uc2a4\/\ub4dc\ub808\uc778\/\uac8c\uc774\ud2b8) \uc704\uc5d0 \ub208\ucc98\ub7fc \uc313\uc774\ub3c4\ub85d \ud558\uba74 \uc587\uc740 \uc54c\ub8e8\ubbf8\ub284\ub9c9\uc774 \ud615\uc131\ub418\ub294\ub370\uc694. \uc587\uc740 \ubc15\ub9c9\uc744 \ud615\uc131\ud558\ub294 \uc7a5\ube44\ub97c \uc2a4\ud37c\ud130(Sputter)\ub77c\uace0 \ubd80\ub985\ub2c8\ub2e4. \uc54c\ub8e8\ubbf8\ub284 \uc678\uc5d0\ub3c4 \uc5ec\ub7ec \uac00\uc9c0 \uae08\uc18d \ubc15\ub9c9\uc744 \ud0c0\uae43\uc73c\ub85c \uc0ac\uc6a9 \uac00\ub2a5\ud569\ub2c8\ub2e4. \uadf8\ub9ac\uace0 \ud0c0\uae43\uc73c\ub85c \uc0ac\uc6a9\ub41c \uae08\uc18d\ud310\uc758 \uc6d0\uc18c\uac00 \ub9c9\uc744 \ud615\uc131\ud569\ub2c8\ub2e4. \uc989, \ud0c0\uae43\uc758 \uc6d0\uc18c\uac00 \ud654\ud559\uc801 \ubcc0\ud654 \uc5c6\uc774 \uae08\uc18d\ud310\uc5d0\uc11c \ubb3c\ub9ac\uc801\uc73c\ub85c \uc704\uce58\ub9cc \ubc14\uafb8\uc5b4 \uc6e8\uc774\ud37c \uc704\uc5d0 \uae08\uc18d\ub9c9\uc744 \ud615\uc131\ud558\ub294 \uac83\uc774\uc9c0\uc694.<\/p>\n

\uc2a4\ud37c\ud130\ub9c1\uc758 \uad6c\uc870\uc640 \uc6d0\ub9ac<\/h3>\n

\"5<\/p>\n

\u25b2 \uc2a4\ud37c\ud130\ub9c1\uc758 \uad6c\uc870\uc640 \uc6d0\ub9ac<\/p>\n

\uba3c\uc800 \uc6e8\uc774\ud37c\uac00 \ub4e4\uc5b4\uac08 \uacf5\uac04(\ucc54\ubc84)\uc744 \ub9c8\ub828\ud558\uace0, \uc2a4\ud37c\ud130 \ucc54\ubc84 \uc548\uc744 \ub300\uae30\uc555\uc758 100\ubd84\uc758 1 \uc815\ub3c4\ub85c \ud558\uc5ec \uacf5\uae30\ub97c \ube7c\ub0c5\ub2c8\ub2e4. \uc774\ub54c \uace0\uc9c4\uacf5\uc77c\uc218\ub85d \ud50c\ub77c\uc988\ub9c8\uac00 \uc798 \ud615\uc131\ub418\ubbc0\ub85c \uac15\ub825\ud55c \ud130\ubcf4 \uc9c4\uacf5\ud38c\ud504\ub97c \uc0ac\uc6a9\ud558\uc5ec\uc57c \ud558\uaca0\uc9c0\uc694. \uc54c\ub8e8\ubbf8\ub284 \uae08\uc18d\ud310\uc744 \uacf5\uaca9\ud560 \uc774\uc628\uc744 \ub9c8\ub828\ud558\uae30 \uc704\ud574 \uc9c4\uacf5 \uc18d\uc5d0 \uc544\ub974\uace4 \uac00\uc2a4\ub97c \uc9d1\uc5b4\ub123\uc2b5\ub2c8\ub2e4. \uadf8\ub9ac\uace0 \uc544\ub974\uace4 \uac00\uc2a4\uac00 \uc874\uc7ac\ud558\ub294 \ucc54\ubc84\uc5d0 \uc57d 5,000V \uc815\ub3c4\uc758 \ub192\uc740 DC \uc804\uc555\uc744 \uac78\uc5b4\uc8fc\uba74 \uc544\ub974\uace4 \uac00\uc2a4\uac00 \uc804\uc790\uc640 \uc591\uc774\uc628\uc774 \uac19\uc774 \uc874\uc7ac\ud558\ub294 \ud50c\ub77c\uc2a4\ub9c8 \uc0c1\ud0dc\ub85c \ub429\ub2c8\ub2e4. \ub192\uc740 \uc5d0\ub108\uc9c0\ub97c \uac74\ub124\ubc1b\uc740 \uc911\uc131\uc778 \uc544\ub974\uace4 \uc6d0\uc790\uc5d0\uc11c \uc6d0\uc790\ud575\uc758 \uad6c\uc2ec\ub825\uc744 \uc774\uaca8\ub0b8 \ucd5c\uc678\uac01\uc804\uc790\uac00 \ud0c8\ucd9c\ud558\uba74\uc11c \uc544\ub974\uace4 \uc6d0\uc790\ub294 \uc591\uc774\uc628\uc73c\ub85c \ubcc0\ud558\uac8c \ub418\ub294\ub370, \uc774 \uc591\uc774\uc628\uc744 \uc774\uc6a9\ud574 \uae08\uc18d\ud310\uc5d0 \ucda9\ub3cc \uc2dc\ud0b5\ub2c8\ub2e4. \uc774\ub54c \uae08\uc18d\ud310\uc774 \ucda9\ub3cc\ud558\ub294 \uc6b4\ub3d9\uc5d0\ub108\uc9c0\ub85c \uc778\ud574 \uc54c\ub8e8\ubbf8\ub284 \uaca9\uc790 \ub0b4 \uacb0\ud569\uc5d0\ub108\uc9c0\ubcf4\ub2e4 \ub354 \ud070 \uc5d0\ub108\uc9c0\uac00 \uc54c\ub8e8\ubbf8\ub284 \uc785\uc790\uc5d0 \uc804\ub2ec\ub418\uba74 \uc5ec\ub7ec \uac1c\uc758 \uc54c\ub8e8\ubbf8\ub284 \uc785\uc790\uac00 \uae08\uc18d\ud310\uc5d0\uc11c \ub5a8\uc5b4\uc838 \ub098\uac11\ub2c8\ub2e4. \uc774\ub54c \ub5a8\uc5b4\uc838 \ub098\uac04 \uae08\uc18d \uc785\uc790\ub97c \uc774\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c \uc704\uc5d0 \uc587\uc740 \ub9c9\uc744 \uc785\ud788\uc9c0\uc694.<\/p>\n

\uc2a4\ud37c\ud130\ub9c1 \uc885\ub958<\/h3>\n

\"\"<\/p>\n

\u25b2 \uc2a4\ud37c\ud130\ub9c1 \uc885\ub958<\/p>\n

\uc2a4\ud37c\ud130\ub9c1\uc740 \ucd08\ucc3d\uae30\uc5d0\ub294 DC \uc804\uc555\uc744 \ud0c0\uac9f\uc5d0 \uac78\uc5b4\uc11c \ud50c\ub77c\uc2a4\ub9c8\uc5d0\uc11c \uc5bb\uc740 \uc591\uc774\uc628\uc774 \ud0c0\uae43\uc5d0 \ucda9\ub3cc\ud558\ub3c4\ub85d \ud558\uc5ec \uae08\uc18d\uc6d0\uc790\ub97c \uc5bb\uc5c8\uc2b5\ub2c8\ub2e4.(DC\uc2a4\ud30c\ud130\ub9c1) \uadf8\ub7ec\ub098 DC \uc804\uc555\uc744 \uc774\uc6a9\ud560 \uacbd\uc6b0 \uc591\uc774\uc628\uc774 \ud0c0\uae43\uc5d0 \ud761\ucc29\ub418\ub294 \ubb38\uc81c\uac00 \ubc1c\uc0dd\ub418\uc5c8\uc9c0\uc694. \uadf8\ub798\uc11c \ub77c\ub514\uc624\ud30c \uc815\ub3c4\uc758 \uc8fc\ud30c\uc218\ub85c \ud0c0\uac9f\uc758 \uc804\uadf9\uc744 \ubc14\uafb8\uc5b4 \uc778\uac00\ud558\ub294 RF\uc2a4\ud30c\ud130\ub9c1 \ubc29\uc2dd\uc744 \uc801\uc6a9\ud588\uc2b5\ub2c8\ub2e4. \uc544\ub974\uace4 \uc591\uc774\uc628\uc744 \uc911\ud654\uc2dc\ud0ac \uc218 \uc788\uc5c8\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \uadf8\ub7ec\ub2e4\uac00 \uc790\uc11d\uc744 \ud0c0\uae43 \uc8fc\uc704\uc5d0\uc11c \ud68c\uc804\uc2dc\ucf1c \ud68c\uc804\uc790\uacc4\ub97c \uc774\uc6a9\ud558\uba74 \uc804\uc790\uc640 \uc591\uc774\uc628\uc744 \ud0c0\uae43 \uc8fc\uc704\ub85c \ubaa8\uc774\uac8c \ud558\uc5ec \uc544\ub974\uace4\uc758 \uc591\uc774\uc628\uc744 \uba87\uc2ed \ubc30 \uc99d\uac00\uc2dc\ud0a4\ub294 Magnetron\uc2a4\ud30c\ud130\ub9c1 \ubc29\uc2dd\uc774 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ud604\uc7ac\ub294 \ub300\ubd80\ubd84 \uc790\uc11d\uc2a4\ud30c\ud130\ub9c1 \ubc29\uc2dd\uc744 \uc801\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc870\uae08 \ub354 \ubcf5\uc7a1\ud55c \ubc29\uc2dd\uc73c\ub85c\ub294 \ub9ac\uc5d1\ud2f0\ube0c \uc2a4\ud37c\ud130\ub9c1 \ubc29\uc2dd\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc99d\ubc1c(Evaporation)<\/h3>\n

\ubb3c\ub9ac\uc801\uc778 \uc99d\ucc29 \ubc29\ubc95\uc73c\ub85c\ub294 \uc2a4\ud37c\ud130\ub9c1 \uc774\uc678\uc5d0 \uc99d\ubc1c\uc744 \uc774\uc6a9\ud55c \ubc29\uc2dd\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc99d\ubc1c\uc740 \uc9c4\uacf5\uc0c1\ud0dc\uc758 \ucc54\ubc84\uc5d0\uc11c \ub2e8\uc21c\ud788 \uae08\uc18d\ud310\uc744 \uac00\uc5f4\ud558\uba74 \ub192\uc740 \uc5f4\uc5d0\ub108\uc9c0\ub97c \uc5bb\uc740 \uae08\uc18d \uc6d0\uc790\uac00 \uaca9\uc790\ub4e4\uc744 \uacb0\uc18d\ud558\ub294 \uc5d0\ub108\uc9c0 \ubcf4\ub2e4 \ub192\uc544\uc84c\uc744 \ub54c, \uae08\uc18d \uc6d0\uc790\uac00 \uae08\uc18d\ud310\uc744 \ud0c8\ucd9c\ud558\uac8c \ud558\uc5ec \uc6e8\uc774\ud37c\uc5d0 \uc99d\ucc29\uc2dc\ud0a4\ub294 \ubc29\uc2dd\uc785\ub2c8\ub2e4. \uac00\uc7a5 \ub2e8\uc21c\ud55c \ubc29\uc2dd\uc73c\ub85c\uc368 \ub2e8\uc77c \uc6d0\uc18c\uc758 \ubb3c\uc9c8\uc744 \uc99d\ucc29\ud560 \ub54c \uc0ac\uc6a9\ud558\uc9c0\ub9cc, \ud6a8\uc728\uc774 \ub192\uc9c0 \uc54a\uc544\uc11c \ub9ce\uc774 \uc0ac\uc6a9\ub418\uc9c0\ub294 \uc54a\uc2b5\ub2c8\ub2e4. \uadf8 \uc678\uc5d0 \uc804\uc790\ube54\uc744 \uc774\uc6a9\ud558\uc5ec \uae08\uc18d\ud310\uc744 \uac00\uc5f4\ud558\uc5ec \uc5f4\uc5d0\ub108\uc9c0\ub97c \uc5bb\ub294 \uacbd\uc6b0\ub97c \uc804\uc790\ube54 \uc99d\ubc1c\ubc95(E-beam Evaporation)\uc774\ub77c\uace0 \uc774\ub984\uc744 \ubd99\uc5ec\uc11c \uc0ac\uc6a9\ud558\uae30\ub3c4 \ud569\ub2c8\ub2e4.<\/p>\n

\uc54c\ub8e8\ubbf8\ub284\uc758 \ubb38\uc81c\uc810<\/h3>\n

\uc54c\ub8e8\ubbf8\ub284 \ud2b9\uc131\uc740 \uad6c\ub9ac\uc5d0 \ube44\ud574 \ube44\uc800\ud56d\uc774 \ub192\uc544\uc11c(\ubc18\ub3c4\uccb4\uc5d0\uc11c\ub294 \ubb3c\uc9c8\uc758 \uace0\uc720\uc800\ud56d \ud2b9\uc131\uc73c\ub85c\ub294 \uc8fc\ub85c \ube44\uc800\ud56d\uc73c\ub85c \uc774\uc57c\uae30\ud569\ub2c8\ub2e4) \uc804\uc790\uc758 \uc774\ub3d9\uc18d\ub3c4\uac00 \uad6c\ub9ac \ub300\ube44 \ub290\ub9ac\uba70, \ube44\uad50\uc801 \ub192\uc9c0 \uc54a\uc740 \uc628\ub3c4\uc5d0\uc11c \ub179\uc544\ubc84\ub9ac\ub294 \ucde8\uc57d\uc131\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uacf5\uc815\uc740 \ucd5c\ub300\ub85c \uc12d\uc528 1,000\ub3c4 \ud639\uc740 1,200\ub3c4\uae4c\uc9c0\ub3c4 \uc62c\ub824\uc11c \ud615\ud0dc\ub97c \ubc14\uafb8\ub294 \uacf5\uc815\ub4e4\uc774 \uc788\ub294\ub370, \uc54c\ub8e8\ubbf8\ub284\uc740 \ucd5c\ub300\uc628\ub3c4\uc758 \uc808\ubc18 \uc815\ub3c4\uc5d0\uc11c \ub179\uc544\ubc84\ub9bd\ub2c8\ub2e4. \uadf8\ub7ec\ubbc0\ub85c \uc54c\ub8e8\ubbf8\ub284\uc73c\ub85c \uae08\uc18d \ubc30\uc120\uc744 \ud55c \ud6c4\uc5d0\ub294 \uc12d\uc528 600\ub3c4 \uc774\uc0c1 \uc62c\ub824 \ub2e4\uc74c \uacf5\uc815\uc744 \uc9c4\ud589\ud558\ub294 \uac83\uc740 \ubb34\ub9ac\uac00 \ub418\uaca0\uc9c0\uc694. \uc774\ub294 \uacf5\uc815 \uc9c4\ud589\uc5d0 \ub300\ud55c \uc81c\ud55c\uc774 \ubc1c\uc0dd\ub418\uc5c8\ub2e4\ub294 \ub73b\uc785\ub2c8\ub2e4.<\/p>\n

\ub610\ud55c \ubc18\ub3c4\uccb4 \uacf5\uc815\uc744 \ubaa8\ub450 \uc9c4\ud589\ud558\uc5ec \ud2b8\ub79c\uc9c0\uc2a4\ud130\ub97c \uc644\uc131\ud55c \ud6c4 \ub0b4\ubd80 \uc628\ub3c4\uac00 \ub192\uc544\uc9c0\uba74, \ub3c4\ub85c\uc758 \uc544\uc2a4\ud314\ud2b8\uac00 \uc5ec\ub984\uc5d0 \uc19f\uc544\uc624\ub974\ub4ef \uc54c\ub8e8\ubbf8\ub284\uc73c\ub85c \uae08\uc18d\ubc30\uc120\uc744 \ud55c \ubd80\ubd84\uc774 \uc19f\uc544\uc624\ub974\uac8c \ub429\ub2c8\ub2e4. (Hill Lock) \ub610, \uc19f\uc544\uc624\ub974\ub294 \uacf3\uc774 \uc788\uc73c\uba74 \ud479 \uaebc\uc9c0\ub294 \ubd80\ubd84(Void)\uc774 \ubc1c\uc0dd\ud558\uae30\ub3c4 \ud558\uc9c0\uc694.<\/p>\n

\uadf8\ub9ac\uace0 \ub0b4\ubd80 \uae08\uc18d\ubc30\uc120\uc5d0\uc11c \uc804\uc790\uac00 \uc624\ub7ab\ub3d9\uc548 \uc774\ub3d9\ud558\ub2e4 \ubcf4\uba74 \uc774\ub3d9\ud558\ub294 \uc804\uc790\uac00 \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ud575\uacfc \uc9c0\uc18d\uc801\uc73c\ub85c \ucda9\ub3cc\ud558\uac8c \ub418\uc5b4 \uc77c\ubd80 \uc54c\ub8e8\ubbf8\ub284\uc774 \uc81c\uac70\ub418\ub294 \ubd80\uc704\uac00 \uc0dd\uae30\uace0, \uc774\ub7f0 \ud604\uc0c1\uc774 \uc9c0\uc18d\ub418\uba74 \uacb0\uad6d \ubc30\uc120\uc774 \ub04a\uc5b4\uc9c0\uac8c \ub418\ub294 \ubd88\uc0c1\uc0ac\uac00 \ubc1c\uc0dd\ud569\ub2c8\ub2e4(Electro-migration). \uc774\ub97c \uac1c\uc120\ud558\uae30 \uc704\ud574 \uc54c\ub8e8\ubbf8\ub284\uc5d0 \uad6c\ub9ac \ub4f1 \ub2e4\ub978 \uae08\uc18d\uc744 \uc11e\uae30\ub3c4 \ud558\uace0, \uac15\ud55c \uad6c\uc870\ub85c \ud615\uc131\ud558\uae30\ub3c4 \ud558\uba70, \uc54c\ub8e8\ubbf8\ub284 \uc704\uc5d0 \ub2e4\ub978 \uce35\uc744 \ucd94\uac00\ub85c \ud615\uc131\uc2dc\ud0a4\uae30\ub3c4 \ud569\ub2c8\ub2e4. \uadf8\ub798\uc11c \uc54c\ub8e8\ubbf8\ub284 \ub300\uc2e0 \uad6c\ub9ac\ub85c \ubc30\uc120\ubb3c\uc9c8\uc744 \ub300\uc2e0\ud558\ub294 \ub2e4\ub9c8\uc2e0 \ubc29\uc2dd\uc73c\ub85c \ubc1c\uc804\ud558\uac8c \ub41c \uac83\uc774\uc9c0\uc694.<\/p>\n

\n\u00a0<\/p>\n

\ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0\uc11c\ub294 \ud655\uc815\ub41c \ubc29\uc2dd\uc774\ub780 \uac83\uc740 \uc5c6\uc2b5\ub2c8\ub2e4. \uc7ac\uc9c8+\ubc29\ubc95+\uc7a5\ube44\uc758 \uc870\ud569\uc744 \uc774\ud569\uc9d1\uc0b0\uc2dc\ucf1c \ub04a\uc784\uc5c6\uc774 \uac1c\uc120\ud574\ub098\uac00\uc57c \ud558\uc9c0\uc694. \uae08\uc18d\ubc30\uc120\uc744 \ud558\ub294\ub370 PVD\ubcf4\ub2e4 \ub354 \ub098\uc740 \ubc29\uc2dd\uc740 \uc5c6\uc744\uae4c\uc694? \ub610 \ub2e4\ub978 \ubc29\uc2dd\uc73c\ub85c\ub294 \ud654\ud559\uc801\uc73c\ub85c Vapor\ub97c \uc99d\ucc29\uc2dc\ud0a4\ub294 CVD\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \ud654\ud559\uc801\uc778 \ubc29\uc2dd\uc778 \ub9cc\ud07c \uacf5\uc815 \uc9c4\ud589\uc0c1\uc758 \uc704\ud5d8\uc131\uc774 \uc788\uace0, \ubd88\ud544\uc694\ud55c \uac00\uc2a4\/\ubd80\uc0b0\ubb3c\uc744 \ubc1c\uc0dd\uc2dc\ucf1c \uae08\uc18d\ubc30\uc120\uc5d0 \uacb0\ud568\uc744 \ubc1c\uc0dd\uc2dc\ud0a8\ub2e4\ub294 \ubb38\uc81c\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c CVD \ubc29\uc2dd\uc73c\ub85c \uae08\uc18d\ubc30\uc120\uc744 \uc801\uc6a9\ud558\uc9c0\ub294 \uc54a\uc2b5\ub2c8\ub2e4. \uadf8\ub798\uc11c \ucc3e\uc544\ub0b8 \uac83\uc774 ALD\ub77c\ub294 \uc6d0\uc790\uce35 \uc99d\ucc29\uae30\uc220\uc785\ub2c8\ub2e4. ALD\ub294 \ub450\uaed8 \uc870\uc808\ubd80\ud130 \ud53c\ubcf5\uc131\ub4f1 PVD\uac00 \uac00\uc9c4 \ub2e8\uc810\ub4e4\uc744 \ubcf4\uc644\ud574 \uc120\ud3ed\uc758 \ubbf8\uc138\ud654\uc5d0 \ub300\uc751\ud560 \uc218 \uc788\uac8c \ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud5a5\ud6c4\uc5d0\ub294 ALD\ub97c \ubc1c\uc804\uc2dc\ud0a8 \uc5ec\ub7ec \uac00\uc9c0 \ubc29\uc2dd\uc774 \ub4f1\uc7a5\ud560 \uac83\uc73c\ub85c \ubcf4\uc785\ub2c8\ub2e4.<\/p>\n

\u00a0<\/p>\n<\/div>\n

\u203b\u00a0\ubcf8 \uce7c\ub7fc\uc740 \ubc18\ub3c4\uccb4\/ICT\uc5d0 \uad00\ud55c \uc778\uc0ac\uc774\ud2b8\ub97c \uc81c\uacf5\ud558\ub294 \uc678\ubd80 \uc804\ubb38\uac00 \uce7c\ub7fc\uc73c\ub85c, SK\ud558\uc774\ub2c9\uc2a4\uc758 \uacf5\uc2dd \uc785\uc7a5\uacfc\ub294 \ub2e4\ub97c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"

\uc9c0\ub09c \uac15\uc758\ub97c \ud1b5\ud574 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 3\uac1c \ub2e8\uc790\uc778 \uc18c\uc2a4\/\ub4dc\ub808\uc778\/\uac8c\uc774\ud2b8\ub97c \uc644\uc131\ud588\uc2b5\ub2c8\ub2e4<\/p>\n","protected":false},"author":3,"featured_media":20549,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[86],"tags":[1000,1001],"class_list":["post-20550","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-tech","tag-1000","tag-1001","series-special-lecture"],"acf":[],"_links":{"self":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts\/20550","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/comments?post=20550"}],"version-history":[{"count":4,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts\/20550\/revisions"}],"predecessor-version":[{"id":44280,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/posts\/20550\/revisions\/44280"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/media\/20549"}],"wp:attachment":[{"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/media?parent=20550"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/categories?post=20550"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.skhynix.co.kr\/wp-json\/wp\/v2\/tags?post=20550"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}