{"id":9163,"date":"2023-10-31T00:00:00","date_gmt":"2023-10-30T15:00:00","guid":{"rendered":"http:\/\/localhost:8080\/3d-fe-nand-tlc\/"},"modified":"2025-02-13T16:27:42","modified_gmt":"2025-02-13T07:27:42","slug":"3d-fe-nand-tlc","status":"publish","type":"post","link":"https:\/\/news.skhynix.co.kr\/3d-fe-nand-tlc\/","title":{"rendered":"\ud604\uc7ac 3D \ub0b8\ub4dc\uc758 \uc140 \uc801\uce35 \ud55c\uacc4 \uadf9\ubcf5\uc744 \uc704\ud55c \ud601\uc2e0, 3D \uac15\uc720\uc804\uccb4 \ub0b8\ub4dc"},"content":{"rendered":"
\ud604\uc7ac 3D \ub0b8\ub4dc \uba54\ubaa8\ub9ac\ub294 \uc804\ud558 \ud3ec\ud68d \uc9c8\ud654\ub9c9(\uc774\ud558 CTN)*<\/span>\uc73c\ub85c \uc54c\ub824\uc9c4 \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ub9c9\uc5d0 \uc804\ud558\ub97c \uac00\ub450\uc5b4 \ub370\uc774\ud130\ub97c \uc800\uc7a5\ud55c\ub2e4. \uadf8\ub7ec\ub098 3D \uad6c\uc870\uc758 CTN \ub0b8\ub4dc\ub294 \uc140 \uac04 \uac04\uc12d\uacfc \uc218\uc9c1\uc73c\ub85c \uc778\uc811\ud55c \uc140 \uc0ac\uc774\uc758 \uc2a4\ud398\uc774\uc11c \uc0b0\ud654\ubb3c\uc758 \ub450\uaed8 \ub54c\ubb38\uc5d0 \uc140\uc744 \uc801\uce35\ud574 \uba54\ubaa8\ub9ac\ub97c \ud655\uc7a5\ud558\ub294 \ub370 \ud55c\uacc4\uac00 \uc788\ub2e4. \uc5c5\uacc4\uc5d0\uc11c\ub294 \uc774\ub7ec\ud55c \ud55c\uacc4\ub97c \uadf9\ubcf5\ud558\uae30 \uc704\ud574 3D CTN \ub0b8\ub4dc \uae30\uc220\uc758 \ub300\uc548\uc744 \ubaa8\uc0c9\ud588\ub294\ub370, 3D \uad6c\uc870\uc758 \uac15\uc720\uc804\uccb4*<\/span> \ub0b8\ub4dc(\uc774\ud558 Fe-\ub0b8\ub4dc)\uac00 \uc7a0\uc7ac\uc801\uc778 \ucc28\uc138\ub300 \uae30\uc220 \uc911 \ud558\ub098\ub85c \ub5a0\uc62c\ub790\ub2e4.<\/p>\n \uc774\ubc88 \uae30\uace0\uc5d0\uc11c\ub294 SK\ud558\uc774\ub2c9\uc2a4 RTC*<\/span>\uac00 \uc9c0\ub09c 6\uc6d4 VLSI(Very Large-Scale Integration, \uc138\uacc4 3\ub300 \ubc18\ub3c4\uccb4 \ud559\ud68c \uc911 \ud558\ub098) \uc2ec\ud3ec\uc9c0\uc5c4\uc5d0\uc11c \ubc1c\ud45c\ud55c \uc5f0\uad6c \ub0b4\uc6a9\uc73c\ub85c \uac15\uc720\uc804\uccb4 \uc0b0\ud654\ud558\ud504\ub284(HfO2)*<\/span>\uc744 \ud65c\uc6a9\ud574 3D Fe-\ub0b8\ub4dc \ud2b8\ub9ac\ud50c \ub808\ubca8 \uc140(\uc774\ud558 TLC)*<\/span>\u00a0\ub3d9\uc791\uc744 \ucc98\uc74c\uc73c\ub85c \uc2dc\uc5f0[\uad00\ub828\uae30\uc0ac]<\/a>\ud55c \uc774\ud6c4 \uc5c5\ub370\uc774\ud2b8\ub41c \ucd5c\uc2e0 \uc5f0\uad6c \ub0b4\uc6a9\uc73c\ub85c \uad6c\uc131\ud558\uc600\ub2e4. SK\ud558\uc774\ub2c9\uc2a4 RTC\ub294 3D \ub0b8\ub4dc \ud14c\uc2a4\ud2b8 \uad6c\uc870*<\/span>\ub97c \ud65c\uc6a9\ud558\uc5ec \ucd5c\ucd08\ub85c 3D Fe-\ub0b8\ub4dc \ucffc\ub4dc \ub808\ubca8 \uc140*<\/span>(\uc774\ud558 QLC)\uc758 \ub3d9\uc791 \uac00\ub2a5\uc131\uc744 \ubcf4\uc5ec\uc92c\ub2e4.<\/p>\n *<\/span> CTN(Charge Trap Nitride): \uc6b0\uc120 Nitride(\uc9c8\ud654)\ub294 \uc9c8\uc18c(N)\ub85c \ub9cc\ub4e4\uc5b4\uc9c4 \ud654\ud569\ubb3c\uc744 \ub73b\ud568. Si3N4(\uc2e4\ub9ac\ucf58 \uc9c8\ud654)\ub85c \uc608\ub97c \ub4e4\uba74, \uc9c8\uc18c\uc640 \uc2e4\ub9ac\ucf58(\uaddc\uc18c)\uacfc\uc758 \ud654\ud559 \uacb0\ud569\ubb3c\uc744 \uc758\ubbf8\ud568. \uacfc\uac70 2D \ub0b8\ub4dc\ub294 \ud50c\ub85c\ud305 \uac8c\uc774\ud2b8\ub77c\ub294 \ub3c4\uccb4\uc5d0 \uc804\ud558\ub97c \uac00\ub450\uc5b4 \uc815\ubcf4\ub97c \uc800\uc7a5\ud588\uc73c\ub098, 3D \ub0b8\ub4dc\ubd80\ud130 \ubd80\ub3c4\uccb4\uc5d0 \uc804\ud558\ub97c \uac00\ub450\ub294 \ubc29\uc2dd\uc73c\ub85c \uac1c\uc120\ub410\ub2e4. CTN\uc740 \uc9c8\ud654 \uaddc\uc18c(Silicon Nitride) \ud654\ud569\ubb3c\ub85c \ub9cc\ub4e4\uc5b4\uc9c4 \ubd80\ub3c4\uccb4 \uce35\uc744 \ub73b\ud568 3D Fe-\ub0b8\ub4dc\uc5d0\uc11c TLC\uc640 QLC \ub3d9\uc791\uc744 \uad6c\ud604\ud558\ub824\uba74 P\/E \uc708\ub3c4\uc6b0(Program\/Erase Window)*<\/span>\ub97c \ucd94\uac00\uc801\uc73c\ub85c \ud655\uc7a5\ud574\uc57c \ud588\ub2e4. \ucd5c\uadfc RTC\uac00 \uc5f0\uad6c\ud55c \uc0c8\ub85c\uc6b4 3D Fe-\ub0b8\ub4dc \uc140 \uad6c\uc870\uc758 \uc140 \uc801\uce35 \ucd5c\uc801\ud654\ub97c \ud1b5\ud574 P\/E \uc708\ub3c4\uc6b0\ub97c \ucd5c\ub300 10.54V(\ubcfc\ud2b8)\uae4c\uc9c0 \ud655\ub300\ud558\uc5ec QLC \ub3d9\uc791 \uac00\ub2a5\uc131\uc744 \ud655\uc778\ud588\ub2e4.<\/p>\n *<\/span> P\/E \uc708\ub3c4\uc6b0(Program\/Erase Window): \uc140\uc758 \uc0ad\uc81c\uc640 \uc4f0\uae30 \ucc98\ub9ac\ub97c \uc704\ud574 \uc804\uc790\uac00 \uc774\ub3d9\ud558\uba74\uc11c \ubc1c\uc0dd\ub418\ub294 \ubb38\ud131 \uc804\uc555(Vt)\uc758 \ubc94\uc704<\/p>\n \u25b2 \uadf8\ub9bc 1. Table showing key characteristics of four cell stack structures (S1\u2013S4)<\/p>\n <\uadf8\ub9bc 1>\uc740 \uc774\ubc88 \uc5f0\uad6c\uc5d0\uc11c \ud3c9\uac00\ub41c 4\uac00\uc9c0 \uc720\ud615\uc758 \uc140 \uad6c\uc870(S1~S4)\ub97c \uc694\uc57d\ud55c \uac83\uc73c\ub85c \ud45c\uc900 P\/E \uc708\ub3c4\uc6b0, \uc0ad\uc81c\uc640 \uc4f0\uae30 \ub3d9\uc791\uc744 3,000\ubc88 \ubc18\ubcf5 \ud14c\uc2a4\ud2b8\ud55c \uc774\ud6c4 P\/E \uc708\ub3c4\uc6b0\uc640 \ucc44\ub110-\uac8c\uc774\ud2b8 \ub204\uc124 \uc804\ub958 \ub4f1\uc744 \ud3ec\ud568\ud55c \uc804\uae30\uc801 \ud2b9\uc131\uc744 \ube44\uad50\ud55c \uac83\uc774\ub2e4.<\/p>\n \u25b2 \uadf8\ub9bc 2. Graphs comparing the (a) erase and (b) program performances of S1\u2013S4<\/p>\n <\uadf8\ub9bc 2> (a)\uc640 (b)\ub294 RTC\uac00 \uae30\uc874 ISPE*<\/span>\uc640 ISPP*<\/span>\ubc29\ubc95\uc744 \ud65c\uc6a9\ud574 \uc140\uc744 \uc0ad\uc81c\ud558\uace0 \ud504\ub85c\uadf8\ub798\ubc0d\ud568\uc5d0 \ub530\ub978 4\uac00\uc9c0 \uc140 \uad6c\uc870\uc758 \uc804\ub2ec \ud2b9\uc131\uc744 \ubcf4\uc5ec\uc900\ub2e4. \ud2b9\ud788, S4\ub294 \ub204\uc124 \uc804\ub958\ub97c \uc904\uc774\uace0 \uac15\uc720\uc804\uccb4 \uc801\uce35\uacfc \uc0c1\ubd80\uce35\uac04\uc758 \uc140 \uad6c\uc870\ub97c \ucd5c\uc801\ud654\ud558\uc5ec 10.54V\ub85c P\/E \ub9c8\uc9c4 \ud655\ubcf4\uc5d0 \uc131\uacf5\ud588\ub2e4.<\/p>\n * <\/span>ISPE(Incremental Step Pulse Erase): \uc804\uc555 \ub610\ub294 \ud384\uc2a4\ub97c \ub2e8\uacc4\uc801\uc73c\ub85c \uc18c\ub7c9 \ub298\ub824 \uba54\ubaa8\ub9ac \uc694\uc18c\ub97c \ud2b9\uc815 \uc0c1\ud0dc\ub85c \ud504\ub85c\uadf8\ub798\ubc0d\ud558\uac70\ub098 \uc0ad\uc81c \uc0c1\ud0dc\ub85c \uc124\uc815\ud558\ub294 \uba54\ubaa8\ub9ac \ud504\ub85c\uadf8\ub798\ubc0d \ubc29\ubc95 \u25b2 \uadf8\ub9bc 3. Line graphs for S4 showing its (a) TLC Vth distribution (b) QLC Vth distribution and (c) post 3k cycle Vth distribution<\/p>\n S4\uc5d0\uc11c\ub294 TLC\uc640 QLC \ub3d9\uc791\uc744 \ubaa8\ub450 \uc218\ud589\ud588\ub2e4. <\uadf8\ub9bc 3> (a)\ub294 S4\uc758 TLC \uac80\uc99d \uacb0\uacfc\ub85c \uc778\uc811\ud55c \ub450 \ubb38\ud131 \uc804\uc555(Vth) \uc0c1\ud0dc \uac04\uc5d0 \ucd5c\uc18c \uac2d \ub9c8\uc9c4*<\/span>\uc774 0.45V\uc784\uc744 \ubcf4\uc5ec\uc900\ub2e4. \uc774\ub294 RTC\uc5d0\uc11c \uacfc\uac70 \ubcf4\uc720\ud55c \ub370\uc774\ud130\uc778 \ucd5c\uc18c \uac2d \ub9c8\uc9c4 0.11V \ub300\ube44 \ud06c\uac8c \uac1c\uc120\ub41c \uac83\uc774\ub2e4. \ub610\ud55c <\uadf8\ub9bc 3> (b)\ub294 S4\uc5d0\uc11c P\/E \uc708\ub3c4\uc6b0\uac00 \ud655\uc7a5\ub418\uc5b4 \ucd5c\uc18c\ud55c 0.24V \uc774\uc0c1\uc758 \uac2d \ub9c8\uc9c4\uc744 \uac00\uc838 QLC \ub3d9\uc791 \uac00\ub2a5\uc131\uc774 \uc788\uc74c\uc744 \ubcf4\uc5ec\uc900\ub2e4. <\uadf8\ub9bc 3> (c)\uc5d0\uc11c\ub294 \uc0ad\uc81c\uc640 \uc4f0\uae30\ub97c 3,000\ubc88 \ubc18\ubcf5\ud558\ub294 \uc0ac\uc774\ud074\ub9c1 \uc2a4\ud2b8\ub808\uc2a4 \uc774\ud6c4\uc5d0\ub3c4 \ucd5c\uc18c\ud55c 0.14V \uc774\uc0c1\uc758 \uac2d \ub9c8\uc9c4\uc744 \uac00\uc838 QLC \ub3d9\uc791 \uac00\ub2a5\uc131\uc774 \uc788\uc74c\uc744 \ubcf4\uc5ec\uc900\ub2e4. \uc140 \uc801\uce35 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\uc744 \ud1b5\ud574 P\/E \uc708\ub3c4\uc6b0 \ud655\uc7a5\uc740 \ubb3c\ub860 \uc0ad\uc81c\uc640 \uc4f0\uae30\ub97c 3,000\ubc88 \ubc18\ubcf5\ud558\ub294 \uc0ac\uc774\ud074\ub9c1 \uc2a4\ud2b8\ub808\uc2a4 \uc774\ud6c4\uc5d0\ub3c4 QLC \ub3d9\uc791\uc774 \uac00\ub2a5\ud55c \uc218\uc900\uc73c\ub85c \ub0b4\uad6c\uc131 \uac1c\uc120\uc774 \uac00\ub2a5\ud568\ub3c4 \ubcf4\uc5ec\uc92c\ub2e4.<\/p>\n *<\/span> \uac2d \ub9c8\uc9c4(Margin): \uacb0\ud568, \uc624\ub958 \ub4f1\uc774 \ubc1c\uc0dd\ub41c \uc9c0\uc810\uc744 \uc81c\uc678\ud55c \uc548\uc815\ub41c \uc601\uc5ed\uc744 \ub9d0\ud558\ub294 \uac83\uc73c\ub85c, \uc2dc\uc2a4\ud15c\uc774 \ub3d9\uc791\ud558\uae30 \uc704\ud55c \uc5ec\uc720 \uc804\uc555\uc774\ub098 \uc804\ub958\ub97c \ub73b\ud568<\/p>\n SK\ud558\uc774\ub2c9\uc2a4 RTC\ub294 \uc704\uc640 \uac19\uc774 \uc0b0\ud654\ud558\ud504\ub284(HfO2) \uae30\ubc18 3D Fe-\ub0b8\ub4dc \uc81c\uc791\uc744 \ud1b5\ud574 \ud604\uc7ac\uc758 3D CTN \ub0b8\ub4dc\uc758 \ud55c\uacc4 \uadf9\ubcf5 \uac00\ub2a5\uc131\uc744 \uc0b4\ud3b4\ubd24\ub2e4. \uc774\ub97c \ud1b5\ud574 \uc140 \uc801\uce35 \uad6c\uc870\ub97c \ucd5c\uc801\ud654\ud558\uc5ec \ud655\uc7a5\ub41c P\/E \uc708\ub3c4\uc6b0\ub97c \uc81c\uacf5\ud568\uacfc \ub3d9\uc2dc\uc5d0 QLC \ub3d9\uc791 \uc2dc\uc5f0\uc744 \ud1b5\ud574 3D Fe-\ub0b8\ub4dc\uac00 \ucc28\uc138\ub300 \ub0b8\ub4dc \uc18c\uc790\ub85c\uc11c \uac00\ub2a5\uc131\uc774 \uc788\uc74c\uc744 \ud655\uc778\ud560 \uc218 \uc788\uc5c8\ub2e4.<\/p>\n
\n* <\/span>\uac15\uc720\uc804\uccb4(Ferroelectric, Fe): \uc678\ubd80 \uc804\uae30\uc7a5 \uc5c6\uc774\ub3c4 \uc790\uc5f0 \uc804\uae30\ubd84\uadf9\uc744 \ub098\ud0c0\ub0b4\ub294 \ubb3c\uc9c8\ub85c\uc11c \uc801\uc808\ud55c \uc804\uae30\uc7a5\uc774 \uac00\ud574\uc9c0\uba74 \ubc29\ud5a5\uc744 \ubc14\uafc0 \uc218 \uc788\ub294 \ubb3c\uc9c8
\n* <\/span> RTC(Revolutionary Technology Center): SK\ud558\uc774\ub2c9\uc2a4 \ubbf8\ub798 \uae30\uc220 \uc5f0\uad6c \uc870\uc9c1\uc73c\ub85c \u2018ORP(Open Research Platform)\u2019\ub97c \uae30\ubc18\uc73c\ub85c \ud65c\ubc1c\ud55c \uc5f0\uad6c \ud611\ub825\uacfc \ud559\uc220 \ud65c\ub3d9\uc744 \ud1b5\ud574 \ucc28\uc138\ub300 \uae30\uc220\uc744 \uc5f0\uad6c\ud568 [\uad00\ub828\uae30\uc0ac]<\/a>
\n* <\/span>\uc0b0\ud654\ud558\ud504\ub284(HfO2): \uace0\uc720\uc804\uc728(High-k) \uc720\uc804\uccb4\ub85c\uc11c \ub192\uc740 \uc720\uc804\uc0c1\uc218, \uc5f4\uc5ed\ud559\uc801 \uc548\uc815\uc131\uacfc \uc99d\ucc29\uc758 \ub2e8\uc21c\uc131\uc73c\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc\uc5d0 \uc801\uc6a9\ub418\ub294 \ubb3c\uc9c8
\n* <\/span>\ud2b8\ub9ac\ud50c \ub808\ubca8 \uc140(Triple Level Cell, TLC): \ub0b8\ub4dc \ud50c\ub798\uc2dc \uba54\ubaa8\ub9ac\uc758 \ud55c \ud615\ud0dc\ub85c\uc11c \uba54\ubaa8\ub9ac \uc140\ub2f9 \ucd5c\ub300 3\ube44\ud2b8\uc758 \ub370\uc774\ud130\ub97c \uc800\uc7a5\ud560 \uc218 \uc788\uc74c
\n* <\/span>\ud14c\uc2a4\ud2b8 \uad6c\uc870(Test Vehicle): \uc7a5\uce58 \ud2b9\uc131\uc744 \ud3c9\uac00\ud560 \ubaa9\uc801\uc73c\ub85c \uc81c\uc791\ud55c \uad6c\uc870
\n* <\/span>\ucffc\ub4dc \ub808\ubca8 \uc140(Quad Level Cell): \ub0b8\ub4dc \ud50c\ub798\uc2dc \uba54\ubaa8\ub9ac\uc758 \ud55c \ud615\ud0dc\ub85c\uc11c \uba54\ubaa8\ub9ac \uc140\ub2f9 \ucd5c\ub300 4\ube44\ud2b8\uc758 \ub370\uc774\ud130\ub97c \uc800\uc7a5\ud560 \uc218 \uc788\uc74c<\/p>\nP\/E \uc708\ub3c4\uc6b0 \ud655\uc7a5\uc744 \uc704\ud55c \uc774\uc0c1\uc801\uc778 \uc140 \uad6c\uc870 \ucc3e\uae30<\/h3>\n
<\/p>\n
<\/p>\n
\n* <\/span>ISPP(Incremental Step Pulse Programming): \ud06c\uae30\uac00 \uc99d\uac00\ud558\ub294 \uc77c\ub828\uc758 \ud504\ub85c\uadf8\ub798\ubc0d \ud384\uc2a4\ub97c \uba54\ubaa8\ub9ac \uc140 \uc120\ud0dd\uc5d0 \uc801\uc6a9\ud558\uc5ec \uc784\uacc4 \uc804\uc555\uc744 \uc810\ucc28 \ub192\uc774\ub294 \uba54\ubaa8\ub9ac \ud504\ub85c\uadf8\ub798\ubc0d \ubc29\ubc95<\/p>\n<\/p>\n
\uc0c8\ub85c\uc6b4 \uc2dc\ub300\ub97c \uac1c\ucc99\ud558\ub294 3D Fe-\ub0b8\ub4dc<\/h3>\n